Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

KK/KK13

Tightening of M3, M5, and M6 screws 1) M3 After tightening by hand, tighten an additional 1/4 rotation with a tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with a tool. Over tightening can cause damage to the threads and/or air leakage due to deformation of the gasket. Under tightening can cause loose threads and air leakage, etc. 1.

3/5 Port Solenoid Valve

Caution Combinations of Solenoid Valve, Manifold Gasket and Manifold Base Combinations of Blanking Plate Assembly and Manifold Base Body ported Base mounted Manifold gasket and screw assembly VK300-41-1A VK300-41-2A Common SUP/ Common EXH Common SUP/ Individual EXH Type 40(VV3K3-40): Base mounted (A port bottom ported) Type 20(VV3K3-20): Body ported (A port top ported) Type 42(VV3K3-42):

Vacuum Module Series ZX

(or M6) 1 4.7 AMJ 20 5 AMV Pitch = 21 22.5 Vacuum port (V) M5 (or M6) AEP HEP Related Equipment + 79 65.1 10.7 8.5 V V V V Pitch = 21 Vacuum Port (V) M5 (or M6) 4.2 22.5 Vacuum Port (V) M5 (or M6) Vacuum Port (V) M5 (or M6) 897 Series ZX Vacuum port (V) Vacuum port (V) Ejector System Manifold: Type K1 Common EXH port (EXH.)

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LVD LVQ How to Order Manifold Base LQ1 LLH 2 A 05 11 S LVN Body class TL/TIL Tubing size for port P and L side connection Tubing size for port P and R side connection Body class 2 3 4 Symbol 2 3 4 Body class 2 to 4 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class 2 to 4 Tubing size Plug LQ3 6 1/4" 6 1/4" Base type 2 8

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52 38.5 25 M5 x 0.8 6 499 Series LVD With flow rate adjustment (Max.

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D. Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

AS-FG

Port size N M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

ASP

Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing Nut Insert bushing LQ1T2A-ST1 2 2-07 LQ1-2N07 LQ1-2B07 Applicable body size 2 2-07 LQ1-2N07 LQ1-2B07 LQ1T2A-ST2 2 Applicable body size 2 2-07 LQ1-2N07 LQ1-2B07 2-07 LQ1-2N07 LQ1-2B07 LQ1T2A-ST3 2 2-07 LQ1-2N07 LQ1-2B07 Applicable body size 2 LQ1T2A-ST4 2 Applicable body size 2 2-07 LQ1-2N07 LQ1-2B07 LQ1T3A-ST1 3 3-11 LQ1-3N11 LQ1-3B11 Applicable body

ARJ1020F

0.8 VEX NPT 1/8 NPT 1/8, M5 x 0.8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting 5/32" One-touch fitting NPT 1/8, M5 x 0.8 ITV 1/4" One-touch fitting JIS Symbol M5 x 0.8 female thread is cut inside the pipe.

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Miniature Regulator

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MFLD, 13-STA, NVZ3*40 *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, MJ, VV4/5Z* BASE MT Weight: tab 9

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MFLD, 4-STA, NVZ3*40 *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, MJ, VV4/5Z* BASE MT Weight: tab 9