7ND9071en

or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0 130.0 602 282 17200 1 10 mm or 3/8" 752 441 26900 1 10 mm or 3/8" B1J B1JA Stroke volume dm3 / in3 NPT Piping Air (s) Spring (s) Piping Air (s) Spring (s) Piping Air (s) Spring (s) 6 0.47 28.7 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 10 mm or 3/8" [6 mm or 1/4" (x)] 8 0.9 55

CNG

XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 11 11 M5 x 0.8 3 12 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 11 11 M6 x 0.75 3 12 40 193 (201) 30 17 62 215 (223) M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 (162) 11 10 (11) M8 x 1.0 3 12 40 196 (204) 35 17 62 218

RQ

50 6.6 OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 7-7-14 for details on rod end nut and accessories.

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

PSxx-OMV0003CN

55))UPDOWN SET -21No.PS-OMV0003CN-G (P1LP1H) 21P1L()P1H()WH1() (n1Ln1H) 31 OUT2 [F 1]OUT1[F 2]OUT2// -22No.PS-OMV0003CN-G <> () ,() SET1~3[SEt] [SEt]()[P_1][n_1]() () UPDOWNSET()(55) UP DOWN SET (delay)( )(55 ) UP DOWN ON/OFF 0.01[sec.]0.0060.00[sec.]

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

LG1H

depth 8 35 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 300 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

SY

SS5Y54, #1 (#1 + #6 + #7 + #8 + #18) SS5Y5-45FU-B .

VFR

8 02 2 stations 1 2 1 2 U side mounting D U D side mounting 08 1 Side 2 Bottom 8 stations M Mixed Common Common Max: 8 stations For bottom ported: Rc 3/8 only.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

•

25 2B 14 5 23 8 6 23 8 8 29 12 6.2 4 1.8 12 29 6 23.5 8 8 29.5 1 2 6.2 4.5 2.3 ZPT3~ 32 35 14.5 5 23.5 8 29.5 1 2 Deep type F:M5X O .8 F:M6 x l F:M8 x l .25 F :~ vi D I E 1 G D I E IG D I E 1 G D I E G MOdel ,A ;B Ic ZPT25D 25 28 20 5 129 1 8 6 129 1 8 8 135 1 1 2 6.2 135 1 12 1 0 I 16 Flat type Deep type/ ZPT10D ' 16D Flat type Deep type/ ZPT40D only F F F F Widlh across Width acro5$ flats

SYJ300/500/700

Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (

MG

1 !2 !3 !4 !5 !6 !7 !8 !

39

8 t Rubber cover !0 q e !1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Modular Type Filter Regulator Series AW

66 Mist separator regulator Series AWM Round pressure gauge AWM20 1/8, 1/4 Panel mount 0.3m (95% filtered particle size) AWM30 1/4, 3/8 AWM40 1/4, 3/8, 1/2 Pages 67 through 70 Micro-mist separator regulator Series AWD AWD20 1/8, 1/4 0.01m (95% filtered particle size) AWD30 1/4, 3/8 AWD40 1/4, 3/8, 1/2 Pages 71 through 74 55 Filter Regulator AW10 to 40 Integrated filter and regulator units

CXS

ZZ CXSW32 SS 14 S 16 30 8 1614 8 Z (30) 38 2-6.9 through 2-11 counterbore with depth 6.3 2-M10 x 1.5 x 8 (Hexagon socket head set screw) 2-R3.5 8 36 1 96 1 5 6.3 0.2 75 98 76 44 75 2-R3.5 8 18 16 4-M6 x 1 (Through) 4-M5 x 0.8 with depth 8 2-M8 x 1.25 x 23 (Hexagon head bolt) 2-M8 x 1.25 (Hexagon nut) 2-M8 x 1.25 x 16 (Hexagon socket head cap screw) 8-M5 x 0.8 with depth 7.5 (Opposite side

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.

XM, XY

Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High

SMC Electronic Switch Series Variations

trimmer 1 Pressure setting trimmer 2 SET2 SET2 SET1 SET1 15 15 Indicator light Indicator light 23 23 8.5 Lead wire length 600 Lead wire length 600 (3000) 9.5 1.5 (3000) 47.5 47.5 3.5 3.5 2-3.5 Mounting hole 2-3.5 Mounting hole 8.5 13 M5 X 0.8 M5 X 0.8 13 01: R(PT) 1/8 T1: NPTF 1/8 01: R(PT) 1/8 T1: NPTF 1/8 3.9-4 Quick response 10mS Easy and simple wiring Compact Pressure Switch Series ZSE2