Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

-04 AS231FG-N01-07 21.9 40.1 37.2 16 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 19 18.5 16.2 12.9 16.2 AS231FG-02-06 AS231FG-N01-09 25.2 42.6 41.7 17 28.2 34 30.9 6 12.8 5/16" 15.2 33 21 21 18.4 R 1/4 40.4 35.4 18.5 17 34.4 29.4 AS231FG-02-08 AS231FG-N02-03 28.2 45.6 40.1 18.5 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 32 16 18.3 10.9 16.2 AS231FG-02-10 AS231FG-N02-05 31 48.4 42.6 21 23.9 38.7

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-04 AS231FG-N01-07 21.9 40.1 37.2 16 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 19 18.5 16.2 12.9 16.2 AS231FG-02-06 AS231FG-N01-09 25.2 42.6 41.7 17 28.2 34 30.9 6 12.8 5/16" 15.2 33 21 21 18.4 R 1/4 40.4 35.4 18.5 17 34.4 29.4 AS231FG-02-08 AS231FG-N02-03 28.2 45.6 40.1 18.5 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 32 16 18.3 10.9 16.2 AS231FG-02-10 AS231FG-N02-05 31 48.4 42.6 21 23.9 38.7

AS-FG/ASD-FG

-04 AS231FG-N01-07 25.6 30.6 29.9 1/4" 4 10.4 13.2 10.9 32 19 18.5 16.2 16.2 12.9 25.2 42.6 41.7 17 AS231FG-02-06 AS231FG-N01-09 28.2 34 30.9 5/16" 6 12.8 15.2 33 21 21 18.4 R(PT) 1/4 40.4 35.4 18.5 17 34.4 29.4 28.2 45.6 40.1 18.5 AS231FG-02-08 AS231FG-N02-03 21.9 35.2 30.6 5/32" 8 15.2 10.4 12.9 36 32 16 18.3 16.2 10.9 31 48.4 42.6 21 AS231FG-02-10 AS231FG-N02-05 23.9 38.7 31.1 3/16" 10

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

VFA3000

(1.8) 14.8 (0.8) 36 (2) 15.3 (0.85) 02 03 VFA5144 2 position single : 0.51 02 03 04: 0.56 34.2 (1.9) 34.2 (1.9) 33 (1.8) 36 (2) 45 (2.5) 52 (2.9) 02 03 04 1 8 3 8 1 2 1 4 , , : 0.52 02 03 04: 0.57 1 8 45 (2.5) 52 (2.9) VFA5244 2 position double 02 03 04 3 8 1 2 1 4 , , Body ported : 0.66 02 03 04: 0.71 VFA5344 -X1 3 position closed center 1 8 34 (1.9) 38 (2.1) 02 03 04 JIS Symbol 3 8 1 2

Model Selection 1

Manifold 17-2-74 VDW200/300 C.O. 3 port Single unit Pilot operated Diaphragm operation VXD21/22/23 17-3-33 N.C./N.O. Single unit Pilot operated Disk operation VXP21/22/23 17-3-43 N.C./N.O. Single unit 2 port Pilot operated (Water hammer relief type) VXR21/22/23 17-3-53 N.C./N.O. Single unit VX31/32/33 N.C./N.O./C.O. 17-3-81 Single unit Direct operated 3 port 17-3-87 VVX31/32/33 N.C./N.O.

SYJA3000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

VS7-6

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

10.4 15.9 ( DIN 17.1) 1/4 (P, R port) 1/4 (P, R port) (Pitch) P = 17 24.5 (Station n) (Station 1) (Station n) (Station 1) Built-in speed controller (Light/surge voltage suppressor) (Light/surge voltage suppressor) 56.5 Max. 13.5 61.6 [68.6] 61.6 [68.6] + + + + + + 46.2 46.2 A A A A 33 24.5 25 B B B B 1 6 8.5 8.5 (Pitch) P = 16 33 (Pitch) P = 17 One-touch fitting (A, B port) 24.5 1/8 (A,

Round Type Hydraulic Cylinder

D-C7/C80 D-H7/H7W/H7F/H7BA 8.5 Hs Hs 8.5 16 16 B Auto switch 29 A 26 A Auto switch B D-C73C/C80C D-H7C Hs 8.5 Hs Auto switch 16 16 B Auto switch 38.2 A A 36.7 B D-G5/K59/G5W/K59W/G5BA/G59F/G5NT D-B5/B64/B59W Hs Hs 12 Auto switch 12 24.5 24.5 A B A B Auto switch 33 6.5 33 D-A3/G39/K39 D-A4 Hs Auto switch 36 Hs 36 Auto switch B A B A 49 49.5 G 1/2 (applicable cable 6.8 to 11.5) G 1/2 (applicable

Air Cylinder

Applicable bore size B C D d H NT-02 20 13 15.0 12.5 M8 x 1.25 5 NT-03 25, 32 17 19.6 16.5 M10 x 1.25 6 NT-04 40 22 25.4 21.0 M14 x 1.5 8 LT LF LE LY LG LD 2 x LD LD Part no. Applicable bore size L LC LD LE LF LG LH LR Mounting Nut/Material: Carbon steel (mm) CM-E020B 20, 25 24.5 8 6.8 22 15 30 30 10 CM-E032B 32, 40 34 10 9 25 15 40 40 13 d Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K L M C D E H I A A B F 5.5 P M5 x 0.8 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 14 7 34 33 Rc 1/8 7.5 10.5 13 16 45 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 14 7 40 Rc 1/8 8 11 13 16 52 69 11 8 M10 x 1.5 50 Rc 1

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Table of Contents

Standard stroke Refer to Standard Stroke on page 8-15-33. For 6, 10 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

pilot port) 21.5 21 Manual override 38 4 Insulation Black () B A 23 23 E P B A X Insulation Red (+) 46 EB EA P 21 69 21.5 M5 x 0.8 (Pilot EXH. port) 92.6 44.1 67.2 180.8 L 71.2 (For E type) (Lead wire length) 1.55 0.3 mm2 26.5 13.5 11.5 20.5 20.5 5 x 3/8", 1/4" (Piping ports) 33 96.9 L plug connector with cover (LL) 3 02 03 52-SY7440 (R) -LL5 L 170.6 (Lead wire length

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

0.4

D E Note) DIN rail mounting style Direct mounting style Option Nil 02 to 16 (1) B (2) K (3) N R S None DIN rail length specified Back pressure check valve Note) Refer to page 53 for details.

VQ5000

3 (R2) Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (tool required) B: Slotted locking type (tool required) 4 1 5 (R1) 3 (P)(R2) 1 (P) 5 (R1) 3 (R2) 2 Bore 6.1 Bore 6.1 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 PUSH TURN LOCK 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Note) See page 33