2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible

0.4

VVQ1000-50A-N7 Applicable tubing 5/16" VVQ1000-51A-N9 Note) A-side energization: A light (Orange) illuminates.

SQ1000/2000

How to order valves (example) SQ11305 N7 Port position Cylinder port size Symbol Applicable tube O.D. inch N1 1/8" Nil L Side Top N3 5/32" N7 1/4" N9 5/16" A/B port SQ1000 SQ2000 How to order manifolds (example) Add "00T" at the end of the part number.

Metal Seal/Rubber Seal Series VQ Body Ported

(1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer

5 Port Solenoid Valve Series VQZ1000/2000/3000

VV5QZ 5 N7 T C Thread type (Cylinder port and 1(P), 3(R2), 5(R1) ports) Cylinder port Entry is the same as standard products.

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Cylinder port NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

0.4

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

0.4

T How to order valves (Example) kit SQ113051 N7 Port location Cylinder port Symbol Applicable tubing O.D.

Valve Single Unit

One-touch fitting for 1/4" N7 One-touch fitting for 5/16" N9 SX5000 Connector assembly for L and M typesRefer to page 1-6-8.

SYJ300/500/700

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8, 63.5

5 Port Solenoid Valve

C6 With 6 One-touch fitting C8 With 8 One-touch fitting C10 With 10 One-touch fitting C12 With 12 One-touch fitting N7 For 1/4" N9 For 5/16" N11 For 3/8" 02 1/4 03 3/8 B Bottom ported 1/4 CM Mixed Nil Without input block 1 M12, 2 inputs 2 M12, 4 inputs 3 M8, 4 inputs Nil None 1 1 station 9 9 stations Note 1) Without SI Unit, the symbol is nil.

V100

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

Digital Flow Switch (Integrated display type)

-L) 68 2.8 depth 6.2 PF2M711/721-N7(-L) 64.6 2.8 depth 6.2 -99No.PF-OMW0007-E PF2M#L-C4/C6/C8/N7(-L) (mm) Model A C P PF2M701/702/705/710L-C4(-L) 84.4 7.6 2.8 depth 8.4 PF2M701/702/705/710/725/750L-C6(-L) 84.4 8 2.8 depth 8.4 PF2M725/750L-N7(-L) 84.4 11.8 2.8 depth 8.4 PF2M711/721L-C8(-L) 88 12 2.8 depth 6.2 PF2M711/721L-N7(-L) 88 10.3 2.8 depth 6.2 -100No.PF-OMW0007-E PF2M7#-#1/2(-L) (mm

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

Fieldbus System

Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P , E port A, B port size (Metric) Symbol A, B port P , E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting

PFxx-OMJ0005CN

C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

for5/32 VVQ1000-51A-N3 One-touch fitting for1/4 VVQ1000-51A-N7 SY5000 One-touch fitting for5/16 VVQ1000-51A-N9 Note 1)P and R ports cannot be changed.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Description Material Note 1 Body Spool Sleeve Spool valve Piston Pilot valve Aluminum die cast / Metal seal Stainless steel 2 Rubber seal / Aluminum NBR 3 4 Resin 33 Series VQZ Body Ported Type Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 65% Grommet (G): VQZ115G -N1, N3, N7, M5 2-N1, N3, N7, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for 5/32" N7: One-touch fittings