Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

smcmaintenancepartslist

121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank Metal bowl with level gauge Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

V

SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF 1/8 SY5000 SY5000-39-1TA NPTF 1/8 SY7000 SY7000-38-1A PT 1/4 SY7000 SY7000-39-1A PT 1/4 SY7000 SY7000-38-1TA NPTF 1/4 SY7000 SY7000-39-1TA NPTF 1/4 FLAT RIBBON CABLE ASSEMBLY AXT100-FC26(1/2/3) PORT PLUGS Cable Length (L) Assembly Number Note 1.5m AXT100-FC26-1 Cable 26 CoreX28AWG 3m AXT100-FC26-2 Cable 26 CoreX28AWG

SYJ3000/5000/7000

(Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

MHS2-32D MHS2-40D Q 11 12 RA 38 44 SA 4.5 5.5 FX 23 26.5 G 30.5 32 AA 44 47 NA 14 16 J 20 21 AB 41 44 L 2H9 3H9 B 56 62 DO 64 70 DC 56 62 EO 24 28 EC 16 20 CA 8 9 CB 16 17 FY 20.5 23.5 FZ 5 6 +0.025 0 +0.025 0 Model MHS2-32D MHS2-40D UA M5 x 0.8 M6 x 1 UB 10 12 VA VB 3 4 WA XA XB 3 4 SB 8 9.5 +0.025 0 +0.030 0 +0.025 0 +0.030 0 +0.062 0 +0.062 0 34H9 3H9 4H9 3H9 4H9 42H9 6 Series MHS 2

SZ3000

Supply/exhaust block assembly (6): SZ3000-50-1A-C6 External pilot block assembly (6): SZ3000-54-1A-C6 External pilot block assembly (4): SZ3000-54-1A-C4 [Note] SUP blocking disk: SZ3000-114-4A EXH blocking disk: SZ3000-114-4A (2pcs.

Table of Contents

ZSP AWG24-26 (0.14 to 0.2 mm2) AWG24-26 (0.14 to 0.2 mm2) AWG20-22 (0.3 to 0.5 mm2) AWG20-22 (0.3 to 0.5 mm2) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 ISA2 1.4 to 2.0 PSE521 1.0 to 1.4 IS PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. ZSM PF2 Brown Black Blue N.C. 1 2 3 4 IF Data F.G.

LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

Table of Contents

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SU) S D20YB effective depth YC YA 2 View With internal shock absorber MSQAR MSQBR High precision type MSQAA: With adjustment bolt MSQAR: With internal shock absorber DJ DH DI FE HA (UV) (mm) (mm) FU DH DI DJ DK DL FE HA UV Size 10 20 30 50 Size 10 20 30 50 31.5 45h8 46h8 20H8 5 15H8 10 18.5 52.5 34.7 60h8 61h8 28H8 9 17H8 15.5 26 63 (Max. approx.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Adapter Plate Assembly SYJ500-3-2A SYJ500-3-1A SYJ500-3-1A-1-Q SYJ500-3-1A-2-Q Round head combination screw Round head combination screw Round head combination screw A Round head combination screw Round head combination screw Gasket Gasket Round head combination screw Round head combination screw Round head combination

VFR

Material Description AXT632-3(M3 x 32) VFR3000-26-4 VFR31 VFR3000-26-4 VFR32 AXT632-3(M3 x 32) VFR3000-26-4 VFR33/34/35 NBR Hexagon socket head screw Gasket !1 AXT632-3(M3 x 32) Refer to How to Order Pilot Valve Assembly on page 3-5-30. Refer to How to Order Sub-plate Assembly on page 3-5-31. Steel !2 !

SZ3000

SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

VFS

Material Description NVF2000-48 VFS21 VFS22 AXT624-19-1 AXT624-20-2 AXT624-20-2 AXT624-20-2 AXT624-26 AXT624-26 AXT624-26 !2 Detent assembly AXT624-11A VFS23/24/25 Return spring Gasket !1 Steel Hexagon socket head screw Stainless steel !0 o NBR !

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

0.4

Note) Electric current should be 1A or less (including the mounted valves).

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

Series VQ Base Mounted Metal Seal/Rubber Seal

Note) Electric current should be 1A or less.