Piping: Base Mounted, Stations & Port Location: 12 Stations (Type 20, 21, 41, 42), Port Size: ø6 One-touch Fitting, Thread: -

Base Mounted Wiring: Plug-in w/D-Sub Connector on Both Sides, Stations: 12 Stations, Port Size: One-touch Fitting/Applicable Tube OD ø6, Thread: -, Control Unit: -

Thomas Oil-less Articulating Piston Compressor Voltage (60 Hz): 115V, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 8 in / 203 mm Width: 4.75 in / 121 mm Height: 6.75 in / 172 mm , Length: 8 in / 203 mm, Width: 4.75 in / 121 mm, Height: 6.75 in / 172 mm, Net Weight: 9.3 lbs. / 4.22 Kg Internal Code: G3300963 Billing Code: 4Z791

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 115/60/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 12.5 PSIG / 121 in H20 / 300 mbar , 12.5 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 115/60/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 12.5 PSIG / 121 in H20 / 300 mbar , 12.5 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

33.7 17 19 AS3001F-06T 6 12.8 59 7.4 45 17 56 AS2051F-05T 3/16" 11.4 52.2 6.2 34.9 16.5 35 AS3001F-08T 8 15.2 64.4 8.2 45.8 18 60 AS2051F-07T 1/4" 15.5 7 1.5 13.2 54.4 7.1 35.7 17 33 20.6 9.5 1.5 AS3001F-10T 10 18.5 71.6 9.8 47.3 21 64 AS2051F-09T 5/16" 15.2 59.8 8.1 36.7 18 36 AS3001F-12T 12 20.9 76 11 48.5 22 68 AS3001F-07T 1/4" 13.2 59 7.4 45.2 17 56 AS4001F-10T 10 18.5 55.4 21 77.7 121

Basic Type/Direct Mount Type

44 55 67 85 97 CB 2 2 2 3 3 3 5 5 5 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121

Brake mechanism added

112 121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.

Round Type Hydraulic Cylinder

5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

Pin Clamp Cylinders

181 241 302 362 422 13.5 to 20.0 121 181 241 302 362 422 483 543 603 Note 1) It takes approximately 0.3 seconds for the cylinder to operate to generate clamping force from an unclamping state (when no speed controller is installed).

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

112 121 19 Series CLA2 Minimum Stroke for Auto Switch Mounting n: Number of auto switches [mm] Auto switch model Number of auto switches Brackets other than center trunnion Center trunnion 40 50 63 80 100 2 (Different surfaces, same surface), 1 15 80 95 110 115 D-M9l D-M9lW D-M9lA n (n = 2, 4, 6, 8) Note 1) 15 + 40 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121

CNA

31 4 2 8.5 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5 50 50 9.5 86.5 2 10.5 0 78 35 4 2 8.5 77 0 0.5 11.5 1.5 43.5 78.5 77 42.5 0 0 86 3.5 42 49 63 63 13 93.5 4.5 13 2 85 42 6.5 5.5 12 91 1.5 3 14 5 50.5 85.5 91 48 2.5 3.5 93 6 50 55.5 80 80 15.5 102 8 16.5 4.5 93.5 50 10 8 14.5 107 4 6.5 17.5 7.5 59 94 107 54 6 6 101.5 9.5 57.5 63 100 100 18 112 9.5 18 7 104 57.5 11.5 10.5 17 121

CP95

D EE PL RT I12 KK SW G BG (MIN) L8 E R VD VA WA WB WH ZZ ZY I2 I9 M10 x 1.25 32 22 30 12 G 1/8 13 M6 x 1 6 10 27 16 94 4 4 4 6.5 26 146 190 46 32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

549 519 L L1 L2 1445 VT317 Series Dimensions: Individual Exhaust Without mounting bracket/VV317-02-3-02 2 x 7 mounting hole Manual override (Non-locking) (Station 1) (Station n) Conduit (C) DIN terminal facing upward (136.6) Conduit terminal (T) Grommet (G) DIN terminal (D) 2n x 1/4 Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 2 121

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

XM, XY

92.1 10.5 9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121

100

With pressure gauge With vacuum pressure detection port Branch Dimensions ZL6mmm-m (Without supply valve or release valve) ZL6 Without valve Branch Vacuum (2/V) port1 2(V) 2(V) 2 x Rc1/2, G1/25, NPT1/2 (Recommended tightening torque: 28 to 30 Nm) 2(V) 1(P) With vacuum With pressure Branch Silencer exhaust EXH With vacuum pressure switch pressure detection port gauge EXH. port exhaust G 121

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.

NCQ8

OUT IN Theoretical Output Table Unit: lbs Bore size (in) Operating direction Operating pressure/PSI (MPa) 45 (0.3) 75 (0.5) 145 (1.0) 200 (1.4) IN 8.87 14.6 28.6 39.2 056 (9/16") OUT 11.1 18.2 35.7 48.9 IN 16.4 27.0 52.9 72.5 075 (3/4") OUT 19.9 32.7 64.1 87.8 IN 30.8 50.8 99.5 136 106 (1-1/16") OUT 39.7 65.3 128 175 IN 65.7 108 212 290 150 (1-1/2") OUT 79.5 131 256 351 IN 121 200 391 536