smcmaintenancepartslist

-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS-A0804 MIS8-PS MIS-A1204 MIS12-PS MH-G01 (contents quantity

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 86 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

Compact 5-Port Solenoid Valve

JSY1000 JSY11M-15P-1A JSY3000 SY30M-15-1A JSY5000 SY50M-15-1A Number of cores (Lead wire) Lead wire length [m] * The part number is for 1 piece.

VFS

Body (Pilot exhaust) 20: Individual EXH Electrical entry T: Conduit terminal D-Y: DIN terminal G: Grommet E: Grommet terminal 30: Common EXH Coil rated voltage 3 2 1 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) Manifold only 4 220 VAC (50/60 Hz) Pilot type 6 5 24 VDC 12 VDC Internal pilot Nil External pilot R 7 240 VAC (50/60 Hz) 9 Other Option.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VQ4 Electrical entry Body (Pilot exhaust) T: Conduit terminal D, Y: DIN terminal G: Grommet E: Grommet terminal 20: Individual EXH VQ5 VQC VQZ SQ Coil rated voltage 30: Common EXH 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) 9 Other 3 2 1 VFS 4 VFR 6 5 VQ7 7 Option Manifold only How to Order Pilot Valve Assembly Applicable

AC Servo Motor Driver (Pulse input type/Positioning type ）

However, setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the 50 [%] time of 50% or more oscillation level.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1A 1.9 180 50 or less 0.95 (0.43) center % 2.0 Pressure NVFR3500 NYFR3510 If. 2.2 180 50 or less 0.95 (0.43) center % 2.3 i!

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

50% 70% 150 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end

High Vacuum Angle Valve

-1 XLG63-30-1H-1 XLGV63-30-1 50 XLA50-30-1 XLA50A-30-1 XLA50-30-1H XLA50A-30-1H XLAV50-30-1 XLAV50A-30-1 XLC50-30-1-1 XLC50-30-1H-1 XLCV50-30-1-1 XLF50-30-1 XLF50A-30-1 XLF50-30-1H XLF50A-30-1H XLFV50-30-1 XLFV50A-30-1 XLD50-30-1 XLD50-30-1H XLDV50-30-1 XLG50-30-1-1 XLG50-30-1H-1 XLGV50-30-1 XLH50-30-1 40 XLA40-30-1 XLA40A-30-1 XLA40-30-1H XLA40A-30-1H XLAV40-30-1 XLAV40A-30-1 XLC40-30-1

0.55

How to Order Connector Assembly DC : V200-30-4A100 VAC : V200-30-1A200 VAC : V200-30-2AAC other voltages: V200-30-3AWithout lead wire : V200-30-A (With connector and 2 pcs. of socket) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm How to Order Include the connector assembly part number together with the part number for the plug connectors

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1 Vibration frequency 50 60 50 Vibration suppression control 1 Resonance frequency 50 60 50 Vibration suppression control 1 Vibration frequency damping 0.20 0.15 0.20 Vibration suppression control 1 Resonance frequency damping 0.20 0.15 0.20 Vibration suppression control 2 Vibration frequency 20 30 20 Vibration suppression control 2 Resonance frequency 20 30 20 Vibration suppression

Aluminum High Vacuum Angle Valve

-1 XLG63-30-1H-1 XLGV63-30-1 50 XLA50-30-1 XLA50A-30-1 XLA50-30-1H XLA50A-30-1H XLAV50-30-1 XLAV50A-30-1 XLC50-30-1-1 XLC50-30-1H-1 XLCV50-30-1-1 XLF50-30-1 XLF50A-30-1 XLF50-30-1H XLF50A-30-1H XLFV50-30-1 XLFV50A-30-1 XLD50-30-1 XLD50-30-1H XLDV50-30-1 XLG50-30-1-1 XLG50-30-1H-1 XLGV50-30-1 XLH50-30-1 40 XLA40-30-1 XLA40A-30-1 XLA40-30-1H XLA40A-30-1H XLAV40-30-1 XLAV40A-30-1 XLC40-30-1

AC Servo Motor Driver (Network card type ）

20 Vibration suppression control 1 Vibration frequency 50 60 50 Vibration suppression control 1 Resonance frequency 50 60 50 Vibration suppression control 1 Vibration frequency damping 0.20 0.15 0.20 Vibration suppression control 1 Resonance frequency damping 0.20 0.15 0.20 Vibration suppression control 2 Vibration frequency 20 30 20 Vibration suppression control 2 Resonance frequency

0.4

Single wiring 1A Red COM.

Series SV

5 50 l 31.3 14.9 30 5 34 50 48 l 5 1 2 1 2 5 4 3 4 3 Socket connector pin arrangement Socket connector pin arrangement Terminal no.

LEC-OM07605CN

(b) OFF ON OFF 63.4% CDT = 100 ms 100 50 100 4.00 10.00 4.00 120 84 120 3000 4000 3000 20 50 20 1 50 60 50 1 50 60 50 1 0.20 0.15 0.20 1 0.20 0.15 0.20 2 20 30 20 2 20 30 20 2 0.10 0.05 0.10 2 0.10 0.05 0.10 (2) (a) PB06 GD2 4.00 [] PB08 PG2 120 [rad/s] PB09 VG2 3000 [rad/s] PB10 VIC 20 [ms] PB29 GD2B 10.00 [] PB30 PG2B 84 [rad/s] PB31 VG2B

Table of Contents

, 15, 25 mm For 10 to 32 10, 20, 30, 40, 50 mm For 40, 50 10, 20, 30, 50 mm Buffer stroke Pad Type Pad form Flat with ribs Deep Bellows Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.

0.4

5 31.3 30 5 Socket connector pin arrangement Socket connector pin arrangement 50 L 50 L A code A code 14.8 SPEEDCON 44.5 L 50 2 1 5 PCA 1401804 Cable length (L) 1500 [mm] 3000 [mm] 5000 [mm] 4 3 M12 SPEEDCON 5.00.15 5.00.15 1401804 1401805 1401806 Socket connector pin arrangement A code Terminal no.