Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

SY

20 20 stations D R Includes the number of blanking plate assemblies.

Table of Contents

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 2 Stations, A B Port Size: 00T (NPTF)

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 5 Stations, A B Port Size: 00T (NPTF)

Series: 5 (VFA5000), Manifold: 20 (P.R Port Size 3/8), Stations: 03, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Series: 5 (VFA5000), Manifold: 20 (P.R Port Size 3/8), Stations: 02, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Series: 5 (VFA5000), Manifold: 20 (P.R Port Size 3/8), Stations: 04, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Series: VQZ300, Stations: 20 Stations, Option: DIN Rail Mount w/o DIN Rail, Thread: 00T, CE Compliant: -

Series: VQZ200, Stations: 20 Stations, Option: None, Thread: 00T, CE Compliant: -

Series: VQZ300, Stations: 20 Stations, Option: None, Thread: 00T, CE Compliant: -

Manifold Type: 20 (Body Ported, Bar Manifold, Individual Wiring), Valve Stations: 12 Stations, A, B Port: 00T (NPTF)

Series: 2 (VQ20), Stations: 20 Stations, Option: DO (DIN Rail Mount w/o DIN Rail), Thread: 00T (NPTF3/8)

Series: 3 (VQ30), Stations: 20 Stations, Option: D (DIN Rail Mounting), Thread: 00T (NPTF3/8)

Series: 2 (VQ20), Stations: 20 Stations, Option: D (DIN Rail Mounting), Thread: 00T (NPTF3/8)

Valve Mounting Direction: Solenoid on the Side Opposite to A Port, Piping: 20R (Body Ported), Stations: 20 Stations, A Port Size: None, P R Port Thread: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 7 Stations, A, B Port: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 3 Stations, A, B Port: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 4 Stations, A, B Port: 00T (NPTF)