Speed Controller with Indicator 16.6 13.3 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FS-04-12 (S) 12 18.5 30.8 43.7 (43.6) 35.1 17 64 (
SOL.A 19 Station 10 SOL.B 20 SOL.A 21 Station 11 SOL.B 22 SOL.A 23 Station 12 SOL.B 24 COM. Triangle mark indicator position 25 COM. 26 Note) Positive COM spec. Electrical wiring specifications Negative COM spec. Note) For CE compliant models, DC-type only.
SOL.A 19 Station 10 SOL.B 20 SOL.A 21 Station 11 SOL.B 22 SOL.A 23 Station 12 SOL.B 24 COM. Triangle mark indicator position 25 COM. 26 Note) Positive COM spec. Electrical wiring specifications Negative COM spec. Note) For CE compliant models, DC-type only.
Refer to the Specific Product Precautions. 0.5 45.5 1.5 50 Z ZZ H G (NN 1) x H 11.5 29 11.5 29 B A 5.1 9.5 11 11 5H9 depth 5 +0.030 0 30 NN x M6 x 1 thread depth 12 A B 6 HA GA Section AA Section BB 5H9 depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 N 4 4 4 4 6 6 6 8 8 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 GA
03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19
Locked Manual lock released Refer to page 41 for the manual lock release.
ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 19 7. TROUBLE SHOOTING 19 8. SPARE PARTS LIST 19 9. HOW TO REPLACE 20 10. DISASSEMBLY DRAWING . 2122 11. DIMENSIONS . 2327 AIR COMBINATION Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
O After a few seconds at 10-6Torr 41
SB) 5 3 5 90 5 90 90 20 20 20 20 A 20 20 (3 x SA) MHSHJ3-63D MHSHJ3-80D Section SD SD 4 4 10 5 11 3 5 5 3 90 5 90 20 20 20 20 (mm) NB A Model L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5 10.5 11.5 13 14 CB 19 19 26.5 28 31 B 54 62 74
G 3/8 25 30 45 Up to 1000 40 320 51 15 17 4 138 17 50 22 M20 x 1.5 10 M10 x 1.5 Up to 1000 19 G 1/2 25 32 55 40 398 65 15 17 6 160 20 58 27 M27 x 2 13 M12 x 1.75 19 Up to 1000 G 1/2 32 40 60 54 Minimum stroke for trunnion mounting are below.
N.O. 40 12 NC 51.5 115.1 107.1 107.1 115.1 86 24 1P 51.5 NO 12 1/2 1(P) port 1/8 12(PA) port (Pitch) P = 41 8 37 M5 x 0.8 (Breathing hole) L1 L2 (Station n) (Station 1) 1/8 12(PA) port 12 127 94.5 78.2 2A 2A 63 19 1/2 2(A) port (Pitch) P = 41 37 2 stations 115 99 156 140 197 181 238 222 279 263 320 304 361 345 402 386 443 427 484 468 525 509 566 550 607 591 648 632 689 673 730 714 771 755
18.5 8 15.2 21.8 19 R 1/4 23 9.5 55.3 1.5 49.3 AS321F-N02-07ST AS321F-02-10ST 1/4" 13.2 27.8 39.3 17 31.8 43.3 21 10 18.5 AS321F-N02-09ST AS321F-02-12ST NPT 1/4 19 23 9.5 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 32.8 44.3 22 12 20.9 AS321F-N02-11ST AS321F-03-06ST 3/8" 17.9 31.8 43.3 21 27.8 39.3 17 6 12.8 AS321F-N03-07ST AS321F-03-08ST 1/4" 13.2 27.8 39.3 17 29.5 41 18.5 8 15.2 20.9 19
For IZS41/42 IZS41 C 19 20 19 m 20 m AC adapter G1 G2 AC adapter + AC cord AC adapter (without AC cord) Cleaning kit/IZS30-M2 AC cord is only for use in Japan. (Rated voltage 125 V, plug JIS C8303, inlet IEC60320-C8) External input and output cannot be used when the AC adapter is being used.
L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.
Speed 600 mm/s REAR20 3 1 9 9.5 5.2 22.8 9 6 39 37.5 39 36 38 36 7.5 21 M6 x 1 x 8 REAR25 3 1 8.5 9.5 5.2 27.8 8.5 6 44 42.5 44 41 43 41 6.5 23.5 M6 x 1 x 8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 Direct Mount Type REBR REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 LD MM N P PW Q WS Z QW T W X Y K L M Model REAR10 3.5 M3 x 0.5 4.5
53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)
7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58 25 31.4 L1 22 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.
ARBZ3000-00-P Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Spring washer for M2.5 Spring washer for M2.5 Round head combination screw Round head combination screw Round head combination screw (With spring washer) Gasket Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Individual SUP spacer Gasket Gasket Individual EXH spacer Rc 1/8 (1(P) port) Applicable base VV5Z3-41 VV5Z3-42 VV5Z3
41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11 11 38 41 50 52 66 76 18 22 30 35 40 50 31 35 45 50 60 70 15 18