0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

45 50 60 80 100 125 150 10 C55-L025 C55-F025 C55-C025 25 20 113 126 139 152 165 178 191 204 216 229 255 307 359 424 489 C55-L032 C55-F032 C55-C032 32 25 185 201 217 232 248 263 279 294 325 388 450 528 606 154 170 C55-L040 C55-F040 C55-C040 40 32 299 321 343 366 388 410 432 455 499 588 677 788 900 254 277 C55-L050 C55-F050 C55-C050 50 40 368 392 416 441 465 489 513 537 586 683 780 901 1022

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

4/5 Port Air Operated Valve SYJA3000 Series

SYJA3 20 1 M3 Body ported Base mounted (4 port) (Manifold use only) SYJA3 30 2 Base mounted (5 port) SYJA3 40 2 Port size Type of actuation Nil Without sub-plate 4 3 2 position double 2 position single 2 1 M5 port With sub-plate M5 3 position closed center Symbol 5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B)2 4(A) (B)2 4(A) 1

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Exhaust center VQ1401 25 or less 1.0 0.70 0.30 0.20 0.25 47 or less 0.16 33 or less Rubber seal VQ1500 0.72 0.70 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal 20

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Exhaust center VQ1401 25 or less 1.0 0.70 0.30 0.20 0.25 47 or less 0.16 33 or less Rubber seal VQ1500 0.72 0.70 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal 20

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

5 Port Solenoid Valve

Bore size CJ2 series Pressure 0.5 MPa Load ratio 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load ratio 50% Stroke 300 mm CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] 6 10 16 125 140 160 180 200 250 20 25 32 40 40 50 63 80 100 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward

VK300

(S) 42 VV5K3-40 (S) 41 (S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

VKF300

Type 40 Easy manual operation Since manual overrides are located in 2 directions, on the top and on the side of the valve, manual override operation is possible unaffected by mounting space and piping direction, etc. Ozone resistant (Series 80-) FKM (fluororubber) is used for the fluidcontact rubber materials, allowing use even in ozone environments.

VK300

(-Q) (S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT Type 42 Type S42 1 (P) 3 (R) (Valve leakage: 0.03 cm3/s He or less) Can be used in vacuum/release circuits VP VG Universal porting Type 40 VP N.C.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Type 40 Easy manual operation Since manual overrides are located in 2 directions, on the top and on the side of the valve, manual override operation is possible unaffected by mounting space and piping direction, etc. Ozone resistant (Series 80-) FKM (fluororubber) is used for the fluidcontact rubber materials, allowing use even in ozone environments.

JXCx-OMT0030CN

CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23 62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123 IN Data . 39 124 OUT Data . 41 13LEC . 42 131 LEC . 42 132 . 43 14/ . 44 15/ . 45 151 . 45 152

Digital Gap Checker

Even if the orifice is clogged with foreign matter, By removing the setting dial for S3, variations in the product construction enables cleaning with the detection distance are prevented. the internal orifice removed. 1: Except F type 2 3-Color Display Digital Gap Checker ISA3 Series Compact & Lightweight Volume: 40% reduction 63 38 45 Weight: 55% reduction (Comparison between the ISA3-GC

Pneumatic Purification

PRESSURE FREON DIMENSIONS (INCHES) WEIGHT DEWPOINT DEWPOINT DEWPOINT CFM CFM MAX PSIG A B C lbs IDF3D-S 5.8 12 115/1/60 3/8 145 R134a 8.9 14.1 18.5 39.7 IDF4D-S 8.1 18 115/1/60 3/8 215 R134a 9.5 18.9 23.9 57.3 IDF6D-S 12.6 26 115/1/60 1/2 215 R134a 8.7 23.6 20.5 70.5 IDF8D-S 16.5 35 115/1/60 3/4 215 R134a 8.7 23.6 20.5 70.5 IDF11C-S 25 53 115/1/60 3/4 215 R22 10.2 24.4 22.4 103.6 IDF15C-S 40

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Pressure: 0.5MPa Pressure: 0.5MPa speed Effective area Load ratio: 50% Load ratio: 50% (mm/s) mm2 Cylinder stroke: 60mm Cylinder stroke: 300mm (Cv) 6 10 16 20 25 32 40 150 300 VQD1151U M5 X 0.8 (Large flow 1.5 450 capacity) (0.08) 600 Characteristic values mentioned in the catalog are typical values and are not to be guaranteed. 750 1.13-1 Series VQD1000 Precautions Be sure to read before

Foot Pedal Type

MODEL VM2 SMC 54 71 177 152 Lock lever LOCK UNLOCK T.T. 2.5 (70) 30 18.5 11 B A XT34-60/67 2 x Rc1/8 (Port 2, 4) 38.2 26.2 2 x M5 x 0.8 (Port 3, 5) Rc1/8 (Port 1) 14-E624 0.2 32 A 2 x M5 x 0.8 (Port 3, 5) 39.2 33.2 27.2 XT34-60/67 2 x Rc1/8 (Port 2, 4) Rc1/8 (Port 1) 3 x 6.5 mounting hole 53 XT34-67 (Without lock) 159 3 x 6.5 mounting hole MODEL VM2 SMC 54 71 177 152 T.T. 2.5 (70) 30 18.5

MGP

Values) Horizontal load Note: 1N = 0.2248 lbf 1in = 25.4mm Displacement MGPA32, 40 MGPA12 0.4 0.8 MGPA -400 32 40 32 40 MGPA12-250 MGPA12-250 MGPA -400 0.35 0.7 Plate displacement mm Plate displacement mm 0.3 0.6 MGPA -300 32 40 MGPA -300 32 40 0.25 0.5 MGPA12-150 MGPA12-150 MGPA12-100 MGPA -200 32 40 MGPA12-100 MGPA -200 32 40 0.2 0.4 MGPA12-75 MGPA12-75 MGPA -150 32 40 MGPA -100 32 40

Table of Contents

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5