PF-OMN0009_C

63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W521 56 76.6 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0009CN-F PF3W504/520/540/511/

Model Selection 1

5 2 3 Union tee LQ2T 4 P. 17-5-123 5 Note) Basic size With reducer 17-5-95 24 Series LQ 1 2, LVN, TL/TIL Port size Tubing O.D.

XL

In the case of gases which cause a large amount of deposits, heat the valve body or use a model with heater to prevent deposits in the valve. 42 Specific Product Precautions 2 Series XL Be sure to read before handling. Mounting Operating Environment & Vacuum Characteristics Caution Caution All models 1.

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

VQ20/30

L 62 6 9 12 15 18 21 24 27 30 33 36 39 42 45 47 50 53 56 59 785.5 85.5 123 160.5 198 235.5 273 310.5 348 385.5 423 460.5 498 535.5 573 598 635.5 673 710.5 748 DIN rail mounting bracket VVQZ100-DB-5 This bracket is used for mounting the manifold on the DIN rail. DIN rail mounting bracket is attached on the manifold. 1 set of DIN rail mounting brackets for 1 manifold includes 2 brackets.

42

5 Port Solenoid Valve VQ4000/5000 Series Metal Seal Rubber Seal VQ4000 SV VFS3000 Installation volume 42% SYJ SZ Reduction VF VP4 123 96.5 Installation area 26% VQ 1/2 VQ 4/5 VQ 4/5 Reduction 201 VQC 1/2 163 240 VQC 4/5 185 Compact and large flow capacity VQZ SQ Possible to drive cylinders up to 160 VQ4000 VQ5000 VFS Possible to drive cylinders up to 180 When the average speed is 200 mm

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 25 30 30 29.5 27 29 25.5 27 31 24 30 17 (25) 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 32 33.5 33.5 33 30.5 30 26.5 28 32 25 31 19 (28) 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 40 38 38 37.5 35 34.5 31 32.5 36.5 29.5 35.5 24 (36) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 50 43.5 43.5 43 40.5 42

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

Table of Contents

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 15 12.8 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

Table of Contents

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7/D-J79 D-F7W D-J79W D-F79F D-F7NT Auto switch model D-P3DW D-A9V D-M9V D-M9WV D-M9AV D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-J79C D-A79W D-P4DW U 34.5 38 44 47.5 57.5 67.5 U 31.5 35 41 47.5 57.5 67.5 U 44 50 56.5 66.5 76.5 U 27 30.5 36.5 40 50 60 U 29 32.5 38.5 42 52 62 U 32.5 36 42 48.5 58.5 68.5 U 38.5 42 48 54.5 64.5 74.5 U 35 38.5 44.5

KJ

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 15 12.8 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

ISO Standard Hydraulic Cylinder

18 M12 x 1.25 12 M20 x 1.5 74 134 104 25 88 89 129 7 199 28 75 28 42 9 24 53 11 25 57 33 1/2 29 67 63 25 to 800 90 64.3 39 17 M12 x 1.25 12 M27 x 2 80 136 111 32 90 100 150 12 216 90 36 50 68 32 1/2 36 71 36 13 30 13 55 33 -0.009 -0.054 80 25 to 800 115 82.7 46 20 M16 x 1.5 16 M33 x 2 93 159 123.5 40 123 127 191 15 251 115 45 60 76 41 3/4 44 77 45 9 41 17 66 40 100 25 to 1000 130 96.9 47

C85

(126.5) {154(157.5)} 8 16 3.2 4.5 40 35 26 3.2 30 25 11 22 23.8 12.8 4.5 12.8 5 10 16 3.2 4.5 40 35 26 3.2 30 25 11 22 23.8 12.8 4.5 12.8 5 12 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 16 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 20 91{116} 141 166 25 5 6.6 66 54 42 5 50 40 17 40 36 19 6.6 19 8 96{121} 103{128} 146 171 153 178 25 98{121.5} 146.5 171.5 25 5 6.6 66 54 42 5 50

C85

(126.5) {154(157.5)} 8 16 3.2 4.5 40 35 26 3.2 30 25 11 22 23.8 12.8 4.5 12.8 5 10 16 3.2 4.5 40 35 26 3.2 30 25 11 22 23.8 12.8 4.5 12.8 5 12 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 16 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 20 91{116} 141 166 25 5 6.6 66 54 42 5 50 40 17 40 36 19 6.6 19 8 96{121} 103{128} 146 171 153 178 25 98{121.5} 146.5 171.5 25 5 6.6 66 54 42 5 50

AC Servo Motor Driver

The life of battery is five years from the production date regardless of the connection. (2) Configuration Positioning module I/O module QD75 QX40 41 42 QY40 41 42 50 A1SD75 AX40 41 42 AY40 41 42 FX2N-1GP FX2N-10PG FX2N-10GM FX2N-20GM FX2N(c) series FX3U(c) series Programmable controller Servo amplifier PC or PLC...etc Driver QD75 etc.

Compact Cylinder Series CQS

JIS Symbol Theoretical Output (N) OUT IN Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 0.3 0.5 0.7 IN 84.8 25 42 59 12 6 OUT 113 34 57 79 Made to Order Specifications (For details, refer to pages 1401, 1426 and 1508.)

CQS

MU Theoretical Output (N) DOperating pressure (MPa) Piston area (mm 2) Rod size (mm) Operating direction Bore size (mm) 0.7 0.5 0.3 -X IN 12 6 59 42 25 84.8 20OUT IN 16 8 106 75 45 151 Data OUT Mounting IN 20 10 165 118 71 236 1. When removing a load, be sure to secure the wrench flats of the piston rod on the load side. 2.

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8