CJ5-S

RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LF LP LG LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2

CJ5-S

RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LP LG LF LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

High Purity Fluoropolymer

L1 L2 H G F M Y E B 2 11.5 18.5 LQ1R1A-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 18.5 8 4 10 16 1/8" LQ1R4C-F LQ1R4B-F LQ1R4A-F LQ1R3D-F LQ1R3C-F LQ1R3B-F LQ1R3A-F LQ1R2F-F LQ1R2E-F LQ1R2D-F LQ1R2C-F LQ1R2B-F LQ1R2A-F 18.5 1/8" 19.5 4 16.5 28 14 12 6 15 21.5 1/4" 22 21.5 1/4" 24 5 23 36.5 17 18 9 20 25 3/8" 25.5 25

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

4 !5 !

VCW

steel, PTFE 3 4 Class Stainless steel, NBR O-ring t y u t y u FKM, EPDM, PTFE FKM, EPDM, PTFE NBR O-ring NBR Return spring Stainless steel Return spring Stainless steel Body Stainless steel Brass Stainless steel Body Brass Dimensions: Bracket A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Port size

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LVQ L1 L2 H G F M Y E B LQ 2 11.5 18.5 LQ1R1A-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 8 4 18.5 10 16 1/8" LQ1R4C-F LQ1R4B-F LQ1R4A-F LQ1R3D-F LQ1R3C-F LQ1R3B-F LQ1R3A-F LQ1R2F-F LQ1R2E-F LQ1R2D-F LQ1R2C-F LQ1R2B-F LQ1R2A-F LVN 18.5 1/8" 19.5 TI/ TIL 4 16.5 14 12 6 28 15 21.5 1/4" 22 PA 21.5 1/4" PAX 24 5 23 17 18

Hygienic Design Cylinder Series HY

AL B B1 C D Ee11 F FA FB G H H1 MA MB J K KA MM N P S T U V W SA 32 40 50 63 500 or less 22 24 32 32 18 20 27 27 50 58 70 84 17 19 24 24 32.5 38 46.5 56.5 12 16 20 20 30 35 40 45 16 18.5 23 23 5 4.5 5 5 4 4 4 4 14 15 17 17 48 54 69 69 6 7 10 10 16 16 16 16 3.2 3.2 4.2 4.2 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 6 6.5 8 8 10 13 16 16 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 28 28 32 32 1/8 1/4

Thermo-chiller/Rack Mount Type

Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Cylinder

Bore6:CO.5 ~ .+~ MM 4>1O, 1S:Cl n\ ~I +I." ~\ 10>1 f!-f.F F ", "I , H I' f.'5., I1tJ F E Rod end without ~ H S R thread , I Z oG H K l MM 1 s I z..q sst I lost IS" , 5" 16!J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

/

Plated, only for 3-port valve Bracket Iron Replaceable part (Refer to page 4.) 5 Series SGH Dimensions: 2-Port, 7 MPa Air operated type L F K (Filter standard installation) Pilot port Pilot EXH port Q: Female thread for mounting bracket 4 threads on each side. 8 threads in total. 12 PE E Bracket Main port R J D 1 2 O I N M C B A P: For mounting 4 locations H G Air Operated Type A B C D E

AR20-B to AR60-B

embedded type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B*1 C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 *2 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5

CV/MVGQ

G RS H A RZQ MI W S CEP1 H + Stroke CE1 Z + 2 x Stroke ZZ + 2 x Stroke CE2 ML2B I H1 H FZ FY FX FT B1 FD MM B F K AL B2 C2 D H2 HX A Eh8 Bore size (mm) 20 25 32 40 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 8 28 41 75 60 4 7 M8 x 1.25 34 13 5 15.5 8 18 57.5 13 26 30 5 C J G5-S 8 33.5 45 75 60 4 7 M10 x 1.25 40 13 5.5 19.5 10 22 63.5 17 32 37 6 8 37.5 45 75 60 4 7 M10 x 1.25 40 13 5.5

Air Slide Table Series MXS

(mm) Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 N 4 4 4 4 6 6 6 8 8 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 GA 25 25 25 35 50 54 107 155 195 HA 35 35 35 35 35 70 70 76 88 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121 146 171 KA 169 223 275 NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254

Dual Rod Cylinder Series CXSJ/CXS

4 !5 !2 CXSWL6 r !5 !6 q !8 !0 !

Cylinder with Lock Series MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

15

Dimensions: Motor Top Mounting LEYG25, 32 Motor flange Y2 Motor Rod operating range Note 1) (Stroke + 4 mm) 4 x NA Section XX1 4 x OA through thread depth NB H M EV S Q U GA J Y (EB) EA M C EH T EB X 0.5 XA H9 depth XA EC ED B + Stroke Y1 L + Stroke 4 x OA thread depth OB XA H9 DB X Section XX1 (2:1) Bottom hole G through Note 2) depth XA 2 x NA thread depth NC (R2) XAH9 DA P XB (0.5) K Section

RB/RBL/RBQ

6.8 6.8 8.7 8.7 54.3 55.3 62.7 63.7 8.5 8.5 10 10 12 12 14 14 13.9 13.9 16.2 16.2 4 4 4 4 MK(2) RS Q G RS H A Basic type: RB1411, RB1412, RB2015, RB2725 With cap: RBC1411, RBC1412 RBC2015, RBC2725 RZQ Other dimensions are the same as the basic type.

RB/RBL/RBQ

7 8 8.5 13 RS Q G 46 80 92 98 149 RS H A 5 RZQ 4.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13