Air Cylinder

CM3 Auto Switch Proper Mounting Position (Centralized piping type, With end lock) CG1 (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF CG3 D-C7l D-C80 D-C73C D-C80C D-G39A D-K39A D-A3lA D-A44A D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-B5l D-B64 D-B59W JMB MB A B A B A B A B A B A B A B A B Bore size MB1 20 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5

HRX-OM-S004

Out put type Current consumption Flow switch SMC PF3W711--A(-M) NPN open collector output 50mA or less PF3W711--B(-M) PNP open collector output 50mA or less HRS Series 3.3Installation 3-21 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.3 Installation HRS Series 3-22 HRX-OM-S004 Chapter 3 Transport and Setting Up 1.

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

VXP21/22/23

terminal DIN terminal Q N 60 62 62 Applicable N Q L K J B C H F E D A flange M N 25.5 28 28 M 84 (94) 95(105) 106(117) N 41.5 44.5 44.5 M 84 (94) 95(105) 106(117) M 84 (94) 95(105) 106(117) Normally open Normally closed VXP2270 VXP2380 VXP2390 VXP2272 32A 40A 50A VXP2382 VXP2392 48 50 50 95 97 97 62 64 64 160 170 180 135 140 155 67.5 70 77.5 169 (186.5) 51.5 54.5 59 100 105 120 36 42 52

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Tie-rod Type Hydraulic Cylinder

Hs Auto switch 12 D-B5/B6 15 22.5 A B 33 410 Auto Switch Mounting CHA Series Auto Switch Proper Mounting Positions (mm) D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-G39/K39D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 Bore size (mm) CHQ A B A B A B A B A B A B A B A B A B A B A B CHK 40 20.5 21.5 17 18 22 23 12.5 13.5 10.5

HRX-OM-R016

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

Digital Flow Switches

M/C Makes it possible to monitor the air flow from the main line to each branch line. A COM COM COM B DC12V GND F.G. R.S. HOLD BANK1 BANK2 MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Motor Type A S Axis side AC Servo motor B Opposite axis side Cable Content Motor cable M Lock cable B Cable Length (L) [m] Encoder cable E 2m 2 5m 5 10m A Cable Type Standard cable S Robot cable R 1 6 1.

CNA

A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B ( ): Donates the value of D-F5LF.

CNA

switch model D-A44 D-A44C D-F5 D-J59 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5/A6 D-F5W D-J59W D-F5BAL D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W D-A3/A3C D-A44/A44C D-G39/ G39C D-K39/K39C D-B5/B6 Bore size (mm) Bore size (mm) A B A B A B A B A B A B A B Hs Hs Hs Ht Hs Hs Ht Hs Hw Hs Hw 31 40 40 40 81 9.5 2 10.5 0 72.5 31 4 8.5 2 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5

H/DL/L/LL

DT08-01 18 45 25 8 14 DT08-02 16 21 52 14 12 24.5 K DT08-03 22 73 26.5 M 49 10 17 DT10-02 23 72 Connection thread 14 26.5 DT10-03 17 22 78 DT10-04 27 28.5 120 DT12-02 25 106 17 H 55 12 19 DT12-03 17 28.5 26 111 DT12-04 27 17 D MS Male Run Tee: DY T H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

ISO Standard Hydraulic Cylinder

D-A59W D-Z7/Z80 D-M9/M9W D-M9A Bore size (mm) Bore size (mm) D-Z7/Z80 D-A5/A6 A B A B A B A B A B A B Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs 40 50 63 80 100 40 50 63 80 100 11.5 8.5 8 5 13 10 5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54

HRX-OM-M090

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

CNA

, A44C D-G39, G39C D-K39, K39C D-B5/B6 D-G5lW D-K59W D-G5BAL D-G59F D-G5l D-K59 D-G5NTL D-F5l D-J5l D-F5lW D-J59W D-F5BAL D-F5lF D-A3lC D-G39C D-K39C D-B59W D-A59W D-F5NTL Bore (mm) Bore (mm) A B A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 40 40 0 0 0.5 0 3.5 1.5 2 0 4 2 10.5 8.5 11.5 9.5 38 72.5 80.5 40 31 38.5 31 73 69 81 69 50 50 0 0 0.5 0 3.5 1.5 2 0 4 2 10.5 8.5 11.5 9.5

HRX-OM-X027

Inset the signal cable through the hole and fit the nipple A, nipple B and lock nut. Then fit the cap A, cap B and rubber bushing. Recommended cable diameter: 6 to 13 mm Signal cable entry For option B Signal cable entry Lock nut Nipple A Rubber bush Nipple B Cap B Cap A Fig. 3-9 Mounting to the cable gland Fit the nipple A and nipple B closely until it clicks.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

90

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 04 06 08 10 For 2 stations manifold For 4 stations manifold For 6 stations manifold For 8 stations manifold For 10 stations manifold d Model and dimensions D Applicable size d 6 8 1/4" 5/16" Weight (g) Note A L D Symbol 06 08 07 09 White White Orange Orange 18 20.5 18 20.5 35 39 35 39 8 10 8.5 10 1 2 1 2 Connector type 1 2 D sub-connector (