Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 50 50 M10 x 1 M14 x 1 Thread dia./ Port size Connection A10 A14 Symbol B5 M5 x 0.8 Female thread Pad type Vacuum entry B01 Rc 1/8 F Ball joint type 04 4 tube One-touch fitting 06 6 tube 08 8 tube Material N NBR S Silicon rubber Buffer stroke U Urethane rubber Symbol Stroke Pad dia.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-G59F 5 5 5.5 6 7 7.5 8 7.5 D-B5/B6 BA -04 BA -05 BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant

VP4

04 0 5 VK Thread type Series VP 5 port solenoid valve Manifold Nil Rc VZ G F N NPT Base size NPTF T VF Common EXH 5 6 3 4 A/B Port size 1 VFR Symbol Port size 04 06 10 M Note) 1 Mixed VVP460 VVP450 1 2 3 4 VP4 Porting specifications Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

AS-FPQ/FPG

AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR

Smooth Cylinder/Low Speed Cylinder

Auto switch model Bore size (mm) 40 50 63 80 100 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9A/M9AV BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F/F5NT BT-04 BT-04 BT-06 BT-08 BT-08 D-A3C/A44C D-G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV Mounting example of D-A9(V)/M9(V)/M9W(V)/M9A(V) BA4-040 BA4-040

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

AS1001F-23-3 AS1001F-01-3 38 4.5 16.8 37.6 34.4 1/8" 8.4 38 4.5 16.8 37.6 34.4 8.4 3.2 12.7 12.7 12 10.5 8 AS1001F-04-3 AS1001F-03-3 39.2 5.2 17.4 38.2 35 5/32" 9.3 39.2 5.2 17.4 38.2 35 9.3 4 3.5 3.5 12 8 10.5 AS1001F-05-3 AS1001F-06-3 40.7 6.2 18.5 39.3 36.1 13.5 3/16" 11.4 48.7 16.5 6 11.6 39.3 36.1 6.2 18.5 AS1001F-07-3 AS2001F-04-3 40.7 5.2 20.7 48 42.5 12.7 1/4" 12 40.7 13.7 4 9.3 14

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

AS1001F-23-3 AS1001F-01-3 38 4.5 16.8 37.6 34.4 1/8" 8.4 38 4.5 16.8 37.6 34.4 8.4 3.2 12.7 12.7 12 10.5 8 AS1001F-04-3 AS1001F-03-3 39.2 5.2 17.4 38.2 35 5/32" 9.3 39.2 5.2 17.4 38.2 35 9.3 4 3.5 3.5 12 8 10.5 AS1001F-05-3 AS1001F-06-3 40.7 6.2 18.5 39.3 36.1 13.5 3/16" 11.4 48.7 16.5 6 11.6 39.3 36.1 6.2 18.5 AS1001F-07-3 AS2001F-04-3 40.7 5.2 20.7 48 42.5 12.7 1/4" 12 40.7 13.7 4 9.3 14

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

Series HAW Water Cooled Aftercooler 1

HA Accessory (Option) AT HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Applicable model Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 ID Auto-drain AD402-04 AD600-06 AD600-10 AMG Model Selection (Flow Capacity l/min (ANR)) AFF HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model 1000 70C 100C 180C 50C 2000 6000 12000 15000 22000 30 Inlet air temperature

SV

02 12 02 04 02 9 stations 4 stations 12 stations 4 stations 2 stations 2 stations 2 stations 2 stations (2) (2) (2) (2) Specified layout (Up to 8 solenoids possible.)

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

HEC-OM-S008

0050 0 A9 [CR][LF] :01 06 0050 0 A9 [CR][LF] Stop 0050 Control operation mode 1 :01 06 0050 0001 A8 [CR][LF] :01 06 0050 0001 A8 [CR][LF] Start 0051 Temperature setting 1 :01 06 0051 0BB8 E5 [CR][LF] :01 06 0051 0BB8 E5 [CR][LF] Set at 30.0 deg.C. 0052 Offset setting 1 :01 06 0052 0032 75 [CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

Compact Manifold Regulator

Using an electronic type pressure gauge is recommended, depending on the situation. 741 ARM10 Series Flow Rate Characteristics (Representative Values) ARM10F-06-1 ARM10-06-1 (One-touch fittings: IN/OUT 4) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM10F-06 ARM10-06 (One-touch fittings: IN/OUT 4) 0.7 0.35 0.30 0.6 Outlet pressure (MPa) Outlet pressure (MPa) 0.25 0.5

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

With One-touch fitting Port size U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 Needle Valve/Flow Rate Characteristics AS2201F-U02, AS2211F-U02 AS2301F-U02, AS2311F-U02 AS2201F-U01, AS2211F-U01 AS2301F-U01, AS2311F-U01 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 200 400 01, 23 300