2/3 Port Valve

210 220 130 140 90 90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5 22 21 1/4 108 16 5 0 25 11 198 9 6 Series CHN Dimensions Front flange type: CHNF Width across flats B2 Rc P Rc P GA2 Cushion valve GB1 NN GB2 T V Rc P MM Width across flats B1 H2 GA1 Cushion

CG5-S

32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 21 109 80 22 60 to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 32 130 100 22 to 750 60 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 32 131 110 (mm) Bore size (mm) Trunnion

CG5-S

32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 21 109 80 22 60 to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 32 130 100 22 60 to 750 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 32 131 110 (mm) Bore size (mm) Trunnion

AS

Metric size Inch size Air 218 psi (1.5 MPa) 152 psi Note 1) (1.05 MPa Note 1)) 145 psi (1 MPa) 102 psi Note 1) (0.7 MPa Note 1)) 15 psi (0.1 MPa) Applicable cylinder bore size Proof pressure 2 3.2 4 6 8 10 12 1/2" 3/8" 5/16" 5/32" 1/4" 1/8" (inch) (mm) 2.5, 4, 6 1/4" Max. operating pressure AS1002F 6, 10, 16, 20 1/4", 3/8", 5/8", 3/4" Min. operating pressure Ambient and fluid temperature

MTS

0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12)

AW

160 201 239 242 409 25 40 53 70 75 95 1/16 1/8 1/8 1/4 1/4 1/4 25 40 55 80 80 20 AR M38 x 1.5 M42 x 1.5 1/4, 3/8, 1/2 3/4 3/4, 1 AL M42 x 1.5 AW Optional specifications Semi-standard specifications Bracket mount Panel mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge M 25 30 41 50 50 70 Model AG N 28 34 40 54 54 66 Q 30 44 46 54 56 66 R 4.5

Precautions 1

2 n Different surfaces Different surfaces Same surface Same surface D-A9 D-M9 D-M9W (n 2) 2 15 + 45 10 15 (1) (1) 45 45 + 45 (n 2) (n = 2, 4, 6...)

Clamp Cylinder Series CK1

Description Material Qty Note 18 19 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Retaining ring Clevis bushing Chromated Hard anodized Chromated Hard chrome plated 2 Steel wire 1 1 1 1 1 1 2 3 2 4 1 2 2 1 1 1 Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Copper alloy Aluminum alloy Aluminum alloy

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

MGP

8 32 15 34 30 96 44 110 78 98 63 48 300 83 121 171 32 46 11 7.5 Rc 1/8 38 18 38 30 104 44 118 86 106 72 48 124 200 300 84 122 172 40 48 14 9 Rc 1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 50 14 9 Rc 1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88 124 174 63 MGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A DB E Bore size (mm) Bore size (mm) X XA XB XC

CY1

16 25 26 L 66 70 80 92 110 122 N 15 15 17 21 25 25 NA 24 30 36 46 55 69 NB 13 13 15 19 23 23 NN M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2.0 F 13 13 16 16 2 2 Model CY1B20 CY1B25 CY1B32 CY1B40 CY1B50 CY1B63 Port size Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)1/4 0.007 0.037 0.007 0.043 Q x R M8 x 1.25 x 16 M10 x 1.5 x 16 TC x R M12 x 1.25 x 7.5 M14 x 1.5 x 11.5 S 106 111 124

CJ5-S

50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100

CJ5-S

50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131

REA/REB

27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z

REA/REB

CV MVGQ CC RB J D-X 20Data 10-2-55 55 Series REAH Construction: 10, 15 Single axis type: REAH y !4 !8 !2 @1 i !3 q @0 !7 !9 #2 !1 w r t u @8 o #4 e !5 !6 #3 !0 #0 @9 #1 @3 @5 @6 N@4 REAH10 @7 @2 Component Parts No. Description Body No. Description Note Hard anodized Material Aluminum alloy Material Note Aluminum alloy Plate B q !

REA/REB

M CV MVGQ L1 CC We = 5 x 103 WgU = 5 x 103 x 1 x 9.8 x 300 = 15 [N] Me3 = 1/3We (L2A) = 1/3 x 15 x 0.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 3. Dynamic moment RB Me3 Guide central axis J L2 We W Examine Me3.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

33 72 12 8 53 8 9 40 7.5 M14 x 1.5 13 36 21 40 34 f8 to 800 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 M16 x 1.5 19 44 21 (mm) Bore size (mm) P NB NC NN S ZZ 20 19 15 M22 x 1.5 1/8 81 138 25 19 15 M24 x 1.5 1/8 81 143 32 M30 x 1.5 19 15 1/8 87 159 40 1/4 M33 x 2 24 21 108 183 50 Series CHM Dimensions Rear flange type: CHMG GA N Rc P 2-NN Width across flats B2 H2 GB N Rc P 4-FD

Compact Cylinder with Air Cushion Series RQ

15 15 20 1 pc. 15 15 20 20 2 pcs.

Single Axis Electric Actuator Series LJ1H

4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 53 190 Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 393 135 A section detail (Switch groove) 92 Stroke + 32 3-8H10 depth 5 11.5 20 67 90 (T-slot pitch) 45 62 92 58 30 9.4 8-6.6 4.5 10 Stroke