Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Z (Example) A53Z 103 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Models Light Principle parts are light weight aluminum alloy.

Compact Cylinder with Air Cushion and Lock Series RLQ

A A1 E1 L1 MM RR1 U1 NZ L 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 36 41.6 +0.5 +0.3 +0.058 0 -0.3 -0.5 +0.058 0 44 50.6 +0.5 +0.3 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 Knuckle Pin (Also used as double clevis pin) Rod End Nut d d Dd9 C m m l L t t H B Material: Carbon

ARM10/11

B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592

Stroke Reading Cylinder and Counter

Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BA D-F79F D-F7NT Auto switch model D-F7V D-F7WV D-F7BAV D-J79C D-A79W D-A9V D-M9V D-M9WV D-M9AV D-A7 D-A80 D-A73C D-A80C Bore size (mm) U 20.5 25.5 27 30.5 36.5 40 U 20.5 25.5 29 32.5 38.5 42 U 20.5 25.5 32.5 36 42 48.5 U 26.5 31.5 38.5 42 48 54.5 U 23 28 35 38.5 44.5 51 U 26 31 38 41.5 47.5 54 U 22 27 34 37.5 43.5

MHZ2/MHZJ2

Control circuits containing auto switches may malfunction due to noise from these other lines. 42 Series MHZ2/MHZJ2 Auto Switch Precautions 2 Be sure to read before handling.

VQ5000

mA), 0.5 W DC (21 mA) (3) 24 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Note (3) 12 VDC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Power consumption (Current) 3 position pressure center 2 position double (Metal) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Refrigerated Air Dryer

AFF Select accessories sold separately. 6 Refer to page 103.

CM2

12.5 25 37.5 50 75 100 125 149 162 174 187 212 237 262 19 36 32 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 181 194 206 219 244 269 294 22 46 40 Built-in One-touch fitting Boss-cut With air cushion Bore Bore ZZ N1 G WA P WB Q Bore 20 20 With gaiter Without gaiter 17.5 8 13 6 8.5 23 1 to 50 25 25 17.5 8 13 6 10.5 26 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 t o500 103

High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P Port) (42.9 ) (20.0) (15)

EXxx-OMZ0016

Before starting the software 30 Download the I/O Configurator (NFC version) 33 Start the I/O Configurator (NFC version) 34 Screen Layouts of the I/O Configurator (NFC Version) 35 Monitoring and setting up 37 Setting/Adjustment of the Wireless Unit 38 Parameter settings of a Remote (optional) 38 Remote setting 38 Parameter settings of the Base 40 CC-Link setting 40 System setting 42

VXR21/22/23

53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20

VQ

7 5 5 5 4.9 9.7 4.9 3-M5 (M3) (18.1) ( ): M3 Broken line: locking style manual override 2.9-8 Series VQ100 Dimensions L plug connector VQ1l0l-lLlM5 (M3) (37.8) 31.4 Manual override 6.1 4.9 12.4 14.8 SY Lead wire color: Black E Lead wire color: Red 2-2.7 SYJ 12 3.7 (Mounting hole) 18.1 (Lead wire length) (Latching) VK Latching and large flow capacity style (Lead wire length) 35.6 300 42

Basic Type/Direct Mount Type

26 30 46 42 28 32 48 44 32 48 44 17.5 21.5 76.5 56.5 72.5 60.5 19.5 23.5 87.5 35.5 67.5 83.5 39.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

13.5 Prepared hole diameter 3.3 2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42

CXT

6.5 9 6.5 9 38.5 42 38 41.5 6.5 10.5 10 14 Bore size (mm) Long stroke 32 40 9.5 13 17.5 23.5 31.5 35 7 10.5 15 21 34 37.5 10 13.5 18 24 35 38.5 10.5 14 18.5 24.5 38.5 42 10 13.5 10 13.5 18 24 18 24 38.5 42 38 41.5 Bore size (mm) 3.8-13 World Wide QS\E Support...

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U D-F9BAL A Auto switch mounting heights (mm) D-A7H D-A80H D-J79 D-J79W D-F7 D-F7F D-F7NTL D-F7BAL D-F7W D-A73C D-A80C D-F7WV D-A7 D-A80 D-F9V D-F9WV D-F9BAL D-J79C D-A79W D-A9V D-F7V D-F7BAVL Bore size (mm) U U U U U U U U U 20 31 24.5 25.5 31.5 28 27 32 38 29 31.5 32.5 38.5 35 34 26.5 27 40 41.5 32.5 35 36 42 38.5 37.5 30 30.5 50 47.5 38.5 41 42 48 44.5 43.5 36 36.5 63 54 42 47.5 48.5

3 Position Cylinder Series RZQ

U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 40 35 36 42 38.5 44 41.5 37.5 30.5 32.5 30 50 41 42 48 44.5 47.5 50 43.5 36.5 38.5 36 63 47.5 48.5 54.5 51 54 50 56.5 40 42 39.5 12 Series RZQ Auto Switch Mounting Follow the procedures below to mount auto switches.