HRX-OM-X027

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking . 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-47 5.17 Data reset function . 5-49 5.17.1 Data reset function . 5-49 5.17.2

HRX-OM-R016

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2

HRX-OM-W038

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2

HRX-OM-O021

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2

HRX-OM-R005

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

VQ7-6/7-8

03 C10 02 03 C12 Enter only when using for a 2 position single or double.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

SV

specifications Double wiring specifications Double wiring specifications 09 02 04 02 12 02 04 02 9 stations 4 stations 12 stations 4 stations 2 stations 2 stations 2 stations 2 stations (2) (2) (2) (2) Specified layout (Up to 8 solenoids possible.)

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

-04 AS231FG-N01-07 21.9 40.1 37.2 16 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 19 18.5 16.2 12.9 16.2 AS231FG-02-06 AS231FG-N01-09 25.2 42.6 41.7 17 28.2 34 30.9 6 12.8 5/16" 15.2 33 21 21 18.4 R 1/4 40.4 35.4 18.5 17 34.4 29.4 AS231FG-02-08 AS231FG-N02-03 28.2 45.6 40.1 18.5 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 32 16 18.3 10.9 16.2 AS231FG-02-10 AS231FG-N02-05 31 48.4 42.6 21 23.9 38.7

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-04 AS231FG-N01-07 21.9 40.1 37.2 16 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 19 18.5 16.2 12.9 16.2 AS231FG-02-06 AS231FG-N01-09 25.2 42.6 41.7 17 28.2 34 30.9 6 12.8 5/16" 15.2 33 21 21 18.4 R 1/4 40.4 35.4 18.5 17 34.4 29.4 AS231FG-02-08 AS231FG-N02-03 28.2 45.6 40.1 18.5 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 32 16 18.3 10.9 16.2 AS231FG-02-10 AS231FG-N02-05 31 48.4 42.6 21 23.9 38.7

AS-FG/ASD-FG

-04 AS231FG-N01-07 25.6 30.6 29.9 1/4" 4 10.4 13.2 10.9 32 19 18.5 16.2 16.2 12.9 25.2 42.6 41.7 17 AS231FG-02-06 AS231FG-N01-09 28.2 34 30.9 5/16" 6 12.8 15.2 33 21 21 18.4 R(PT) 1/4 40.4 35.4 18.5 17 34.4 29.4 28.2 45.6 40.1 18.5 AS231FG-02-08 AS231FG-N02-03 21.9 35.2 30.6 5/32" 8 15.2 10.4 12.9 36 32 16 18.3 16.2 10.9 31 48.4 42.6 21 AS231FG-02-10 AS231FG-N02-05 23.9 38.7 31.1 3/16" 10