1.1

61 94.5 334 105 330 480 640 265.5 315.5 480 61 94.5 105 330 480 640 265.5 315.5 480 61 94.5 334 105 330 480 640 265.5 315.5 480 153 298 398.5 451.5 135 625 741 153 298 398.5 451.5 135 325 625 741 242 342 402 452 115 230 400 560 242 342 402 452 115 230 400 560 850 1100 242 342 402 452 115 230 400 560 242 342 402 452 115 230 400 560 850 1100 23 Series HRG Operation Panel Display HRG001

Step Motor Controller (Servo / 24 VDC)

Electric actuators/Common precautions . 58 13.1 Design and selection . 58 13.2 Mounting . 59 13.3 Precautions for Use . 60 13.4 Operating environment . 61 13.5 Maintenance . 62 13.6 Precautions for electric actuator with lock . 62 14.

5 Port Solenoid Valve

41 Page 35 Page 33 Page 37 Plug Lead Manifold Bar Base 6 7 14 15 0 1 8 9 Page 83 1 F kit D-sub Connector P kit Flat Ribbon Cable J kit PCWiring System Compatible Flat Ribbon Cable T kit Terminal Block Box L kit LeadWire M kit Circular Connector C kit Connector 26 pins, 20 pins MIL Standard MIL Standard MIL Standard 20 pins Page 15 Page 19 Page 23 Page 45 Page 49 Page 53 Page 57 Page 61

Direct Operated

VX31 VX31 VX32 VX33 1/8 1/4 1/4, 3/8 1/4, 3/8 50 42 61 1.5, 2.2, 3 36 41 42 42 18 93 22 76.5 30 19 19.5 27 19.5 40 42.5 58.5 46.5 92 42.5 17.5 50 75.5 40 1.5, 2.2, 3 2.2, 3, 4 2.2, 3, 4 20.5 24 24 90 35 40 22 22 22.5 32 36 22.5 60 43 46 52.5 61.5 52 49.5 95 98 52.5 64 21 57 57 89 21 106.5 47 47 98 25 25.5 68.5 61 64 60.5 52 61 66.5 21 97 21 114.5 21 Series VVX31/32/33 For Air, Oil / Manifold

ZP

Fluoro rubber GN Conductive NBR Pad type GS Conductive silicon rubber U Flat Dimensions 7 7 7 12 12 12 1.8 2 1.2 0.5 0.8 0.3 2 2.6 4.3 3.5 5 4 4 4.6 7 10 11 7.8 ZP2004U ZP3507U ZP4010U 13-11-61

CG1

177.5 (189.5) +l 101 100 28.5 30 4.5 6 125 60 (74) 55 188.5 (202.5) 197.5 (211.5) +l CJP 121 120 150 60 (74) 65 192 (206) 201 (215) +l Note) ( ): Long stroke CJ2 Flange (mm) CM2 Stroke range Rear flange ZZ Bore (mm) B E F FX FD FT C85 Without rod boot With rod boot Rear Front 20 25 32 40 50 63 80 100 132+l 140+l 142+l 112 118 120 138 (147) 159 (171) 159 (171) 193 (207) 196 (210) 40 44 53 61

Pilot Operated

61 64 Normally open Rc Normally closed VXD2142 VXD2152 VXD2262 VXD2140 VXD2150 VXD2260 3/8, 1/2 3/4 1 30 30 35 19.5 19.5 22.5 34 43 47 29 37 43 14 17 20 3.5 4.5 4.5 28 35 42 63 80 90 44.5 51.5 60 104 (110.5) 24 29 33 71.5 78 92 115.5 (122) 133 (140.5) ( ) denotes the value for N.O.

CATALOG VC10

Consult factory for technical data and detail prints. 1/8 N.P .T . 1/2 NPT 2.06 (52.3) WITH SLEEVE PORT ADAPTER 1.50 (38.1) 2 WAY OR 3 WAY FREE EXHAUST WITHOUT SLEEVE PORT ADAPTER .61 (15.5) 3/432 UN THD. 1.86 (47.2) 59 SOLENOID VALVES . . .

Air Slide Table Series MXQ

A 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 HA GA B 3H9 depth 3 +0.025 0 Section AA Section BB (mm) ZZ 53 63 77 91 116 142 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 17 28 40 52 78 105 I 11 10 12 14 13 12 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 N 4 4 6 6 6 6 HA 19 28 27 31 58 60 Model F 25 25 26 32 46 50 GA 13 14 29 39 37 61

24

Proper Mounting Position [mm] D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model Auto switch model D-M9V D-M9WV D-M9AV D-A9V D-P3DWA *1 D-P4DW D-A9 D-A9V D-P3DWA *1 D-P4DW Bore size Bore size Hs Ht Hs Ht Hs Ht Hs Ht 12 19.5 17 16 22 19.5 20 24.5 22 25 26 24 32.5 32 29 26.5 35 40 40 33 30.5 39 44 50 38.5 36 44.5 49.5 63 45.5 43 51.5 56.5 80 45 74 43 71.5 50 80.5 61

NCM

(Between lead wire and case) Lead Wire Lead wire length indication Solid state switch with oilproof flexible heavy-duty vinyl cord indication To designate solid state switches with flexible specifications, add -61 after the lead wire length. Flexible cable is used for D-M9 , D-M9W as standard. There is no need to place the suffix -61 at the end of the part number.

High Power Cylinder Series RHC

GA A NE 2 x Rc P GA M AL H1 K WH MM REA REB D E C B LY 4 x LD LH 0.2 REC LT CY JC Y X JC Y X Width across flats KA S + Stroke NF LX LZ CX LS + Stroke ZZ + Stroke MQ RHC (mm) RZQ A AL B C D EA FA GA H KA LD K JC H1 E Bore size (mm) 50 0 11 75 7 18 11 500.062 62 23 16 80 70 53 20 35 32 63 0 550.074 11 75 7 11 18 16 80 20 58 23 35 32 80 60 80 0 650.074 13 78 10 22 13 23 20 90 37 95 75 25 61

AC Servo Motor Driver

OFF: Lock is activated. 3 61 3.

ZQ-OM01401

SY100-30-A A X T6 61 -12 A *x2 23 - No.ZQ-OM01401-B 2 () ZQ-ZSEA M G K-2-A (1) (2) (3)(4) (5) (1) [kPa] EA NPN2 EB PNP2 0 to -100 EC NPN1 + EE PNP1 + FA NPN2 FB PNP2 FC NPN1 + -100 to 100 FE PNP1 + 1) NPN1 + VA 1) PNP1 + VB 1 2) 2) M SI (kPa) 2) 3) (:psi) P 2) (99 10 ) 3) (1) VAVB (3) G 2m) W (2m) 4) (4) (5) (V ) 0 (M5x0.8) 5) K 1 3.2 () 4) 5) (1) VAVB 2 4 () 3 6 (

PSxx-OMV0003CN

IO-Link 1 IO-Link IO-Link IO-Link DC1830 V COM IO-Link IO-Link IO-Link IO-Link ( ) 2 COM IO-Link IO-Link 1 Operate IO-Link 3 COM (61 ) 4 1IO-Link V1.0 -80No.PS-OMV0003CN-G 7F.S. 1 1F.S.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Applicable cable O.D. 3.5 to 7 Station n L1 L2 3 80 68 Station 20 403 391 6 137 125 8 175 163 10 213 201 Station 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 43 Series SYJ700 Type 40 Manifold: Bottom Ported/SS3YJ7-40Stations -01 [ ] for AC Grommet (G) 53.5 5 L2 L1 10.5 1.5 19.5 3.4 48.4 (

Compact Cylinder with Lock Series CLQ

64 58.5 64.5 57.5 63 56 19 12 52 15 49 14.5 51.5 100 71 74 70 74.5 67.5 68.5 80 22.5 15.5 65 18.5 58 18 61 60.5 100 28.5 75.5 24.5 68.5 21.5 71.5 71 24 21 Series CLQ Auto Switch Connections and Examples Basic Wiring Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Compact Type Dual-Rod Cylinder Series CXSJ

Note 2) To designate solid state switches with flexible specifications, add -61 after the lead wire length. (Example) D-F9PL61 Flexible specification Internal circuits Note) For D-Y type, flexible specifications is standard, therefore it is not necessary to indicate -61 when ordering. Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

75 100 125 138 9 9 12 74 78 100 to 1000 to 1000 to 1000 Rear flange type (G) 4-FD FY B FX FT ZZ + Stroke FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 190 211 237 to 1000 to 1000 to 1000 4 Series MGZ Construction Parts list Description Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Carbon

Electric Actuator Triple Axis P&P Unit

Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5