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M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

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SB, counterbore depth SC P .C.D.R (Mounting hole) Auto switch mounting groove positions (4 locations) MHS3-100D MHS3-125D 10 10 10 10 40 40 40 40 5 6.4 5 10 6.4 13 90 12 5 15 7 90 (mm) I G 63 84 FZ 10 12 FX 59 74 FY 54 68 CA 18 23.5 EC 28 30 EO 40 46 DC 66 82 DO 78 98 M 4 6 B 134 166 K 15 21 AC 6 8 J 38 52 AA 96 122 AB 90 114 NA 34 40 L +0.036 0 +0.036 0 NB Model MHS3-100D MHS3-125D CB 30.6

CG1

87 102 102 122 122 12 12 12 13 14 14 20 20 11 11 11 12 13 13 35 40 40 50 58 58 71 71 11 11 11 12 13 13 18 22 22 30 35 35 40 40 12 14 18 25 30 32 40 50 15.5 19.5 19.5 27 32 32 37 37 2 2 2 2 2 2 3 3 8 10 12 16 20 20 25 30 13 17 13 19 27 27 32 41 14 16.5 20 26 32 38 50 60 6 8 10 14 18 18 22 26 M5 Depth 7.5 M10 X 1.25 M5 Depth 8 M10 X 1.25 M14 X 1.5 M6 Depth 12 M8 Depth 16 M18 X 1.5 M10

AC Servo Motor Driver (Pulse input type/Positioning type ）

47.0 38 501.2 19 52.9 39 571.5 Middle High response response 20 59.6 40 642.7 Setting range: 1 to 40 PA10 INP In-position range Set an in-position range per command pulse.

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T-slot 1 dimensions (Switch groove) 11.5 27 40 80 Stroke + 145 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

CL

140 6 7 7 11 11 44 52 64 78 92 14 18 18 22 26 30 35 35 40 40 16 20 20 25 30 71 80 99 117 131 32 40 40 52 52 27 32 32 37 37 10 10 10 14 14 15 17 17 21 21 85 95 102 113 124 60 70 86 102 116 26 27 26 30 31 54 59 67 72 76 10 13 18 23 25 10 12 15 17 19 M10 X 1.25 M12 X 1.75 M12 X 1.75 W/o out rod boot (Both sides) W/ rod boot (One side) Bore (mm) 40 50 63 80 100 MM N PH TDe8 TT TY TZ W PG PL TX

5-Port Solenoid Valve

or less 22 or less 18 or less 14 or less 18 or less 14 or less Metal seal SY33/4/5l1 18 or less 22 or less 18 or less 14 or less 18 or less 14 or less Rubber seal SY3A/B/Cl0 4-position dual 3-port valve 18 or less 22 or less 18 or less 15 or less 19 or less 15 or less With Residual Pressure Release Valve SY3000 Vacuum Release Valve with Restrictor Rubber seal SY51l0 2-position single 24

Combination Cylinder

25 30 36 36 40 40 50 55 65 80 90 90 90 32 40 40 52 52 6.5 6.0 6.0 8.0 8.0 43 43 43 15 17 17 21 21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 14 18 18 22 26 31 31 36 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 14 14 14 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 9 9 40 45 50 65

Air Cylinder

ZZ 20 62 8 10 32 32 52 108 118 25 62 9 10 40 40 60 112 122 32 64 9 10 40 40 60 114 124 40 88 10 11 53 53 77 143.5 154 Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 18 68 81 93 106 131 156 181 25 32 36 18 72 85 97 110 135 160 185 32 32 36 18 72 85 97 110 135 160 185 40 41 46 20 77 90 102 115 140 165 190 Bore size With Rod Boot (mm) l Z ZZ JH

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

C UA YB-03 32, 40 9 80 50 18 6.5 10 Material: Chromium molybdenum steel (Nickel plated) Applicable bore size (mm) Part no.

CV/MVGQ

M10 x 1.25 18 18 18 8 11 11 10 10 10 32 40 40 84 90 98 38 43.5 49 The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

M10 x 1.25 18 18 18 8 11 11 10 10 10 32 40 40 84 90 98 38 43.5 49 With rod boot Without rod boot The minimum stroke of the one with rod boot is 20 mm or more.

ZP

5 3 x 4 4 x 8 3 x 6.5 4 x 9.5 18 34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB

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15.2 18 5/16" AS2051F-09 AS3001F-10 32 35.6 40.6 9.8 71.6 18.5 10 21 42 33.3 38.3 7.4 59 13.2 17 1/4" AS3001F-07 AS3001F-12 33 36.8 41.8 11 76 20.9 12 22 19.8 46 34.1 39.1 8.2 64.4 15.2 18 5/16" AS3001F-09 AS4001F-10 36 43.6 51.1 18.5 10 21 82 11.3 26.5 53 35.3 40.3 9.5 70.8 17.9 21 3/8" AS3001F-11 AS4001F-12 40 44.6 52.1 20.9 12 22 97 43.5 51 10.3 76.9 17.9 21 3/8" AS4001F-11 26.5 106 44.9

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

M18 x 1.5 135 102 19 42 22 18 44 44 3/4 75 192 20 3 156 40 53 145 40 225 100 19 15 25 to 1800 Rod series Tolerances (mm) B series rod C series rod Bore size (mm) Bore size (mm) TDe9 TX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 55 207 0 0.3 0.040 0.092 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 212 25 22 18 7 14 55 207 M16 x 1.5 0.025 0.064 50 50

Rotary Actuator/Vane Type

Applicable shaft type: S, Y Applicable shaft type: K X = X = Y = Size: 10 to 30 Size: 40 D[mm] [mm] Size CRB2 CRBU2 X X 10 3 to 14 1 to 14 Size CRB2, CRBU2 Y 10 1 to 14 15 1.5 to 18 20 1.5 to 20 30 2 to 22 40 4.5 to 30 15 4 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 30 5 to 22 2 to 22 40 18 to 30 18 to 30 93 CRB2 Series Axial: Top (Long shaft side) Axial: Bottom (Short shaft side) Symbol: A51

MXQ

46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 89 89 99 109 125 157 200 225 MXQ16L-10 MXQ16L-20 MXQ16L-30

1

CJ1 Series MB Series MB1 Width across flats MA CJP MM Width across flats MA ZZ MM ML MH MI Bore size (mm) MK MA ZZ MM ML MH MI MK Bore size (mm) MA 32 40 50 63 80 100 175 10 18 44 24 10 21 32 40 50 63 80 100 175 10 18 44 24 10 21 CJ2 M I 183 14 20 48 32 12 27 183 14 20 48 32 12 27 205 18 21 53 38 15 32 205 18 21 53 38 15 32 ML + Adjustment CM2 Stroke MK 205 18 21 53 38 15 32 205 18 21 53

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AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 85 26 35 87 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 5.5 3.2 65 2 (1) 141 123 36 60 126 55 57 41 35 14 7 71 28.5 0 7 4 64 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 110 220 77.5 80 50 40 18 9 88 35 3 9 4.6

NCM

8 6 7 8 6 11.5 9 125 13 7 5 6 7 5.5 10.5 8 150 (40) (40) (40) (40) (12) (12) (40) (40) 25 Type 1 Type 2 Type 3 (40) (40) (40) (12) (12) (40) (40) 34 50 (40) (12) (12) (40) (40) 36 27.5 32.5 75 1, 2 (40) (12) (12) (40) 31 24 28 36 100 W W (40) (12) (12) W 27.5 21 25 38 32 125 (40) (12) (12) 25 19 22.5 34.5 29 150 (40) (12) (12) (40) 30 23 27 35 25 (12) (12) 35 20.5 15.5 18.5 29 24 50 (12)