Compact Manifold Regulator

IC Dimensions ITVH ARM10-06 08 For dimensions and accessories of One-touch fittings, please refer to page 745.

Vacuum Module Series ZX

Supply port location 01 Nil Common exhaust Individual exhaust 1 Thread type C 1 8 Nil Rc 08 8 F G T NPTF (6) Digital vacuum switch unit Left side Right side R L B 21 C 0X ZSE3 D (3) Ejector assembly Both sides Unit for replacement 05 1 D W ZX1 Output specifications Unit for replacement Nozzle diameter Ejector exhaust 2 outputs/without analog output 2 outputs/with analog output 1 output

ZX

Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Digital vacuum switch unit 06 ZZX1 R B 21 C 0X ZSE3 D Supply port location Stations 01 1 Unit for replacement Thread type R L Left side Right side Nil F G Rc 1 8 Piping specifications 08 8 B Both sides C Connector (0.6 m) T NPTF Pressure indication System for external vacuum (3) Adsorption confirmation switch unit Output

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(Default) Spare Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 3 36 4. STARTUP 4.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

KQ2-G

Symbol Size 04 4 06 6 08 8 10 10 12 12 16 16 3

One-touch Fittings

S 1 4, 6 (Oval type release button) Oval type release button KQ2 8 to 16 H 08 01 G S (Round type release button) Male thread seal method Symbol Seal method Nil Without sealant S With sealant Model Thread material: Stainless steel 303 One-touch fittings Port size/Applicable tubing O.D.

Speed Controller with One-touch Fittings

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

._3d_items_collection = {}; } SMC AN110-01 muffler 1/8 pt, AN SILENCER $4.20 + Add to Quote Add To Cart Add to Cart SMC AN200-02 muffler 1/4 pt, AN SILENCER $4.25

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 38 22 Dimensions 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP(For VQZ1000/VQZ2000) VVQZ2000-CP(For VQZ3000) Used to block an unused cylinder port when using a 4 way valve as a 3 way valve. 1.12-23 VQZ1000/2000/3000 Body Ported Manifold Option Double check block (Externally placed downstream): For VQZ1000 only VQ1000FPGll

Fieldbus System

1 A, B port size q Series 3 SY3000 5 SY5000 7 SY7000 Nil Standard (0.7 MPa) B Quick response type (0.7 MPa) K* High pressure type (1.0 MPa) Thread piping Symbol Port size Applicable series M5 M5 x 0.8 SY3000 01 1/8 SY5000 02 1/4 SY7000 * Only metal seal type is available for high pressure type.

._3d_items_collection = {}; } SMC AN110-01 muffler 1/8 pt, AN SILENCER $4.20 + Add to Quote Add To Cart Add to Cart SMC AN200-02 muffler 1/4 pt, AN SILENCER $4.25

._3d_items_collection = {}; } SMC AN110-01 muffler 1/8 pt, AN SILENCER $4.20 + Add to Quote Add To Cart Add to Cart SMC AN200-02 muffler 1/4 pt, AN SILENCER $4.25

._3d_items_collection = {}; } SMC AN110-01 muffler 1/8 pt, AN SILENCER $4.20 + Add to Quote Add To Cart Add to Cart SMC AN200-02 muffler 1/4 pt, AN SILENCER $4.25

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

IZx-OMP0064

Recommended piping port size Emitter cartridge Bar length mm One-touch Applicable tube type fitting symbol O.D. mm Single end piping Double ends piping 06 6 340 to 640 340 to 1300 08 8 340 to 1300 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 1300 340 to 2500 08 8 340 to 2500 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 2500 340 to 2500 08 8 340 to 2500 340 to 2500 10 10

Table of Contents

ZSE1-01-15CN1 pc.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor

Compact manifold regulator ARM5 Series

Characteristics (Representative Value) Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) ARM5SA-08-1 ARM5SA-08 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.25 0.25 0.20 0.20 Set point Set point 0.15 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.10 0.2 0.3 0.4 0.5

Fieldbus System

Stations 1 station Symbol 01 I/O Unit stations 16 Note) 16 stations Nil None 1 station Note) Max. number of stations depends on the wiring specifications. 1 9 9 stations Note 1) Without SI Unit, the symbol is nil. Cylinder port size Note 2) SI Unit is not included in I/O Unit stations.