Q 26 R 4.5 S 1.6 AMG150C AMG250C AMG350C AMG450C AMG550C 10 99 63 20 63 10 1/8, 1/4 158 14 113 76 20 76 10 190 66 24 8 6 6 12 6 10 40 66 80 28 5 2 1/4, 3/8 172 18 145 90 20 90 10 222 80 28 8 7 7 14 7 12 50 80 95 34 5 2.3 3/8, 1/2 204 20 166 106 20 106 10 246 90 31 10 9 9 18 9 15 55 88 111 50 9 3.2 1/2, 3/4 225 24 200 122 20 122 15 278 100 33 10 9 9 18 9 15 65 102 126 60 10 3.2 3/4, 1 259
NBR 6: Not available Note 1) Seal kit includes @7 to #0 for 6. @7 to #1 are for 10. @0 to #1 are for 15 to 40.
to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.
ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.
LG NC 1 2 3 4 5 6 LG P5D RDP SDN SDP RDN LG NC 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.
Vacuum Inlet Direction Lateral R Type/ZPR Connection Male thread Female thread Pad diameter 2 to 16 20 to 32 40, 50 2 to 81 10 to 16 20 to 32 40, 50 M5 x 0.8 M6 x 1 M8 x 1.25 Connection thread M5 x 0.8 M6 x 1 M6 x 1 M8 x 1 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 Vacuum inlet One-touch fitting 4, 6 4, 6, 8 6, 8 4, 6 4, 6, 8 6, 8 1 Refer to 2 to 8 for the thin flat type and thin
Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.
Port size 1 8 1 8 1 4 1 4 A, B port C4 (4 One-touch fitting) C4 (4 One-touch fitting) C6 (6 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) C10 (10 One-touch fitting) C6 (6 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) Manifold base weight W (g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than
setting in auto tuning mode 1 . 14 6.4 2-gain adjustment mode . 15 6.5 Manual mode . 16 6 1 6.
(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.
1 !5 #1 q C B C B !4 !2 !0 !8 @1 !6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.
i.\4 L, Material: Free cutting sulfer sleel Malenal: Cast lion -NX A 1 ~ 1-05 50-63 74 27 28 60 M18X 1.5 15.5 2Q 121'0711 1 ~ Y-04d 40 22 24 55 M1 4X 1.S 13 25 12171) 1 6'j-~ 38 p .OS 80 91 37 36 71 M22Xl.5 225 26 18,&070 281l V. SO-63 27 28 60 M' 8Xl .5 15 27 12'870 1 6 ~f 38 ~10 100 105 37 40 83 M26Xl .S 24.5 28 20-8-08< 3():gJ Y-08d 80 37 36 71 M22Xl .S 19 28 181. 010 28!
Load Load Switch 1 Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Power supply Internal Load voltage at ON = voltage voltage drop x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Example: Power supply is 24 VDC. Internal voltage drop in switch is 4 V. Example: Load impedance is 3 k.
Different surfaces Different surfaces Same surface Same surface (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9 5 15 Note 1) 40 Note 1) (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9W 15 Note 1) 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) 25 + 35 D-M9A 25 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) 15 + 35
40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC
40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC
40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC
2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.
Flow Rate and Effective Area AS121F-M3 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F-M5 AS131F-M5 Model AS131F-M3 AS121F-M5-02 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size 2, 3.2, 4 3.2, 4, 6 3.2, 4 Tubing O.D. 1/8", 5/32" 1/8", 5/32" 3/16", 1/4", 1/4", 5/16", 1/8", 3/16" 3/8" 1/4" Inch size 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 1/4", 5/32" Flow rate l /min