Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 5 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 9 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 11 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 15 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 16 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 17 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 20 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 6 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 14 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 19 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 13 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 7 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 10 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 2 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Slider Type/Ball Bushing Bearing Square nut insertion TW NL CY3B CY3R CY1S (mm) Model A 97 102.5 125 EB 21 22 24 H 46 54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x
A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG
clamp screw R R 62.5 3 3 60 40.5 12 X 12 X B B B B B B B B 25 P P 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C8: 8 one-touch fitting C8 [1(P) SUP port] 20.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread P = 10.5 34 The dashed lines indicate the DIN rail mounting [-D] (with DIN rail mounting bracket).
Note 5) For step data input, up to 12 controllers connectable.
Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS25RH Motor option: With lock (132.5) (16) (2) 3 H9 (+0.025 0 ) depth 15 (Depth of counterbore 12) (172.5) (2) (16) Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 20.5 (Depth of counterbore 12) 128 38 3.5 50 22.5 (Depth of counterbore 12) 3 H9 (+0.025 0 ) depth 15 45 64 (102) L +