OMS0020

: "01""FF" "EE" "OK" LRC CR, LF (b) Irregular response Code ID Command Result Error details Check Start Sum End Code : "01""FF" "EE" "NG" Refer to "5.5 Error Code" LRC CR, LF 15 DATA (Saved Data) Data will be sent as a value to 5 decimal points.

NCG/CG1

, D-C8 20 to 63 D-G5, D-K5, D-G5W, D-G5BAL D-K59W, D-G59F, D-G5NTL = ~ Hs Auto switch Auto switch = ~Hs D-M9, D-M9W, D-M9A 20 to 63 D-C73C, D-C80C 20 to 63 Auto switch = ~ Hs Auto switch = ~Hs D-B5, D-B6, D-B59W 20 to 100 Auto switch = ~ Hs Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NTL D-G5BAL D-G5NTL D-G59F D-G5BAL D-B5/B6 D-B59W D-G5

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

Applicable tubing O.D. d ASS Model AS231FE-01-04SK 12.7 17.5 9.3 13.1 24.9 4 9.3 26 31.8 ASR Applicable tubing O.D. d AS231FE-01-06SK 12 R 1/8 12 13.5 22.9 10.9 14 26.9 6 11.6 27 37.2 48.9 49.9 44.9 14.2 53.9 (Hexagon width across flats) AS231FE-01-08SK 18.5 28.2 12.9 16.2 30.9 8 15.2 29 41.7 ASF (Hexagon width across flats) AS231FE-02-04SK 16 21.9 10.9 16.2 30.6 4 10.4 36 40.1 AS231FE-02

Speed Controller: Standard Type Series AS In-line Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

SV

side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

DIN terminal: VKF334-D-01 Base mounted Grommet: VKF334-G-01 33.5 16.7 26 4 Manual override (Non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 MAX.10 2-4.3 (Mounting hole) Applicable cable O.D. 4 to 6.5 48.5 300 26 4 Pg.7 3 27 (Lead wire length) Manual override (Non-locking) A 20.5 18.5 mPm 3 32 59 68 78 70.5 43.5 12 7.5 P R 7.5 12 43.5 13.5 11 33.5 P R 13.5 11 Refer to grommet type for other

EXxx-OMO0027

5 6050:01 Channel 0 6050:02 Channel 1 6060:0 (No input data allocation) Slot 6 60A0:0 Diag.

Compact Manifold Regulator Series ARM5

Accessories Pressure gauge Note) Extension tie-rod Symbol Yes Yes None None A B C D Note) Pressure gauges are not compatible with copper-free and fluorine-free specifications. 480 Compact Manifold Regulator Series ARM5A/B Centralized Supply Block 50 2 ARM5A 1 S 01 18.6 16 1.

AC Servo Motor Driver (Network card type ）

H T E d W T D L Max.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

Digital Pressure Switch

-I With bracket Bracket A 01/N01 type W1/WF1 type -66No.PS-OMM0007-I Bracket B W1/WF1 type -67No.PS-OMM0007-I Bracket D 01/N01 type W1/WF1 type -68No.PS-OMM0007-I Panel mount adapter 01/N01 type W1/WF1/M5/C4/C6 type -69No.PS-OMM0007-I Panel mount adapter + Front protective cover 01/N01 type W1/WF1/M5/C4/C6 type -70No.PS-OMM0007-I Panel cut-out dimensions -71No.PS-OMM0007-I 01/N01 type (products

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

125

AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket (VEX312 only) Body size Port size Port 1(P), 2(A),

Manifold Specifications

VV5ZS3 02 06 51F 1 D Thread type VK Series VZS3000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector NPTF G Option Port size VF Rc 1 8 02 Rc 1 4 01 U side Connector mounting direction VFR Connector mounting position Symbol Applicable stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

VK3000

) Refer to grommet type for other dimensions. 3-2-5 Series VK3000 Dimensions: Base Mounted Grommet: VK3140-G-01 DIN terminal: VK3140-D-01 ~ = Refer to grommet type for other dimensions. 3-2-6 5 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK3000 Type 20 Manifold Body ported (Top ported) n1 = Number of VK3000 n2 = Number of VK300 VV5K3-20Station Grommet: G DIN terminal: D

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

8.4 12.7 AS221F-01-04SD AS221F-N01-01SD 1/8" 8.4 4 9.3 27.5 20.4 5/32" 9.3 20.4 27.5 12.7 14.3 AS221F-01-06SD AS221F-N01-03SD 6 11.6 13.5 35.6 R 1/8 14.2 7.2 1.2 31.6 12 3/16" 11.4 23.1 30.2 14.3 16.5 AS221F-01-08SD AS221F-N01-05SD NPT 1/8 12.7 14.2 7.2 35.6 1.2 31.6 8 15.2 18.5 32.4 25.3 AS221F-01-10SD AS221F-N01-07SD 1/4" 13.2 23.9 31 18.5 10 18.5 21 40.2 33.1 15 AS221F-02-04SD AS221F-N01