Guide Cylinder Series MGG

16 114 65 M6 x 1 depth 13 9 140 17 19 170 186 134 150 12 45 170 50 93 95 134 50 75 1/8 47 20 138 84 M8 x 1.25 depth 16 11 170 23 21 190 210 140 160 12 50 194 55 103 115 152 56 90 1/4 58 25 164 94 M10 x 1.5 depth 21 Note) Rc, NPT and G ports can be selected.

Electric Actuator

Cable length (L) [m] (30.7) (16.6) (23.7) Connector A1 (10.5) 1 3 5 8 A B C (7.0) 1.5 3 5 8 (12.7) (10.2) (5.6) Connector C (14.2) (6.7) (5.7) Connector A2 3 2 1 (Terminal no.) 1 3 2 4 1 4 10 (13.5) AB 1 3 15 1 2 (18) 20 AB 15 16 Produced upon receipt of order (14.7) (30.7) (1 1) L (10) Connector B Connector D With lock and sensor Connector A1 terminal no. 1 2 3 Connector C terminal no. 1

Electric Slide Tables

] 4 3 4 4 Lead 16: LES25AJ Lead 16: LES25AJ 2.5 Lead 16: LES25J 3 3 3 2 Lead 16: LES25J 2 1.5 2 2 1 1 1 1 0.5 0 100 200 300 400 500 0 0 0 50 100 150 200 250 300 350 400 450 0 0 0 100 200 300 400 500 0 50 100 150 200 250 300 350 400 450 Speed [mm/s] Speed [mm/s] Speed [mm/s] Speed [mm/s] 2 Series LES Cycle Time (Guide) 1.80 100 mm/s 1.60 1.40 1.20 200 mm/s Time [s] 1.00 300 mm/s 0.80 0.60

51

8 Width across flats 10 length 3.5 35.5 Up to 300 M6 x 1 depth 10 Width across flats 12 length 3.5 44 Up to 300 M8 x 1.25 depth 16 Width across flats 16 length 4.5 55 CS2 Up to 300 M10 x 1.5 depth 16 Width across flats 16 length 4.5 69 Up to 300 M10 x 1.5 depth 22 Width across flats 19 length 4.5 80 Up to 300 M12 x 1.75 depth 22 Width across flats 22 length 4.5 100 1 Use a thin wrench when

Cylinder with Lock Series CLS

(same side) 25 + 55 125 + 55 135 + 55 BT-12 BT-12 BT-16 F5W, J59W, F5BAL, F5F n = 2, 4, 6, 8 ... n = 4, 8, 12, 16 ... n = 4, 8, 12, 16 ... 2pcs. (different side, same side), 1pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 35 145 155 BS1-125 BS1-140 BS1-160 D-A3, A4, G39, K39 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

Cylinder with Lock Series CNS

(same side) (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 BT-12 BT-12 BT-16 F5W/J59W/ F5BAL/F5F n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs.(different side, same side), 1 pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 155 35 145 D-A3/A4/G39/K39 BS1-125 BS1-140 BS1-160 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

CP95

8 13 M6 x 1 6 10 27 16 94 4 4 4 6.5 26 146 190 46 32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128

CP95

94 22 30 10 27 12 G 1/8 13 M6 x 1 4 15 4 4 4 6.5 26 146 190 46 32.5 M12 x 1.25 40 6.5 16 105 24 13 35 16 27 G 1/4 14 M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121 32 45 16 20 31.5 G 3/8 16.5 M8 x 1.25 6 24 5 4 9 12 37 194 259 75 56.5 M20 x 1.5 80 10 16 128 40 45 21 38 25 G 3/8 19 M10

CLA

lH 55 V-1Od 100 37 40 83 M26Xl .S 21 38 201re1'-< t~ m L ~ ~1 -r0 ~ '-' P. _(mm) e ,.

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

JXCx-OMT0023

FUNCTIONS AND CONFIGURATION 1 1 to 1 16 1.1 Introduction . 1 2 1.2 Function block diagram . 1 4 1.3 Driver standard specifications . 1 7 1.4 Function list . 1 9 1.4.1 Applicable control mode for each actuator . 1 -11 1.5 Model code definition . 1 -12 1.6 Combination with servo motor. 1 -14 1.7 Parts identification . 1 -15 1.8 Configuration including auxiliary equipment . 1 -16 2.

MB1

8 1/4 1/4 3/8 3/8 1/2 4 4 5 9 11 .5 17 6.5 9 10.5 12 14 15 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type

Cylinder with Lock Series MNB

101 91 14 52.5 14 16.5 65 63 to 500 9 27 50 1/4 35 27 11 120.5 46.5 20 40 14 12 100 52 120 104.5 15.5 58.5 18 19 77 75 to 600 9 32 63 1/4 35 27 11 134.5 56.5 20 45 14 12 115 62 135 119.5 16.5 68 18 23 92 90 to 600 9 32 80 1/4 40 32 13 169 72 25 45 20 16 126 63 153 150 19 81 22 33 100 102 to 750 12 37 100 1/4 40 41 16 189 89 30 55 20 16 150 75 178 170 19 96 26 37.5 120 116 to 750 14 37 Bore

AS

Flow Rate and Effective Area AS121F-M3 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F-M5 AS131F-M5 Model AS131F-M3 AS121F-M5-02 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size 2, 3.2, 4 3.2, 4, 6 3.2, 4 Tubing O.D. 1/8", 5/32" 1/8", 5/32" 3/16", 1/4", 1/4", 5/16", 1/8", 3/16" 3/8" 1/4" Inch size 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 1/4", 5/32" Flow rate l /min

CNS

25 135 125 (n 2) 2 (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n (Same side) n = 4, 8, 12, 16 2 (Different sides, Same side), 1 155 35 145 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 155 + 55 35 + 55 145 + 55 n (Same side) n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 Different sides 110 35 Same side 110 100 D-A3 D-G39 D-K39 Different sides 110 + 30 (n 2) n =

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

30 30 30 30 30 59 71 82 46 55 66 45 55 68 58 67 73 21 26 32 23.5 28 34.5 34.5 40 46.5 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 10 14 14 16 16 16 4 5 5 12 15 15 M6 x 1 M8 x 1.25 M8 x 1.25 Up to 1000 Up to 1000 Up to 1000 39 42 52 208 228 254 436

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

solenoids applicable) ... ... 16 stations 16 Note 1) Includes the number of blanking plate assemblies.

Membrane Air Dryer

2 1/2 205 202 11 90 262 20 146 9 18 108 55 31 9 15 276 262 26 Series IDG1 I N SMC SMC SMC 2 SMC 202 60 Port size 1/8, 1/4 119 41.5 30 Dew point indicator (Option: S) 5.5 29 24 24 67 OUT IN 10 116 Drain Discharge 9 133.5 140 136 97 With float type auto-drain (N.C.) 3.2 5.5 Purge air for dehumidification 12

CG1

22 26 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 M5 X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.