Table of Contents

Driver Non-standard motor electric actuator Standard motor electric actuator Controller How to Order How to Order B LG1 02 1 Compatible model 1 G LG1 05 Cable length G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

10

With bracket/Special electrical entry direction Special electrical entry direction Symbol Electrical entry direction Standard Electrical entry direction Symbol Electrical entry direction Symbol Single unit Manifold IN OUT Nil 90 90 90 270 IN OUT A 90 270 90 IN OUT A C 90 IN OUT Individual port 180 180 180 180 180 IN OUT B B 180 IN OUT Individual port (mm) U 46 56 56 W 36 46 46 X 11 13 13

LEC-OM069xx

4.8.1 Servo Alarm Output Signal (ALM).4-46 4.8.2 Warning Output Signal (/WARN).4-46 4.8.3 Rotation Detection Output Signal (/TGON).4-47 4.8.4 Servo Ready Output Signal (/S-RDY).4-47 4.8.5 Speed Coincidence Output Signal (/V-CMP).4-48 4.8.6 Positioning Completed Output Signal (/COIN).4-49 4.8.7 Positioning Near Output Signal (/NEAR).4-50 4.8.8 Speed Limit Detection Signal (/VLT).4-51 4.9

ZP

Material ZQ Series ZPR Without Buffer ZPR U N 02 04 A5 ZF ZP Mounting thread (Refer to Table (2) for applications.)

LX

Performance/Specifications General specifications LC5-1-T1-02 Part no.

Nozzle Type Ionizer

86.4 Air blow port 8 6 2 x M3 x 0.5 thread depth 10 26 34.7 11 High flow rate nozzle IZN10E-02-X367 (103) 16 92.5 5 5.5 Variable nozzle direction 12 46 18.5 Air blow port 8 4 22 IZN10E Series Made to Order 2 This product is an individually applicable product.

Modular Type Regulator Series AR

type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 Round G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

SQ1000/2000

P. 47 P. 48 C10 N11 P R D side U side Individual SUP spacer SSQ2000-P-3Silencer (for EXH port) EXH block plate SSQ2000-B-R Port plug VVQZ2000-CP P. 44 P. 46 P. 47 P. 48 C8 L8 P R D side SMC AN200 U side Special wiring specification (-K) D-sub connector Individual EXH spacer SSQ2000-R-3Back pressure check valve (-B) SSQ2000-BP Built-in silencer (-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal

Modular Type Air Filters Series AF

IN OUT How To Order B VHS 30 N 02 Z X513 EXH Residual Pressure Relief 3 Port Valve Dimensions mm With External Epoxy Coating, Stainless Fasteners B C D E F G H I Model A Body Size Symbol 20 30 40 VHS20 VHS30 VHS40 59 78 107 20 29 39 40 53 70 34 46 63 22 45 55 58 33 42 44 28 30 36 45 55 63 Applicable Model AC21 AC31 AC41 Name Plate In Imperial Units (PSI, F) Caution Thread Type N NPT If

2/3 Port Valve for Various

Refer to pages 17-3-46 and 17-3-47 for specifications and models.

AC Servo Motor Driver (CC-Link Type ）

The parameter No.PC07 (home position return position data) setting value is the positioning address after the home position return is completed. 5 46 5.

AC Servo Motor Driver (CC-Link Type ）

The parameter No.PC07 (home position return position data) setting value is the positioning address after the home position return is completed. 5 46 5.

AW

Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa

ZP

Material ZQ Series ZPY Without buffer ZPY U N 02 N4 A5 ZF ZP Mounting thread (Refer to Table (2) for applications.) Pad diameter (mm) 02 04 2 4 ZCU Vacuum entry port (Refer to Table (2) for applications.) 06 6 AMJ 08 8 10 10 Misc. 13 13 Table (2) Vacuum Entry/Mounting Thread Diameter 16 16 Thread dia.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

SO-03 SO-04 SO-05 NT-02 NT-03 NT-04 AC-NI-50 8 8 9 11 30 36.9 43.9 47.3 26 32 38 41 5 6 8 10 12.5 16.5 21.0 23 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 15.0 19.6 25.4 27.7 20 25 32 40 M22 x 1.5 M24 x 1.5 M30 x 1.5 M33 x 2.0 26 32 38 41 13 17 22 24 10 Series CHN Accessory Brackets (Optional) I-shaped single knuckle joint Bracket for clevis type Material: Cast iron 20: I-02 25

VCW

W 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

VCW

VV2C W 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

W 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

Pilot Operated

G VXD 3 0 21 VXD 3 0 21 5 1 02 G For Water For Oil For Air The AC (Class B) coil for VXD2130 comes with a full-wave rectifier.

Modular F.R.L. Unit

-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04