MHF2-E

For guide: GR-S-010 (10g) For cylinder: GR-L-005 (5g) or GR-L-010 (10g) A 14 - 3-4. Construction/Parts list 1 MHF2-8D, MHF2-8D1 Components No. Description Material Note No.

Digital Flow Switch (Integrated display type)

[F 3] Digital filter setting completed -44No.PF-OMW0007-E [F 4] Auto-preset function setting This function will automatically calculate and set the optimum pressure based on the actual operating condition, when hysteresis mode has been selected. Press the UP or DOWN button in function selection mode to display [F 4]. Press the SET button.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

) With name plate F 01 02 C6 C8 Rc(PT)1/8 Rc(PT)1/4 One-touch fitting for 6 One-touch fitting for 8 Rc(PT)1/8 Rc(PT)1/4 One-touch fitting for 6 One-touch fitting for 8 01 02 C6 C8 D N Drop prevention Stop in the middle Note)When specifying more than one symbol, indicate them alphabetically.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

C6: One-touch fitting for 6 D side VQD Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D 1 set (F kit 9 station manifold base) SQ1130-5-C6 4 sets (2 position single) SQ1230-5-C6 4 sets (2 position double [latching]) SSQ1000-10A-3 1 set (Blanking plate) The asterisk denotes the symbol for assembly.

smcmaintenancepartslist

AMF150C AMF-EL150 AMF-EL150-F AMF250C AMF-EL250 AMF-EL250-F AMF350C AMF-EL350 AMF-EL350-F AMF550C AMF-EL550 AMF-EL550-F AMF650 AMF-EL650 AMF850 AMF-EL850 Except option F For option F Element assembly Glass fiber, others AMF-EL450 AMF-EL450-F 4 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

VQC

Elbow fitting assembly VVQ1000-F-L Port plug VVQ0-58A Electrical wiring specifications [-K] VVQC1000-19AD S 0 C3 C4 C6 M5 VQ5 C6 (SUP port) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-sub connector 6 One-touch fitting Terminal no.

Mechanically Jointed Rodless Cylinder Series MY1

MY2H G D Za MY3A MY3B 4 x MM E1 E1 MY3M E4 E4 E3 E3 C E2 E2 F B G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2 x LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) B C D F G 90 H A Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 110 110 55 70 126 37 J C2 C 131 130 65 80 149 100 37 K L P Q E3 E4

0.

(The standard valve has an individual exhaust for the pilot valve.) 32 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (for Cylinder port) C3 C4 C6 C8 C10 Fitting size Model M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 Note

PSxx-OMM0006CN

0] [F] 2 2 [-] [F 0] 27 ISE40A MPa ""M ZSE40A(F) kPa ISE40A P ZSE40A(F) psi [[F 1] OUT1 28 ONOFF ISE40A0.500 MPa ZSE40A-50.7 kPa ZSE40AF50.0 kPa ISE40A0.050 MPa ZSE40A5.1 kPa ZSE40AF5.0 kPa ON OFF [F 2] OUT2 31 [F 1]OUT1 OUT1 -25No.PS-OMM0006CN-E [F 3] 33 2.5 ms [F 4] 34 [F 5] / 36 [F 6] 38 0 [F11] 39 1000 [F80] 40 OFF [F81] 41 OFF [F90] 42 OFF [F97] 44 OFF [F98] 46 [

modular-press-e

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.

Modular F.R.L. Pressure Control Equipment

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.

New

X U1 U1 X1 X1 2 x 0.13 Mounting hole 2 x 0.13 Mounting hole z 11 Q F D 0.44 Q F D G1/2 0.90 R C C R E E 2 x P Port size 2 x P Port size B1 B1 B B Terminal part Faston connector 250 Series 0.44 0.36 0.26 0.59 (inch) Electrical entry Size Mounting bracket dimensions One-touch B B1 C D E F Conduit Faston type fitting P Q Q R R U U1 W X X1 Y 1 2 3 C6, C8 2.11 2.60 2.68 1.14 1.42 1.46 2.58 3.01

Digital Flow Switch (Integrated display type)

of maximums rated flow [H_2] Setting of Hysteresis (OUT2) PFM710: 0.3 L/min, PFM725: 0.8 L/min PFM750: 1.5 L/min, PFM711: 3 L/min [F 3] [FLU] Operating fluid [ A i r ] dry air, N2 Page 28 [F 4] [rEF] Reference condition [Anr] Standard condition Page 29 [F 5] [eES] Response time [1.00] 1 second Page 30 [F 6] [dSP] Display mode [inS] Instantaneous flow Page 31 [F 7] [inP] External input [r_

7.5

U D B M SJ3260-5CU-C6 (2 sets) Double solenoid (24 VDC) U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 24 stations) Special specifications SJ3160-5CU-C6 (2 sets) Single solenoid (24 VDC) Valve stations F: D-sub connector P: Flat ribbon cable (26 pins) Note Note Up to 24 solenoids possible.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Option None IN side port side OUT side port side DIN rail mounting (for manifold) With bracket With name plate D M5 thread One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 C3 C4 C6 F N Drop prevention Stop in the middle Note) When specifying more than one option, combine symbols in alphabetically.

Digital Pressure Switch

[F 0] Units selection function Page 27 Symbol Model Default setting ISE40A MPa Nil or M ZSE40A(F) kPa ISE40A P psi ZSE40A(F) [F 1] Setting of OUT1 Page 28 Item Description Default setting Output mode Select hysteresis mode window comparator mode or OFF mode. Hysteresis mode Reversed output Select reversed output.

Intrinsically Safe Valve

5 1 LL 3 SY 53 20 01 Thread type UL/CSA compliant Nil F N T Rc G Series NPT 5 7 NPTF 53-SY5000 53-SY7000 Thread piping A, B port size Type of actuation Symbol Port size Applicable series 1 2 3 4 5 A Note) 01 02 1/8 53-SY5000 2-position single 1/4 53-SY7000 2-position double 3-position closed center One-touch fitting (Metric size) Note) 3-position exhaust center Symbol C4 C6 C8 C8 C10 Port