HRX-OM-M090

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

CYP

L Y69BL 5m .

VK300

cable O.D: 3.5 to 7 Max.10 69.8 83.4 75.9 2 x 4.5 (Mounting hole) Manual override (Non-locking) Pg7 300 (Lead wire length) 4 x Rc 1/8 (P, R port) 4 x Rc 1/8 (P, R port) 2 x 4.5 (Mounting hole) 39 23 8 (Pitch) 1.5 10.5 49.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) (Pitch) n x Rc 1/8 (A port) L Dimension n L n: Stations 1 37 27 20 398 388 13 32 51 70 89 108 127

CYPSeries

L Y69BL 5m .

CYPSeries

L Y69BL 5m .

HRX-OM-R016

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Micro Mechanical Valve Series VM1000

P.T. 5.5 25 (L) (A) 3 port (A) 2 12 10 1 (P) 3 (R) 14.5 14.5 2 x 1/8 17 44 25.4 2 x 4.6 mounting hole * 0.5 MPa supply Model L A VM120-01-00A 32.5 7.5 F .O.F .* 26 N VM130-01-00A P .T. 1.5 mm VM121-01-00A 28.5 3.5 O.T. 1.5 mm VM131-01-00A T.T. 3 mm Roller lever VM121-01-01A VM131-01-01A VM121-01-01SA VM131-01-01SA Symbol 2 port 10 Polyacetal or hard steel roller (A) 2 12 10 1 (P) 29.2 45.5

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly *1 AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S *2 Round type *3 Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 Round type *3 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure gauge 0.02

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

HRX-OM-W038

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

VM

only) 0.5 MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM120-01-00 VM130-01-00 32.5 1.5 mm O.T. 3.5 VM121-01-00 VM131-01-00 28.5 2-4.6 mounting hole 3.0 mm T.T.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84

PFxx-OMJ0005CN

min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S

HRX-OM-O021

Fig. 4-6 Filling of Circulating Fluid Check the drain port is closed by the valve to prevent the supplied circulating fluid from draining out. Supply the circulating fluid up to the H mark on the tank. Operation will stop when the fulid level falls lower than L. 4.3 Preparation of circulating fluid HRS Series 4-4 HRX-OM-O021 Chapter 4 Starting the Product 4.

VK300

Refer to pages 4-5-4 to 4-5-9 for external dimensions in mounting.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-01 AS2201FG-02, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10

HRX-OM-R005

Fig. 4-6 Filling of Circulating Fluid Check the drain port is closed by the valve to prevent the supplied circulating fluid from draining out. Supply the circulating fluid up to the H mark on the tank. Operation will stop when the fulid level falls lower than L. 4.3 Preparation of circulating fluid HRS Series 4-4 HRX-OM-R005 Chapter 4 Starting the Product 4.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

+ B) 103 Yaw moment Me3 = 1/3 We (L + A) 103 (mm) Average load coefficient Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 Me3 Me1 We We L A L B Cylinder central axis Guide shaft mounting surface Guide central axis 8-17-4 4 Series CYP Model Selection 2 Selection Calculation The selection calculation finds the load factors (n) of the items below, where the total (n) does not exceed 1.

HRX-OM-W032

min 45 ( 0.31 / 0.45 MPa) Pump capacity 50/60Hz Maximum flow rate L/min 110 / 130 Maximum lifting height m 36 / 50 Circulating fluid system Minimum operating flow rate6 L/min 25 Tank capacity L 25 Port size Rc1 (Symbol F: G1, Symbol N: NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side