Stability of suction position,

Rc1/8 Width across flats 19 M14 x 1 Rc1/8 Width across flats 19 M14 x 1 Rc1/8 Width across flats 19 Width across flats 19 Width across flats 19 Width across flats 19 5 5 5 5 5 5 15 25.6 25 50.6 14.5 25.1 25 50.1 14.5 25.1 25 50.1 M10 x 1 M10 x 1 M10 x 1 Seal washer 22 40 Seal washer 22 31 Seal washer 22 31 2.5 3 2 Width across flats 6 35 32 6 Width across flats 6 53 50 6 Width across flats

Applicable Auto Switch Model

Contact protection box OUT() Brown(Red) 12 10 8 15 16 9 12 6 6 20 25 32 40 50 63 80 100 125 140 160 Reed switch 13 CDJ2, CDVJ CDQ2 to 10 12 6 6 6 6 12 12 6 6 6 6 12 13 12 6 6 6 6 12 13 12 12 12 11 10 12 12 13 13 13 CD-P11 CD-P12 OUT( ) Blue(Black) B P CDXW 6 6 6 CDY1S CY1L RSDQ MDU CE1 MK, MK2 CXT 6 6 6 6 6 6 11 13 11 11 11 Note) qIn the case operation load is an inductive load. wIn the

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

Single acting type, Normally closed Double acting Single acting Basic type Side ported Nil E K H M D20Axial ported 12-2-17 17 Series MHZA2-6/MHZAJ2-6 Construction: Standard Type MHZA2-6 Double acting/With fingers open Single acting/Normally open e o @4 @1 i !1 w !2 !4 !0 !5 !6 !7 t r !

KJ

41.5 42 46.5 47 48 34.5 36.5 34.5 37 35 40 36 41 41.5 43.5 45.5 46 1 8 17.5 2.5 15.5 10 9.6 Applicable tubing 1 4 1 8 5 32 18 3 16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22

CJ2

1 !2 !3 !4 !5 !6 !7 !8 !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

6 10 6 6 15 10 8.5 8.5 17 17 17 17 15 45.5 45.5 4-Rc(PT)1/8 (Piping port) 24 24 32 4-Rc(PT)1/8 (Piping port) 32 [ ] for AC Other dimensions are the same as the grommet style

ARM10/11

A R 1 04 A Z Common supply type 1 2 3 4 5 6 1.

ARM10/11

A R 1 04 A Z Common supply type 1 2 3 4 5 6 1.

Bag Filter

Legs (with bolt, nut, flat washer) Element 4 Polyester FGF-OP01 (Set) FGF5-60 5 FGF1 6 Carbon steel 1 5 Hinge bolt Carbon steel Eyenut 6 Carbon steel FGFS1 NBR FGF-KT01 1 O-ring 7 Washer 7 Carbon steel FGFL1 FKM FGF-KT02 1 8 Parallel pin Carbon steel FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 9 Lifter Carbon steel Holder (with O-ring) 8 Handle 10 Carbon steel FGF-KT04 (Set) Polypropylene

OMR0032

Open collector input Turn ON No. 1 and No. 4, and (b) 5 VDC+/5% R1 = 220 turn OFF the others. Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7

Auto Switch Guide

(Including bracket, screw) CLS Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 CLQ Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.

Auto Switch Guide

(Including bracket, screw) RS Q G Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 RS H A Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

MXW Series Long Stroke Slide Table

through hole 5.1 GG HH H 7 depth 5.5 6H9 +0.03 NN-M6 x 1 thread depth 12 0 Bottom through hole 5.1 F E 6H9 +0.03depth 5.5 0 HH H Model E F G GG J K L N NN Z 48 MXW20-150 113 216 101 29 169 41 66 6 1 412 52 MXW20-175 140 237 128.5 50.5 194 66 91 6 1 462 48 MXW20-200 164 264 152 56 219 91 116 7 1 512 52 MXW20-225 189 288 177.5 73.5 244 116 141 7 1 562 48 48 MXW20-250 215 312 203 59 269

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer