Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !

Modular Type Regulators Series AR

34 36 128 M42 x 1.5 34 3.5 35 45 42.5 74 42.5 74 70 1/4 1/4, 3/8, 1/2 28 27.8 36 34 3 75 129 M42 x 1.5 34 35 45 42.5 74 42.5 74 3/4 1/4 AF 28 27.8 43.5 43 3.3 169 90 M62 x 1.5 43.5 44.5 55 42.5 84 42.5 84 1/4 3/4, 1 28 27.8 43.5 176 46 3.3 M62 x 1.5 43.5 44.5 55 42.5 84 42.5 84 1/4 95 1 AR Optional specifications AL Bracket mount Panel mount Model M N Q R S T U V W Y Z AW AR10 AR20(K) AR25

Air Combination

8 83.2 87.6 71.8 41.6 40 21 5 30 24 33 5.5 11.5 3.5 29 38 1/8, 1/4 AC30D-D 1/8 110.2 115.3 86.5 30 55.1 55 26.5 3.5 41 35 7 14 6 42.5 42.5 1/4, 3/8 AC40D-D 1/8 145.2 147.1 91.5 38.4 72.6 80 35.5 0 50 40 55 9 18 7 50 65 1/4, 3/8, 1/2 AC40D-06-D 1/8 155.2 149.1 93 38.4 77.6 80 35.5 0 50 40 55 9 18 7 50 65 3/4 Options Semi-standard specifications Metal bowl with Digital level gauge With auto

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

LEC-OM069xx

1 6 Utility Functions (Fn) 6.

Guide Cylinder/Compact Type Series MGC

(Set the maximum allowable load so that it does not exceed the following percentages of the theoretical output: 40% for 20, 50% for 25 and 32, 55% for 40 and 60% or less for 50, respectively.) 400 Guide Cylinder/Compact Type Series MGC Construction: With Rear Plate t q $3 @2 !5 @6 #1#2 #3 !8 y e $2 !7 i !3 o !6 u !9 w #9 @5 $1 @7 @4 #8 #0 @9 @8 r !4 #6 #7 @3 #5 $0 #4 $4 !1 !2 !

KR

(mm) A Weight (g) D Note) Model 2-applicable tubing L M P FR soft nylon FR double layer 12 1 8 KRU06-01S 41.5 45.5 17 14 13 6 1 4 KRU06-02S 49 43 12.8 10.4 4.2 17 12.8 22 3 8 KRU06-03S 51 44.5 35 1 8 1 4 KRU08-01S KRU08-02S 48.5 49.5 52.5 55.5 16 24 8 15.2 17 25.6 17.7 18.5 15.2 3 8 KRU08-03S 56.5 50 36 1 4 3 8 KRU10-02S KRU10-03S 55 55.5 61 62 30 19 10 18.5 18.5 40 40 28.4 21 1 2 KRU10-04S

CG5-S

40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 to 1200 35 32 27 90 38 20 70 11 9 21 14 58

CG5-S

6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 129 32 to 300 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 131 40 to 500 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 149 50 to 600 109 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 176 63 to 600 109 35 32 27 90 38 20 70 11 9 21 14

MGP

Mounting Warning 6. Change the plug positions of the piping ports depending on the operating conditions. 1) For M5 After tightening by hand, tighten an additional 1/6 to 1/4 turn with a tightening tool. 2) For Rc screw Tighten with the proper tightening torque listed below. Use pipe tape on the plugs when tightening. 1.

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Stroke 17 6 Note 1) Standard strokes available in 5 mm increments.

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB CNA CNS Long stroke CLS Description Material Note Component Parts No. No.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5 22 21 1/4 108 16 5 0 25 11 198 9 6 Series CHN Dimensions Front flange type: CHNF

CNG

I J 10 (12) 5.5 M4 x 0.7 to 200 20 to 200 85 18 15.5 13 38 93 1/8 50.5 14 8 18 6 4 8 5 26 201 to 350 201 to 350 10 (12) 6.5 M5 x 0.8 to 300 20 to 300 96 22 19.5 17 45 103 1/8 57 16.5 10 25 9 7 10 6 31 301 to 400 301 to 400 10 (12) 6.5 M5 x 0.8 to 300 20 to 300 97 22 19.5 17 45 104 1/8 57 20 12 25 9 7 10 6 38 301 to 450 301 to 450 10 (13) 7 M6 x 1 to 300 20 to 300 104 30 27 19 52 112 1/8 65.5

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Mitsubishi Electric Corporation Yaskawa Electric Corporation G 1 N.C. (B contact) 2 pcs.