Table of Contents

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 21 (Width across flats) Selection Lock nut F.R.L. Warning M12 x 1 1. This product cannot be used as a check regulator by installing it between solenoid valve and actuator. Doing so could lead to equipment damage. 2.

Micro Mechanical Valve Series VM1000

) NC 18 36 4.5 13.5 18 VM4 SMC NO 22.5 OUT 13.5 25 3 x 1/8 21 35 T.T. 20 N F.O.F. 4 x 4.5 mounting hole 90 2312 3 Port Mechanical Valve Series VM400 Series VM400 Key selector (2 position) VM430-01-36 Panel mounting hole ON T.T. 40 OFF 39 Max. 6 38 21 30.5 Symbol 1.5 1.5 (OUT) 2 (126.6) 53 22.1 3 10 12 (105.6) 3 (N.C.) 1 (N.O.) (75.1) NC 36 4.5 13.5 18 13.5 18 VM4 SMC NO 22.5 OUT 35 25 21

JXCx-OMT0062

Product Specifications . 17 3.1 Specifications . 17 (1) Basic specifications . 17 (2)CC-Link type . 18 3.2 Parts description . 19 3.3 Outside dimension diagram . 20 (1) Screw mount type LECPMJ-. 20 (2) DIN rail mount type (LECPMJD. 20 3.4 How to install . 21 (1) How to install . 21 (2) Ground wire connection . 21 (3) Installation location . 22 4.

AC Servo Motor Driver

Setting Control modes (Note 1) P S T 00 01 For manufacturer setting (Note 2) 02 SON SON SON 03 RES RES RES 04 PC PC 05 TL TL 06 CR 07 ST1 RS2 08 ST2 RS1 09 TL1 TL1 0A LSP LSP 0B LSN LSN 0C For manufacturer setting (Note 2) 0D CDP CDP 0E to 1F For manufacturer setting (Note 2) 20 SP1 SP1 21 SP2 SP2 22 SP3 SP3 23 LOP LOP LOP 24 CM1 25 CM2 26 STAB2 STAB2 27 to 3F For manufacturer setting (Note

JXCx-OMT0023

PB ) . 21 4.2.1 Parameter list . 21 4.2.2 Detail list . 23 4.2.3 Position smoothing . 31 4.3 Extension setting parameters (No. PC ) . 32 4.3.1 Parameter list . 32 4.3.2 List of details. 34 4.3.3 Alarm history clear . 41 4.3.4 Drive recorder function . 42 4.4 I/O setting parameters (No.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Piping: Common SUP/Individual EXH, Stations: 7 Stations, Bracket: -

Piping: Body Ported, Stations: 7 Stations, A, B Port: NPTF

Piping: 21 (Body Ported), Stations: 7 Stations, A, B Port: 00T (NPTF)

Series VQ Metal Seal/Rubber Seal Body Ported

L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

ZX

analog Nil 21 22 23 24 P kPa Applicable to plug connector.

Vacuum Module Series ZX

(with trouble detection)/without analog output 1 output (with trouble detection)/with analog output 21 22 23 24 Piping specifications Nil L C CL CN Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector 1 Built-in silencer Port exhaust Rc 05 07 0.5 mm 0.7 mm 2 1 8 Note) Analog output is available only on grommet type.

Vacuum System Peripherals:

Special specifications M 07 07 When creating the special specifications, complete the stations table on the right. Includes number of blanking plate assembly. w Ejector Valve Model Fill in the blanks below with symbols of necessary specifications.

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

Flow Control Equipment

4.6 7.5 6 12 7.2 6.6 18 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 TMH-06J TMH-06 TMH-08 TMH-10 4.3 7.1 7.2 11 10 20 11 10.6 26.5 TMH-07 TMH-09 TMH-11 4.3 9.5 9.6 14 14 28 14.2 14.6 34 TMH-12 TMH-13 Note 1) Mounting bracket is not available.

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

30

M18 x 1 21 24 12 58.3 96 113 21 18.6 24 M20 x 1 16 20.8 28 30 29 M27 x 1 Note) Value of FEP tube.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

21 33.6 47.9 21 10 18.5 25.4 1/2" NPT 1/2 23.8 21.7 28.6 12 35.2 49.5 25.4 63.8 1.5 55.8 22 R 1/2 24 28.6 12 63.8 1.5 55.8 AS421F-N04-13ST AS421F-04-12ST 34.6 48.9 22 12 20.9 Reference dimensions of M5 x 0.8, R threads after installation.

JXCx-OMX0009

Single numerical data instructions (1 Stations occupied) [Remote IO] PLC memory PLC memory address Signal name address Signal name Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 1A to 10