Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: Rc, Port Size: 3/4, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Black, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

2/3 Port Valve for Various

Series VXR21/22/23 Dimensions Normally Closed: VXR210/220/230 Normally Open: VXR212/222/232 Grommet: G Port size Conduit: C DIN terminal: D Cable 6 to 12 Conduit terminal: T Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 59 60 60 Port size P Rc N Q L K J H F E A B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80

CG1

Mounting Position (mm) Mounting Height (mm) CP95 Auto switch model D-G5NTL D-G59F D-H7C D-G5BAL D-C7,C8 D-H7 D-H7W D-H7F D-H7BAL D-B5,B6 D-B59W D-G5, K5 D-G5W D-K59W D-B5,B6 D-C7,C8 D-C73C D-C80C D-H7W D-H7F D-H7BAL D-G5 D-K5 D-G5NTL D-B59W D-H7 D-H7C C95 D-C73C D-C80C D-G5W, K59W D-G59F D-G5BAL C92 Bore B 18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) B 19.5 (27.5) 19.5 (27.5) 20.5

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-R026

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRSH Series 3.3Installation 3-25 HRX-OM-R026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Stainless Steel 316 Fittings

16.6 18.5 M L Q A D D O N M M Note 1) D is maximum diameter.

Soft Start-up Valve

size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/

Soft Start-up Valve

size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/

AC Servo Motor Driver (Network card type ）

H T E d W T D L Max.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

M-E05-1-LQ1

D-G d

HRX-OM-Q026

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Combination Cylinder

(mm) B C D d H Dd9 Tube dia. (mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

CL

(mm) B C D d H Dd9 Tube dia. (mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

20

Outside diameter Nozzle size L2 Note1) D L1 H1 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 1.5 2 1.5 2 1.5 2 1.5 2

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Silencer Series AN

Temperature 5~60C / 40~140F H O W T O O R D E R SERIES NAN SILENCER Model Port Size* NPT Effective Orifice mm2 (Cv) D I M E N S I O N S SERIES NAN SILENCER NAN200-N02 14 35 (1.9) NAN300-N03 38 60 (3.3) Dimensions (mm) Model NAN400-N04 12 90 (5.0) A B D NAN500-N06 34 160 (8.8 NAN200-N02 63 22 19 NAN600-N10 1 270 (15) NAN300-N03 84 25 22 NAN700-N12 114 440 (24) NAN400-N04 92 30 27 NAN800-N14