Table of Contents

output specifications 21 and 23.

ZX

analog Nil 21 22 23 24 P kPa Applicable to plug connector.

Sine Rodless Cylinder Series REA/REB

Note 2) 15 has internal magnets in the body. 946 Sine Rodless Cylinder Direct Mount Type Series REAR Construction: 20 to 40 8 9 4 5 7 6 3 1 25 23 21 22 11 12 13 18 14 20 30 26 15 19 10 24 2 27 28 29 17 16 Component Parts Component Parts No. Description Material Note No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-07SD AS321F-03-08SD 1/4" 13.2 27.8 39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41 18.5 43.3 31.8 21 10 18.5 81 79 19.8 52.6 AS321F-N03-11SD AS321F-03-12SD 3/8" 44.3 17.9 31.8 43.3 21 32.8 22 12 20.9 83 81 AS421F-N04-11SD AS421F-04-10SD 3/8" 17.9 33.6 47.9 21 47.9 33.6 21 10 18.5 141 141 24

Dual Speed Controller with One-touch Fitting Series ASD

17 18.5 21 22 17 18.5 21 22 21 22 17.5 20.6 22.9 28.2 25.2 28.2 31 25.2 28.2 32.6 34.4 25.2 28.2 32.6 34.4 32.6 34.4 29.4 32.5 38.5 44.8 43.5 46.5 49.3 48.3 51.3 54.1 55.9 48.3 51.3 54.1 55.9 64.3 66.1 9.3 11.6 11.6 15.2 12.8 15.2 18.5 12.8 15.2 18.5 20.9 12.8 15.2 18.5 20.9 18.5 20.9 M5 x 0.8 31 0.7 27.4 7.8 30.7 9.6 10 4.5 11.7 8 38.9 38.2 14 15.8 R 1/8 35.6 1.5 31.6 10.6 14.2 11.8 7 12

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15 25.3 32.4 16 25.2 34.4 10.4 15.2 4 5/16" 21 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 18.2 17 25.2 34.4 12.8 10.4 6 5/32" 16 18.5 35.4 40.4 17 34.4 29.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 18.2 24.9 34.2 34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2

Vacuum Module Series ZX

AEP 0X 21 ZSE3 HEP Related PV, V port size Wiring specifications Equipment Grommet (0.6 m) Nil M5 x 0.8 M6 x 1 (Option) Nil Without connector Connector (3 m) Connector (0.6 m) Grommet (3 m) Y C L CN CL Output specifications NPN open collector, double output Without analog output NPN open collector, double output With analog output 21 Note) Analog output is available only for grommet type.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)

Stainless Steel 316 Fittings

18 17 21 44.8 39.4 M M L2 8.5 21 19 17 21 48.1 41.7 L1 9.3 27 25 22 27 52.3 45.9 Union Elbow: KFG2L Applicable tube size (mm) O.D.

Mechanically Jointed Rodless Cylinder Series MY1

(mm) PB PG Q PP1 QW QQ RR2 SS TT UU W WW Model PP2 RR1 VV XX Z ZZ 50 7 206 12.7 46 15.5 17.9 15.5 16 84 11 MY1C25 4.1 12.7 18.9 16 38 220 Rc 1/16 21 16 102 13 MY1C32 60 8 264 15.5 60 16 24 4 18.5 22 19 48 280 Rc 1/16 25.5 9 26 21 118 20 MY1C40 23 54 Rc 1/8 340 80 9 322 17.5 20 72 26 29 Y 2 x d R WX S D Bottom ported (ZZ) (Applicable O-ring) DHole Size for Centralized Piping on the Bottom

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.15 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal

Actuation Type: 1 (2 Position Single), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: W (Dust Poof IP65 Rated), 1: 1, Piping Specification: Side Ported, Port Size: 03 (3/8)

Actuation Type: 1 (2 Position Single), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 3 (110VAC 50/60HZ), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: B (Locking Slotted Style), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (3/8), Thread: T (NPTF)

Actuation Type: 1 (2 Position Single), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: W (Dust Poof IP65 Rated), 1: 1, Piping Specification: Side Ported, Port Size: 02 (1/4)

Actuation Type: 1 (2 Position Single), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 3 (110VAC 50/60HZ), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 02 (1/4), Thread: N (NPT)

Actuation Type: 1 (2 Position Single), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 1 (100VAC 50/60HZ), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 02 (1/4)

Actuation Type: 1 (2 Position Single), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 3 (110VAC 50/60HZ), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (3/8)

Actuation Type: 1 (2 Position Single), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 1 (100VAC 50/60HZ), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 02 (1/4), Thread: T (NPTF)

Actuation Type: 1 (2 Position Single), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 1 (100VAC 50/60HZ), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (3/8)

Actuation Type: 1 (2 Position Single), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 1 (100VAC 50/60HZ), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (3/8), Thread: T (NPTF)