Vacuum Pad

57 64.5 10.3 10.9 12.3 13.4 38.5 46 57 64.5 10.3 10.9 12.3 13.4 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Cylinder with Lock Series CNS

14 190 100 230 16 155 to 1000 50 47 161 160 245 1/2 3/8 128 136 36 90 63 35 14 19 20 212 112 255 16 180 to 1000 56 53 182 180 290 1/2 3/8 144 144 40 90 63 43 14 19 20 236 118 275 18.5 215 to 1200 (mm) Bore size (mm) GB GL GR K KA M N P Q R S T V VA H ZZ J MA MM 125 140 160 23 25 30 15 31 19 35 1/2 85.5 25 303 87.5 20 23 110 427 M14 x 1.5 M12 x 1.75 M30 x 1.5 28 30 30 15 31 19 35 1/2 93.5

KP/KPQ/KPG

(R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 12 46 58 25 H Reference dimension for R threads after installation Connection threads Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g M L2 D2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77

Rotary Table/

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77 35H9

MU

46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.2

MU

46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.2

CL

For general actuator precautions, refer to Actuator Precautions on pages 9-19-3 to 9-19-6. Place the limit switch before the desired stopping position, only in the amount of the overrun. The limit switch must have a detection length (dog length) of the overrun amount + . For SMCs auto switches, the operating range are between 8 and 14 mm. (It varies depending on a switch model.)

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

) AS23l1FG-02-06(S)A 6 11.2 19 33.8 (33.9) 21.4 43.9 20 (21) AS23l1FG-02-08(S)A 8 13.2 34.9 (35) 23.5 46 14.2 21 (22) AS23l1FG-02-10(S)A 10 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (23) AS33l1FG-02-06(S)A 6 8.2 16.5 29.9 (30) 17.5 40.1 AQ 1/4 17 (17.5) 12.9 13 ASV 13.3 42 (42) AS33l1FG-02-08(S)A 8 13.2 37.1 23.5 59.9 14.2 43 (43) AS33l1FG-02-10(S)A 10 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46

Compact Cylinder with Lock Series CLQ

(mm) With auto switch Without auto switch Bore size (mm) Stroke range (mm) A BP C D E F G H I J K L M N O OA OB P Q RA RB S T U V Z B A B 82 36 Rc 1/8 10 to 50 15.6 depth 12 14 depth 10.5 Rc 1/4 92 46 63 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 53 16 4.2 93 1.6 47.5 16.5 19 92 46 75, 100 96.5 43.5 10 to 50 19.6 depth 15.5 17.5 depth 13.5 Rc 3/8 Rc 1/8 106.5 53.5 80 21 25 98 12.5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

solenoids possible) 19 09 19 stations 9 stations Note 1) Double wiring: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

MK

Refer to p.0-39 to 0-46 for Safety Instructions and actuator and auto switch precautions.

VZS

For details, refer to pages 3-7-19 and 3-7-20.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

(R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 46 58 25 12 H Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g D2 M L2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04

Square Tube Type Air Cylinder Series MB1

to 750 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 18

SMC Pneumatic Clean Series

WH E-0.05 E-0.05 I 0 0 KA AL G port 8-J F K C-0.1 A NA F H S + Stroke ZZ + Stroke (mm) A AL Bore size Standard stroke range B1 C D E F GA GB H H1 I J K KA MM NA P RA S WA WB WH 20 20 20 W ZZ 40 30 27 Up to 300 50 35 32 Up to 300 63 35 32 Up to 300 19 27 27 6 7 7 44 55 69 139 162 162 26 32 38 14 18 18 1/8 1/4 1/4 16 20 20 8 9 9 25 30 32 87 102 102 2 2 2 25 30 30 22<19> 26<24> 26<24> 15 17

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

Table of Contents

44 45 46 46 47 48 49 50 50 51 52 54 56 56 57 58 58 59 60 How to Order .

Series IDG

Note 5) When very clean air is required, refer to page 46 "Precautions on Design", item 2.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.