Series: VP300, Exhaust Type: Common Exhaust, Pilot Type: Internal Pilot, Stations: 8 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPTF

Series: VP300, Exhaust Type: Common Exhaust, Pilot Type: Internal Pilot, Stations: 2 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPTF

Series: VP300, Exhaust Type: Common Exhaust, Pilot Type: Internal Pilot, Stations: 10 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPTF

Series: VP300, Exhaust Type: Common Exhaust, Pilot Type: Internal Pilot, Stations: 14 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPTF

NAAMS Standards Compliant

RB (Right arm) RC (Left arm) Release point Pivot point with square flats Nh9 RW L LA0.1 LB PD0.05 PB0.02 E PC0.05 PA0.02 GB GA C 2 x 2 x P H7 depth D 2 x 2 x MM depth J 2 x 2 x NPT 1/4 G Rc Hexagon socket head plug RD B [mm] Bore size B C D E GA GB J L LA LB MM N P Rubber cover Metal cover 50 92 48 12 13.7 95 166 12 376.6 155.5 78.4 78.4 M8 x 1.25 19 8 63 110 54 15 16.6 99 171.5 12 391.6 161

Micro Mechanical Valve Series VM1000

VM122-M5-06SA VM132-M5-06SA VM-06BS 45 g Cross roller plunger Polyacetal roller VM120-01-07A VM130-01-07A VM120U-01-07A VM130U-01-07A VM122-M5-07A VM132-M5-07A VM-07B 43 g Hard steel roller VM120-01-07SA VM130-01-07SA VM120U-01-07SA VM130U-01-07SA VM122-M5-07SA VM132-M5-07SA VM-07BS 45 g Toggle lever VM120-01-08A VM130-01-08A VM120U-01-08A VM130U-01-08A VM122-M5-08A VM132-M5-08A VM-08B 41

MLGP

pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 314 283 251 220 188 157 126 94 63 314 OUT 20 10 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246 196 147 98 491 OUT 25 12 378 340 302 265 227 189 151 113 76 378 IN 1 pc. 15 5 10 20 25 804 724 643 563 482 402 322 241 161

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1.5 GB 17 19.5 31.5 H 28 37 58 L 80 110.8 180 LA 70 100 158 NE 27 35.5 56.5 NH 3 4 5 NT 4.7 6.5 9 G 8.5 10.7 15.5 LW 120 176 229 M 9 12 16 N 20 25 40 NC 14 21.3 32.4 A 80 105 165 B 9.5 14 17.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 LE 5 6 8 (LL) 40 49.6 75 LD 5.5 9 11 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 1/8 1/4 PF 10 12 20 PC 4 9.4 8.5 PD 23 29.2 36 PG 10 12.5 20 PH 10.2 13 18.5 PI 41

240

Positioning repeatability: 0.05 mm Possible to set position, speed and force. (64 points) LEF LEJ LEL LEM Rod Type LEPY Series Page 374 Size: 6, 10 LEPY6-25 240 g Weight LEY LES LEPY LEPS LEPY LEPS LER LEH LEY -X5 30 mm 11LEFS 125.6 mm 11LEJS 20.5 mm 25ASlide Table Type LEPS Series Page 383 Size: 6, 10 LEC LEPS6-25 290 g Weight LEC S LEC SS-T LEC Y Linear guide integrated Motorless LAT 41

48

1.63 2.36 3.09 3.82 63 (45 x 2) 1.60 2.03 2.89 3.74 4.60 80 (56 x 2) 2.81 3.47 4.79 6.12 7.44 100 (71 x 2) 4.48 5.40 7.22 9.05 10.87 [N] direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 12 (10 x 2) 6 OUT 157 31 47 63 79 94 110 IN 101 20 30 40 50 60 70 16 (12 x 2) 6 OUT 226 45 68 90 113 136 158 IN 170 34 51 68 85 102 119 20 (16 x 2) 8 OUT 402 80 121 161

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 528 Series AS Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions AS-FE KE Reference dimensions Note 1) Dimension for AS1000-M5

MRQB-OM0002

5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15 2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161

MLGP

MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5 29.5 174 196 199 36 46 41

CYV

tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnet Holding Force Theoretical Output (N) Magnet holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm) 0.1 0.2 0.3 15 59 15 32 18 35 53 176 268 32 80 161

CYP

M5 x 0.8 Rc 1/8 Weights (kg) Standard stroke (mm) Model 100 150 200 250 300 350 400 450 500 600 700 CYP15 1.2 1.4 1.6 1.7 1.9 2.0 2.2 2.4 2.5 2.8 3.2 CYP32 4.2 4.6 5.0 5.5 5.9 6.3 6.7 7.1 7.5 8.3 9.1 Magnet Holding Force Magnet holding force (N) Bore size (mm) 15 59 32 268 Theoretical Output (N) Piston area (mm) Operating pressure (MPa) Bore size (mm) 0.3 0.2 0.1 15 53 35 18 176 32 241 161

CYPSeries

5.5 (12.1) 200 1.6 (3.5) 5.0 (11.0) 500 2.5 (5.5) 7.5 (16.5) 400 2.2 (4.9) 6.7 (14.8) 350 2.0 (4.4) 6.3 (13.9) CYP15 CYP32 1in = 25.4mm Magnet Holding Force Magnet holding force N (lbf) Bore size (mm2) 15 59 (13.3) 32 268 (60.2) Theoretical Output N (lbf) Piston area (mm) Operating pressure MPa (psi) Bore size (mm) 0.2 (29) 0.1(14.5) 0.3 (43.5) 15 176 35 (7.9) 18 (4.0) 53 (11.9) 32 804 161

CYPSeries

5.5 (12.1) 200 1.6 (3.5) 5.0 (11.0) 500 2.5 (5.5) 7.5 (16.5) 400 2.2 (4.9) 6.7 (14.8) 350 2.0 (4.4) 6.3 (13.9) CYP15 CYP32 1in = 25.4mm Magnet Holding Force Magnet holding force N (lbf) Bore size (mm2) 15 59 (13.3) 32 268 (60.2) Theoretical Output N (lbf) Piston area (mm) Operating pressure MPa (psi) Bore size (mm) 0.2 (29) 0.1(14.5) 0.3 (43.5) 15 176 35 (7.9) 18 (4.0) 53 (11.9) 32 804 161

3 Port Solenoid Valve Series VQ100 1

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-

Rodless Cylinder for Vacuum Series CYV ø15, ø32

tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnet Holding Force Theoretical Output (N) Magnet holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm) 0.1 0.2 0.3 15 59 15 32 18 35 53 176 268 32 80 161

Precision Cylinder Series MTS

N Backlash Manual unlocking Theoretical Output 12 16 20 40 Rear end only 125 211 29 53 82 329 1mm Non-locking type only Standard Strokes (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107