5 1 LL 3 SY 53 20 01 Thread type UL/CSA compliant Nil F N T Rc G Series NPT 5 7 NPTF 53-SY5000 53-SY7000 Thread piping A, B port size Type of actuation Symbol Port size Applicable series 1 2 3 4 5 A Note) 01 02 1/8 53-SY5000 2-position single 1/4 53-SY7000 2-position double 3-position closed center One-touch fitting (Metric size) Note) 3-position exhaust center Symbol C4 C6 C8 C8 C10 Port
% 1Vt 1 % 2% 3 4 v3 3l t h a 1 % z 2y, 3 Series NCQT D Aulo-swiich capable Switches (see page 16) Type of Aulo Switch (Rail Mounted) Wiiilut Auto witch : Female Rod (Stid.)
below minimum temperature is recommended) Oil class: 3 (or <1 ppm) Capacity with 4 bar / 60 psi supply: 5.5 Nm3/h / 3.3 scfm (spool valve 2) 12 Nm3/h / 7.1 scfm (spool valve 3) 38 Nm3/h / 22.4 scfm (spool valve 6) Consumption with 4 bar / 60 psi supply in steady state position: < 0.6 Nm3/h / 0.35 scfm (spool valves 2 & 3) < 1.0 Nm3/h / 0.6 scfm (spool valve 6) Electronics ND9000H and ND7000H
DXT170-176-2-01 DXT170-176-2-02 100V 200V 100 VAC 200 VAC DXT170-176-2-03 110V 110 VAC DXT170-176-2-04 220V 220 VAC DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240V 6VD 12VD 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC Circuit with Indicator Light AC circuit DC circuit NL: Neon bulb R: Resister D: Protective diode LED: Light emitting diode R: Resistor 4
(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14
No Maieria P a r t n o . l , l , l l rRv1000 tRv2000 1 Diaphragm asgembly H-NBR, etc P538010.6 P$8m0-3 P538030-5 Slainless steel, H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring
No Maieria P a r t n o . l , l , l l rRv1000 tRv2000 1 Diaphragm asgembly H-NBR, etc P538010.6 P$8m0-3 P538030-5 Slainless steel, H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring
Series VXZ22/23 How to Order Model Port size (Rc 1/4) (Rc 3/8) (Rc 1/2) (Rc 3/4) (Rc 1) 02 03 04 06 10 2230 2230 2240 2350 2360 Electrical option Nil None With surge voltage suppressor With indicator light With light/surge voltage suppressor Thread type S Nil Rc L T NPTF F G Z N NPT Refer to the table (1) given below for availability. VXZ 2230 02 1 G N.C.
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil)
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)
: pos't,on e"f]urs "er,fer 3 position pressure cenler ffi " Ava able on 2 pos t on dolbe soenoid only and requ res the B" lype manual overrrde cannol comb ne w lh "H or'Y optons conneclor with 300rnm ead wre Cons!
Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"
Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5650 1-G H 2 position double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550