Flow range Sensor 0.2 l/min 0.5 l/min 1 l/min 2 l/min 10 l/min 25 l/min 50 l/min 100 l/min 0.2 l/min 10 l/min (5 l/min) PFM710 PFM510 0.2 l/min 10.5 l/min (5.2 l/min) 10.5 l/min (5.2 l/min) 0 0.5 l/min 25 l/min (12.5 l/min) PFM725 PFM525 0.5 l/min 26.3 l/min (13.1 l/min) 26.3 l/min (13.1 l/min) 0 1 l/min 50 l/min (25 l/min) PFM750 PFM550 1 l/min 52.5 l/min (26.2 l/min) 52.5 l/min (26.2 l/
P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(
10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.
(For F, L, S, T kit) VVQ4000 3A 1 VVQ4000 2A 1 Electrical entry Electrical entry L F C L F C F , L, T, S kit F kit (Connector side) C kit (Plug lead type) F , L, T, S kit F kit (Connector side) C kit (Plug lead type) (1) (1) Option Option VQC Nil W CD SD Standard IP65 enclosure For exhaust cleaner mounting Direct exhaust with silencer box Nil W CU SU Standard IP65 enclosure For exhaust cleaner
G 1F 48 VAC G H K L Z NPT 1G 1H 1V 1J 220 VAC 240 VAC DIN terminal ? ? ? ?
Material: Carbon steel Dd9 d L Part No. m t l 0.040 0.076 CD-S02 CD-S03 20/25 32/40 8 C8 type for pivot 7.6 24.5 19.5 1.6 0.9 0.040 0.076 10 C10 type for pivot 9.6 34 29 1.35 1.15 Applicable bore size 20 25/32 40 Part No.
min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/
Caution Single solenoid SJ3000-46-SC-l Double solenoid, 3 position type, 4 position type SJ3000-46-DC-l Connector Assembly Part No.
(Except L kit.) Note 3) For specifying two or more options, enter them alphabetically.
Hs Approx. 11.5 16 Auto switch D-C7, C8 D-H7 A 12 Approx. Hs Approx. 14.5 B 24.5 Auto switch D-B5, B6 D-G5, K5 A B 8.5 Approx.
) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire length) 300 : With light/surge voltage suppressor Built-in One-touch fittings VZ5 20-DIN terminal (D) VZ5 20-D-01 C6 C8 3 4 5 3 4 5 C6: MAX. 6 C8: MAX. 6.5 2-One-touch fitting (A
L RUN SERIAL UNIT L ERR.
plug connector with cover (LL) 52-SY5120-LL-01 (-F2) Insulation: Red (+) Insulation: Black () 4.1 0.3 mm2 12 14.7 L 104 (Lead wire length) Cable type (TT) 52-SY5120-TT-01 (-F2) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 L 120.8 (Lead wire length) Max.10 5 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5220-L-01 (-F2) 22.6 16.7
(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.
(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.
N L Non-lock type Lock type Lock position H R Head end lock Rod end lock Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.
L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.
m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.
auto switch DM2 C H L 40 F A J H7BW 150 Number of auto switches Bore size Rod boot 2 pcs. 1 pc. n pcs.