Clamp Cylinder with Lock

+0.027 0 Clevis width Width across flats 44 R15 F CLK2GB: 19.5 CLK2GA: 16.5 +0.3 0 +0.4 0 27 Z + Stroke 97 40 ZZ + Stroke 57 T (mm) Symbol BX BY D F GA L M MA N NA T W WA Z ZZ Hs IA K Bore size 40 56 54 16 44 77 55 M12 x 1.5 M4 x 7 86 59 57 5 12.5 114 226 45.5 47 14 50 64 64 20 55 78.5 58 M16 x 1.5 M4 x 7 87.5 59.5 60 5.5 14 118.5 230.5 51 58 17 63 74 74 20 69 82 58 M16 x 1.5 M5 x 7 91 61

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to page 17-6-3 for Safety Instructions and 17-5-59 to 17-5-61 for High Purity Chemical Valve Precautions.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68 14 23 61 61 61 111 The figures in parentheses are the normally open type. 22 23 Series VX21/22/23 For Water, Oil, Steam/Manifold Dimensions: Manifold/Base Material: Brass, Stainless Steel Normally closed (N.C.): VVX21/VVX22/VVX23 Normally open (N.O.)

V

17.5 16.6 15.2 9.5 ZFB200-08 8 ZFB300-08 8 57 30 69.5 27 14.5 29.5 21 17 65 21.5 18 18.5 11 ZFB300-10 10 (N)ZFB101-05 53 24 17.5 316" 48 26 22.5 12.5 15 50 15.5 14.4 12.8 8.5 (N)ZFB101-07 54 24.2 17.7 14" APPLICATION T O E J E C T O R S Y S T E M Inch size (N)ZFB201-07 52 28 65 24.5 13.5 27.2 19.7 16 61 17.5 16.6 15.2 14" 9.5 (N)ZFB301-11 57 30 70 27 14.5 30.2 21.7 17 65 21.5 8 18.5 38"

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Cover dia 1.5 Cross section 0.23mm2 Indicator light 3.5 to 7 : AC 61 53.5 35.5 M plug connector (M): VQZ3l2(R)-lMl-C6, C8, C10, 02 300 (Lead wire) 94.5 Cover dia 1.5 Cross section 0.23mm2 Indicator light 82.5 83.5 37 42 : AC 2.10-10 3 Port Solenoid Valve VQZ100/200/300 Manifold Body Ported Plug Lead Unit Connector kit How to Order Manifold VQZ100 SY SYJ C D VV3QZ 1 2 08 VK VZ DIN rail mount

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

pilot style(R)) (47.5) 46.5 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE port 1.1 13.4 13.4 0 1 0 1 L plug connector (L): VQZ125 (R)lLl01 M plug connector (M): VQZ125 (R)lMl01 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire length) 300 300 120.5<122.5> 108<110> (Lead wire length) 60<61

ZR

ZR1D1 D2 D3 10.2 SMC PRESURRE SWITCH RESET SET Attachment D Digital pressure switch Suction filter 71.3 (73.3 for D2, D3 types) 81 SMC 61 PV PD Filter block D 78.8 3 Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer A Bracket A part no. : P3270153 (Standard accessory) Spacer A part no. : P3270156 13-3-19 19 Series ZR Suction Filter: ZR1-FX Specifications ZR1-FX

17

A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 3 3 X 18l 46 38 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 3 3 X 18l 55.5 47.5 4 0.050 0.093 CDP-4A 63 16 Polishing ball 16 4 4 X 25l 71 61 5 0.050 0.093 CDP-5A 80 18 Polishing ball 18 4 4 X 25l 76.5 66.5 5 0.065 0.117 CDP-6A 80 100 20 Polishing ball 20 4 4 X 30l 83 73 5 0.065 0.117 CDP-7A 100 25 Polishing

1.1

61 94.5 334 105 330 480 640 265.5 315.5 480 61 94.5 105 330 480 640 265.5 315.5 480 61 94.5 334 105 330 480 640 265.5 315.5 480 153 298 398.5 451.5 135 625 741 153 298 398.5 451.5 135 325 625 741 242 342 402 452 115 230 400 560 242 342 402 452 115 230 400 560 850 1100 242 342 402 452 115 230 400 560 242 342 402 452 115 230 400 560 850 1100 23 Series HRG Operation Panel Display HRG001

0.4

2 e u t 61 Exploded View of Manifold F kit P kit J kit G kit T kit L kit S kit M kit Construction Semistandard Housing assembly and SI unit no. No. Manifold Part no.

Step Motor Controller (Servo / 24 VDC)

Electric actuators/Common precautions . 58 13.1 Design and selection . 58 13.2 Mounting . 59 13.3 Precautions for Use . 60 13.4 Operating environment . 61 13.5 Maintenance . 62 13.6 Precautions for electric actuator with lock . 62 14.

5 Port Solenoid Valve

41 Page 35 Page 33 Page 37 Plug Lead Manifold Bar Base 6 7 14 15 0 1 8 9 Page 83 1 F kit D-sub Connector P kit Flat Ribbon Cable J kit PCWiring System Compatible Flat Ribbon Cable T kit Terminal Block Box L kit LeadWire M kit Circular Connector C kit Connector 26 pins, 20 pins MIL Standard MIL Standard MIL Standard 20 pins Page 15 Page 19 Page 23 Page 45 Page 49 Page 53 Page 57 Page 61

Direct Operated

VX31 VX31 VX32 VX33 1/8 1/4 1/4, 3/8 1/4, 3/8 50 42 61 1.5, 2.2, 3 36 41 42 42 18 93 22 76.5 30 19 19.5 27 19.5 40 42.5 58.5 46.5 92 42.5 17.5 50 75.5 40 1.5, 2.2, 3 2.2, 3, 4 2.2, 3, 4 20.5 24 24 90 35 40 22 22 22.5 32 36 22.5 60 43 46 52.5 61.5 52 49.5 95 98 52.5 64 21 57 57 89 21 106.5 47 47 98 25 25.5 68.5 61 64 60.5 52 61 66.5 21 97 21 114.5 21 Series VVX31/32/33 For Air, Oil / Manifold

ZP

Fluoro rubber GN Conductive NBR Pad type GS Conductive silicon rubber U Flat Dimensions 7 7 7 12 12 12 1.8 2 1.2 0.5 0.8 0.3 2 2.6 4.3 3.5 5 4 4 4.6 7 10 11 7.8 ZP2004U ZP3507U ZP4010U 13-11-61

CG1

177.5 (189.5) +l 101 100 28.5 30 4.5 6 125 60 (74) 55 188.5 (202.5) 197.5 (211.5) +l CJP 121 120 150 60 (74) 65 192 (206) 201 (215) +l Note) ( ): Long stroke CJ2 Flange (mm) CM2 Stroke range Rear flange ZZ Bore (mm) B E F FX FD FT C85 Without rod boot With rod boot Rear Front 20 25 32 40 50 63 80 100 132+l 140+l 142+l 112 118 120 138 (147) 159 (171) 159 (171) 193 (207) 196 (210) 40 44 53 61

Pilot Operated

61 64 Normally open Rc Normally closed VXD2142 VXD2152 VXD2262 VXD2140 VXD2150 VXD2260 3/8, 1/2 3/4 1 30 30 35 19.5 19.5 22.5 34 43 47 29 37 43 14 17 20 3.5 4.5 4.5 28 35 42 63 80 90 44.5 51.5 60 104 (110.5) 24 29 33 71.5 78 92 115.5 (122) 133 (140.5) ( ) denotes the value for N.O.

CATALOG VC10

Consult factory for technical data and detail prints. 1/8 N.P .T . 1/2 NPT 2.06 (52.3) WITH SLEEVE PORT ADAPTER 1.50 (38.1) 2 WAY OR 3 WAY FREE EXHAUST WITHOUT SLEEVE PORT ADAPTER .61 (15.5) 3/432 UN THD. 1.86 (47.2) 59 SOLENOID VALVES . . .

Air Slide Table Series MXQ

A 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 HA GA B 3H9 depth 3 +0.025 0 Section AA Section BB (mm) ZZ 53 63 77 91 116 142 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 17 28 40 52 78 105 I 11 10 12 14 13 12 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 N 4 4 6 6 6 6 HA 19 28 27 31 58 60 Model F 25 25 26 32 46 50 GA 13 14 29 39 37 61