Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

OMU0023

If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1

Compact Hydraulic Cylinder Series CH
KGB

thread (mm) A B C D E F G H J K M P Q R S L Bore size (mm) 20 9.5 depth 5.4 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 43 1/8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24

Speed Controller with Indicator

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

SMC Electronic Switch Series Variations

Output Specifications 14 15 16 17 18 19 55 NPN Open Collector 30V, 80mA Model Output method Hysteresis Analog output Number of outputs Indicator light Trimmer adjustment PNP Open Collector 80mA 1 to 10% of set press. (Variable) 3% F.S. or less (Fixed) 1 to 10% of set prss. (Variable) 1 to 5V 1-10% of set press.

EXxx-OMN0037CN

10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion Air cushion type is not available for 21-/22-CJ2.

AFF

63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion With air cushion type is not available for 21-/22-CJ2.

MGC

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

L3 394 432 413 451 470 ( ) L4 14.5 14 17.5 17 14 (L4) L3 G: Approx. 300 H: Approx. 600 lead wire length ( ) 2n1-Rc(PT) 1/4 (ports A,B) 73.7 <74.4> [75.3] 52.8 39.8 19 39.4 38.1 (5.4) A B A B A B B B B 1 P 28 28 1 R 20 35 60.7 <64.1> [62.3] 39.8 A A A DIN rail 43.1 51 [Rc(PT) 1/4 port] P = 19 22 32.5 (Voltage rating indication) (5.25) L2 (DIN rail mounting hole pitch 12.5) L1 2n2-One-touch

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

OMR0032

. 14 (7) Test operation . 14 3.

Table of Contents

Applicable shaft type: K Applicable shaft types: J, K, T (mm) X L3 max W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = 10 10 0.5 to 2 4.5 to 14 0.5 to 2 Y 1 L2 1 6.5 to 14 L1-1 X 3 L4 = 15 15 0.5 to 2.5 Y = 5.5 to 18 0.5 to 2.5 Y 1.5 L2 1 8 to 18 L1-1 X 4 L2 = 20 20 6 to 20 0.5 to 3 0.5 to 3 Y 1.5 L2 1 9 to 20 L1-1 X 4.5 X = 8.5 to 22

REC

X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 150 to 1000 M14 X 1.5 40 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 200 to 1000 NN P S X Y Z ZZ Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 150 to 700 146 20 8 21 215 M26 X 1.5

MQQ

the rod end nut and mounting nut. 14 Series MQM Refer to the standard type on page 14 for other dimensions.

LX

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

Series HAW Water Cooled Aftercooler 1

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

50 53 32 3.2 136 30 7 9 22 LY up to 800 196 158 183 55 59 38 3.2 145 33 9 11 24 4-LD LH up to 1000 214 172 202 70 72.5 46 3.2 160 40 9 11 27 up to 1000 217 172 205 80 82.5 56 3.6 160 45 12 14 27 Y X Y X CJ1 up to 1000 266 210 248 100 102.5 72 4.5 192 55 12 14 30 LS + Stroke LX up to 1000 270 214 252 120 122 89 4.5 196 65 14 16 32 ZZ + Stroke LZ CJP Front flange(F)/Locking at head end (Hl)

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5