TABLE OF CONTENTS

70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Electric Actuator

to 300 30 to 400 30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 25 32 Size 25 32 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 CAT.NAS100-83 Slider Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor (100/200/400 W) Ball Screw Drive

Refrigerated Air Dryers Series IDF/IDU

, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 (mm) Dimensions 30 mA B D C A E F Model 10 A IDF22E-20 IDF37E-20 IDF22E-30 IDF37E-30 IDF55E-30 IDF75E-30 IDU22E-30 IDU37E-30 IDU55E-30 IDU75E-30 200 V type 59 40 46 25 125 IDF75E-30, IDU75E-30 IDF120D IDF150D IDF190D IDF240D IDF370B 15 A 39 60 30 A 60 81 148 45 A 36 50 73 133 60 A 74 151 75 A 46 122 146 50 80 A 60 60 55 148 36 73 166

ZP

40 147.5 70.5 77 50 157.5 80.5 16 29 B5 04 06 N6 U6 D2 J: 2.5 K: 2 M10 x 1 A10 14 3 8 M5 x 0.8 10 67 44 23 20 105 54 51 30 115 64 40 151 74 77 50 161 84 N S U F GN GS Construction p. 118 20 32.5 J K Buffer Assembly p. 124 ZP T B 10 67.5 44.5 23 20 105.5 54.5 51 30 115.5 64.5 40 151.5 74.5 77 50 161.5 84.5 25 33 10 72.5 49.5 23 20 110.5 59.5 51 30 120.5 69.5 40 156.5 79.5 77 50 166.5 89.5

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

shaft side 40 40 18 to 30 4.5 to 30 18 to 30 3 to 30 Y = Size: 10 to 30 Size: 40 Symbol: A57 Shorten both long and short shafts.

Refrigerated Air Dryers

, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15 A IDF100F 30 A IDF125F IDF150F IDF190D 50 A IDF240D IDF370D 60 60 50 46 IDU37E-30 146 122 IDU55E-30 148 55 36 IDU75E-30 166 73 70 IDF100F to 150F Dimensions [mm] A Model A B IDF100F 434

AC

Applicable model AW3000 AW4000 AW4000-06 Model 1/4 1/4 Port size 3/8 3/4 3/8 1/2 How to Order How to Order 30 03 BG3 00 AW X430 30 03 BG3 00 AW X470 Body size For environment at low/high temperatures 3/8 30 40 Body size External metallic part 1/2 1/8 20 30 40 X430 X440 Low temp. High temp.

Air Cylinder

30 31 30 34 30 30 30 30 30 38 30 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 34 34 35 34 38 34 34 34 34 34 42 34 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 41 41 41.5 41 44 41 41 41 41 41 49 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 49.5 49 50 49 52.5 49 49.5 49 49.5 49 56 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 58.5 56 61 56 56.5

LG1H

0 Transfer load m (kg) L2 600 400 L2 (mm) Mer m Rolling Yawing 200 L2 Mer m 10 20 30 0 Transfer load m (kg) 4000 a = 1000 L3 (mm) L3 a = 2000 2000 a = 3000 Mey m a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 152 7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

CHKD/CHKG

33 M27 x 3 33 9 13 52 30 121 23 depth 15.2 151 18 78 45 172 41 38 36 M30 x 3.5 14 15 63 35 144 26 depth 17.5 179 22 96 56 208 50 43 45 M39 x 4 21 17 76 40 174 Note 1) Body dimensions are the same with or without auto switches.

ZP

25 27 29 30 25 27 30 31 26 10 ZPT 20 25 29 31 33 27 30 32 33 28 31 34 35 30 ZPT 32 40 50 ZPT ZPT 10 57 129 135 132 138 133 139 33 34 30 129 131 134 134 143 129 133 34 140 147 153 160 144 151 141 147 36 38 141 148 39 145 152 Weight by Stroke (g) 15 20 25 30 40 50 Stroke (mm) Model 10 ZPT2004 3507 4010 ZPT02 to 08 thin section series 10 to 16 +6 +7 +8 ZPT10 to 25 ZPT40 to 50 +11 +38 +13 +

Environment

, 50, 100, 150, 200 250, 300, 350, 400 30, 50, 100, 150, 200 250, 300, 350, 400, 450, 500 For LECP6 LECP1 LECPMJ (3000 [mm/s2]) 20 40 60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note

ZP

26 25 27 29 30 25 27 30 31 26 10 ZPT 20 25 31 33 29 27 30 32 33 28 31 34 35 30 ZPT 32 40 50 ZPT ZPT 10 33 34 57 129 135 132 138 133 139 30 129 131 134 134 143 129 133 36 38 141 148 39 145 152 34 140 147 153 160 144 151 141 147 Weight by Stroke (g) 15 20 25 30 40 50 Stroke (mm) Model 10 ZPT2004 3507 4010 ZPT02 to 08 thin section series 10 to 16 +6 +7 +8 ZPT10 to 25 ZPT40 to 50 +11 +38 +13

MGG

(mm) Bore size (mm) Stroke range (mm) AC AF AB AE AA AD AP N M L F K C E J A B D G H I 20 25 32 40 50 75, 100, 125, 150, 200 11 30 16.5 M5 x 0.8 depth 10 12 75 25 45 25 80 60 92 55 99 24 5.5 M8 x 1.25 depth 14 108 60 30 9.5 depth 6 13 16.5 30 M6 x 1 depth 12 16 85 30 54 35 100 70 113 65 109 26.5 6.6 M10 x 1.5 depth 18 130 65 35 11 depth 8 75, 100 125, 150 200, 250 300 16 35 19 M6 x 1 depth

AC Servo Motor Driver (CC-Link Type ）

OFF: Lock is activated. 4 30 4.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

For details, refer to page 8-30-52. Wide range detection type, solid state auto switch (D-G5NBL type) is also available. For details, refer to page 8-30-50.

AC Servo Motor Driver

Regenerative power [W] Built-in regenerative Driver LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSB-S5 30 LECSB-S7 10 30 100 LECSB-S8 10 30 100 Note 1. Always install a cooling fan. 2.

Air Fittings & Tubing

Weight (g) L A M d 7 34 32 KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 2 6 2 5 M5 X 0.8 29 13 4 2.5 1 8 M5 X 0.8 10 30 14 33 35 37.5 39 41 46 2.5 7 30 31 13 14 6 1 8 10 4.5 1 4 14 14 31.5 33 14.5 14.5 KQ2N06-02S 14 1 4 KQ2N08-02S 17 8 6 3 8 KQ2N08-03S 17 17 7.5 34.5 39.5 16 18.5 30 31 10 3 8 KQ2N10-03S Nipple: KQ2N Part No.