VQ5000

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

CY1

82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 171 60 48 70 47 10 60 121 188 94 32 With auto switch CY1R6H .

Series VQ Metal Seal/Rubber Seal Body Ported

AXT661-12A AXT661-14A AXT661-14A-6 AXT661-14A-10 AXT661-14A-20 AXT661-14A-30 Lead wire length Single/3 position No. AXT661-12A AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 Double No.

Plug-in Unit

B 8B () (+) Station 8 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL. A 9A () (+) SOL. B 9B () (+) Station 9 SOL. A 10A () (+) SOL. B 10B () (+) Station 10 Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM. (+) () COM. Positive COM.

HRX-OM-X084

Fig 9-5 Cooling capacity (HRR010-A -10-) 9.4.2 HRR010-W-102000 2000 50Hz 60Hz 25 1500 1500 25 Cooling capacity[W] Cooling capacity[W] 32 32 35 35 1000 1000 500 500 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] The cooling capacity will be reduced by 300W when option: T1 is selected.

Basic Type/Direct Mount Type

40 30 20 300 200 100 10 Usable range 20 30 40 50 Usable range 5 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B CY3R CY3B CY3R CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) CY1S 100 500 400 50 300 30 200 CY1L 100 10 20 30 40 50 Usable range

SX

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

VZ100/300/500

Without lead wire Nil 6 10 15 20 25 30 300 600 1000 1500 2000 2500 3000 Nil Blue (2) Red (2) Gray (2) Red: +, Black: For 100 VAC For 200 VAC Another VAC For DC 1 2 3 4 Connector Lead wire How to Order Include the connector assembly part number together with the part number for the plug connectors solenoid valve without connector. (Example) 2000 mm lead wire length.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

90 5 90 10 180 10 90 5 90 10 180 10 90 5 90 10 180 10 90 5 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) 5 to 60C Ambient and fluid temperature 0.15 to 0.7 0.2 to 0.7 0.15 to 1.0 Operating pressure range (MPa) Rotation time adjustment range (sec/90) 0.07 to 0.3 Allowable radial load 40 N 50 N 60 N 20 N 30 N 60 N 80 N 15 N Shaft load Allowable thrust load 2 15 N 30 N 40 N 10 N Allowable

15

Allowable load mass on guides and moment Allowable moment [Nm] M1 1.3 2.6 8.6 17 30 67 96 Bore size (mm) Allowable load mass on guides m [kg] 6 10 15 20 25 32 40 M2 1.4 2.9 8.9 18 35 82 124 M3 1.3 2.6 8.6 17 30 67 96 9 15 35 60 104 195 244 The table above indicates the maximum performance of the guide, but does not show the actual allowable work load mass.

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

SZ3000

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 35 SZ3000: Specific Product Precautions 1 Be sure to read before handling. Refer to pages 32 through 35 for safety instructions and common precautions.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.

Non-contact Gripper

0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size: 80 Size: 100 30 50 0.4 (MPa) 0.4 (MPa) 25 40 0.3 (MPa) 0.3 (MPa) Lifting force (N) Lifting force (N) 20 30 0.2 (MPa) 15 0.2 (MPa) 20 10 0.1 (MPa) 0.1 (MPa) 10 5 0 0 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

CV/MVGQ

range Up to 300 13 5 18 9 65.3 15.5 10 28 19 5 8 30 13 M8 x 1.25 41 15 24 20 0 0.033 Up to 300 17 6 22 9 70.5 19.5 10 33.5 19 5.5 10 30 13 M10 x 1.25 45 15 30 26 0 0.033 Up to 300 17 6 22 9 76.5 19.5 10 37.5 19 5.5 12 30 13 M10 x 1.25 45 15 34.5 26 0 0.033 0 0.039 Up to 300 22 8 24 10 84.5 21 15 46.5 30 7 14 39 16 M14 x 1.5 50 21.5 42.5 32 Clevis pin and snap ring (cotter pin for 40) are

CV/MVGQ

41 30 14 9 18 13 5 9 15.5 13 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 10 19 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 CV 12 19 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 30 15 50 39 18 10 24 16 7 11 21 22 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 MVGQ Dimensions by Stroke Single Acting/Spring