Modular F.R.L. Pressure Control Equipment

Model name Model AMR3000 AMR4000 AMR5000 AMR6000 :E3-02 :E3-03 :E4-02 :E4-03 :E4-04 :E5-04 :E5-06 :E6-06 1:E6-10 1 4 3 8 1 4 3 8 1 2 3 4 3 4 Adapter assembly Note 7) 1 2 Float style auto drain (AMR100) Note 8) AD33-X203 AD33X202 AD33-X210 AD33-X201 AD33-X203 AD33-X202 IS1000-01 (0.4 MPa setting) AD33-X210 AD33-X201 Compact pressure switch Elbow (R x Rc) Note 9) 135510 135613 135510 135613

VEX1

(300mm lead wire) 1 4 1 4 H Gromet (600mm lead wire) 02 3 03 1 4 1 4 D DIN connector 3 8 3 8 DO DIN connector (Without connector) 04 1 2 1 2 AN 04 5 06 1 2 3 4 1 2 3 4 1 Body ported G Grommet (300mm lead wire) AMC 10 1 1 1 H Grommet (600mm lead wire) E Grommet terminal 10 7 12 14 9 20 2 Wihout subplate 1 4 1 T Conduit terminal D DIN connector 1 4 1 2 1 2 G Grommet (300mm lead wire) Grommet

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

3 Port Air Operated Valve Series SYJA300 1

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

5 Port Solenoid Valve SY Series

Position closed center / Exhaust center / Pressure center Grommet (G), (H): SY7 20(-F2) G H C8, N9 C10, N11 3 4 5 SY7 20-02(-F2) G H 3 4 5 (For mounting bracket) 2-M4 x 0.7 depth 6.5 20 20 (A, B port) 1/4 7 31.5 [38.5] 40 24.5 One-touch fitting (A, B port) Applicable tubing O.D. : 8, 5/16" : 10, 3/8" G: Approx. 300 H: Approx. 600 134.4 [138.8] 60.7 [62.9] (Lead wire length) 38.5 51.5 13.6

Modular Type Regulator Series AR

Standard specifications Model AR20K AR25K AR30K AR40K AR40K-06 AR50K AR60K Port sizes 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Air Fluid 1.5MPa Proof pressure 1.0MPa Maximum operating pressure 0.05 to 0.85MPa Set pressure range Note 1) Pressure gauge port size Note 2) Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Set

VM

VH Twist Selector (3 position)/VM230-02-35R, B, G, Y/VM250-02-35R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 40N F.O.F. 0.5MPa supply 45 T.T. Foot Pedal/VM220-02-40, VM230-02-40 JIS Symbol 2 port 3 port 65N F.O.F. 0.5MPa supply 1.2 T.T. 3.5-24 3 Port Mechanical Valve Series VM400 Specifications NC or NO models available.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Note 3) Only the metric size is available for the G thread type. Thread type Nil R N NPT G G Port size 01 1/8 02 1/4 03 3/8 04 1/2 Made to Order (For details, refer to page 678.)

VCC

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

CG5-S

(mm) 4 Connection threads Model -01 R 1/8 -02 R 1/4 KGD06-M5 M5 x 0.8 KGLU04-M5 M5 x 0.8 -01 R 1/8 4 -01 R 1/8 6 -02 R 1/4 -02 R 1/4 -03 R 3/8 KGLU06-M5 M5 x 0.8 KGD08-01 R 1/8 -01 R 1/8 6 8 -02 R 1/4 -02 R 1/4 -03 R 3/8 -03 R 3/8 KGD10-02 R 1/4 KGLU08-01 R 1/8 10 -03 R 3/8 -02 R 1/4 8 -04 R 1/2 -03 R 3/8 KGD12-02 R 1/4 KGLU10-02 R 1/4 -03 12 10 R 3/8 -03 R 3/

VQZ1000/2000/3000

port F G M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) Note 1) 3(R2), 5(R1) port of VQZ2000 is only G 1/16.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

LEC-OM02704CN

2)5 4 PT3 RY(n+2)6 TL1 RX(n+2)6 5 PT4 RY(n+2)7 PC RX(n+2)7 6 PT5 RY(n+2)8 CDP RX(n+2)8 7 PT6 RY(n+2)9 RX(n+2)9 8 PT7 RX(n+2)A RY(n+2)A RX(n+2)F RX(n+3)0 RY(n+2)B / RX(n+3)9 RY(n2)C RX(n+3)A ALM 15 RY(n+2)F RY(n+3)0 RX(n+3)B Ready CRD RY(n+3)9 RX(n+3)C RY(n+3)A RES RX(n+3)F RY(n+3)B RY(n+3)F . n 3 12 3CC-Link (RWwn) (RWrn) (1) (1) RWwn 1(2) RWrn 116bit RWwn1 2(2) RWrn1

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

5 Port Air Operated Valve

328 361 394 427 460 493 526 559 128 161 194 227 260 293 326 359 392 425 458 491 524 557 1517 5 Port Air Operated Valve VFA3000/5000 Series Manifold Base Mounted How to Order Manifold VV5FA 3 40 02 2 05 Common exhaust F Series Stations 02 Thread type Nil F N T Series VFA3000 VFA5000 P, R Port size 1/4 3/8 2 stations Symbol 3 5 A, B Port size 1/4 1/4 Rc G NPT NPTF 20 20 stations Up to 10

Prevents Micro-Bubbles

) LVH A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations LVD 02 2 stations LVQ 05 5 stations LQ LVN How to Order Valve TI/ TIL LVA 2 0 02 C A PA PAX Option Body class Nil 1 4 Symbol 2 3 4 5 None With flow rate adjustment With indicator Body class 2 3 4 5 Orifice dia. 4 8 12 20 PB Valve type 0 1 2 N.C.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

20.9 30.2 (30.3) 23 (24) AS221FSG-02-03 (S) 5/32" 8.2 AS221FSG-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FSG-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FSG-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-

Intrinsically Safe Valve

5 1 LL 3 SY 53 20 01 Thread type UL/CSA compliant Nil F N T Rc G Series NPT 5 7 NPTF 53-SY5000 53-SY7000 Thread piping A, B port size Type of actuation Symbol Port size Applicable series 1 2 3 4 5 A Note) 01 02 1/8 53-SY5000 2-position single 1/4 53-SY7000 2-position double 3-position closed center One-touch fitting (Metric size) Note) 3-position exhaust center Symbol C4 C6 C8 C8 C10 Port