Direct Operated

(NBR) (FKM, EPDM) 14 Aluminum Base The materials in parentheses are the seal materials.

AC Servo Motor Driver

31 14.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

base side B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) Z S M J H F Model MXPJ6-5 44 5 37 27 38 25 MXPJ6-10 59 10 47 42 53 35 8-8-14 14 Precision Air Slide Table Series MXP Dimensions: MXP6 Piping port 2-M3 x 0.5 (Plug: M-3P) AA 42 MX 7 4 H 2.3 11.2 3 MTS 1 MY 1 0.05 D B 9.5 3.5 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

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ZPR10g 10 12 12 21 29.9 46 20 67 25 72 3 17 27 ( ::) 2PR02 26 '-I 26 27 ('J;) \ .2PR08 ZPR13g 13 15 12 21 29.9 46 20 67 25 72 3 1.B ( '2~4' ZPR16g 16 '8 12.5 21 .5 29 30 30.4 46.5 20 67.5 25 72.5 3.5 1.2 ZPR'1O 29 31 29 31 29 31 ZPR13 Deep type (mm) Model A 'B C D E F 1:M5xO.a 1:M6x1 Y' .,G H 1 ZPRl6 31 31 G H ..

Compact Cylinder with Lock Series CLQ

1.5 12 14 32, 40 I-G04 10 18 42 14 22 30 M14 x 1.5 12 14 10 50, 63 Y-G05 56 20 28 40 M18 x 1.5 16 20 50, 63 I-G05 14 22 56 18 28 40 M18 x 1.5 16 20 14 80 Y-G08 71 23 38 50 M22 x 1.5 21 27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

NCG/CG1

A MM A1 E1 L1 NX NDH10 Type C 12 for axis 0.050 0.093 Type C 14 for axis 0.050 0.093 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 25 30 30 40 50 55 M8 x 1.25 34 41 42 56 71 79 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 18 22 28 32 8 10 10 14 18 22 +0.058 0 0.2 0.4 Type C 16 for axis 0.050 0.093 M10 x 1.25 +0.058 0 0.2 0.4 Type C

3 Port Solenoid Valve Rubber Seal Series SY100

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SYJ SS3Y1 31 05 VK Stations VZ 02 2 stations P R 20 VT 20 stations R port VP M5 x 0.8 P port M5 x 0.8 VG Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

MHF2

thread 15.8 34 5.9 E 11 11 14 19 E M3 x 0.5 0 -0.1 2-2.6 through (mounting hole) 17 Finger closing port 14 14 M3 x 0.5 2-4.5 0.8 0.8 Finger opening port E-E Close: 0 +0.1 0 Open: 161 Use the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 26 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Mounting thread Groove for auto switch mounting M2.5 x 0.45

SV

133 4 223 212.5 193.6 14.5 157 5 248 237.5 217.6 15 181 6 273 262.5 241.6 15.5 205 7 298 287.5 265.6 16 229 8 323 312.5 289.6 16.5 253 9 348 337.5 313.6 17 277 10 373 362.5 337.6 17.5 301 11 385.5 375 361.6 12 325 12 410.5 400 385.6 12.5 349 13 435.5 425 409.6 13 373 14 460.5 450 433.6 13.5 397 15 485.5 475 457.6 14 421 16 510.5 500 481.6 14.5 445 L1 L2 L3 L4 L5 1-2-34 31 Serial Wiring with

Digital Flow Switches, Series PF2A, Series PF2W

, m3 x 103 Port size Output specification Port size Applicable model Flow rate (l/min) 28 29 68 69 NPN open collector 1 output + Analog output (1 to 5V) NPN open collector 1 output + Analog output (4 to 20mA) PNP open collector 1 output + Analog output (1 to 5V) PNP open collector 1 output + Analog output (4 to 20mA) Symbol 3000 6000 12000 10 14 20 1 11/2 2 PF2A703H PF2A706H PF2A712H Switching

LX

LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.)

Air Cylinder Series CM2

I-020B I-032B I-040B +0.058 0 0.1 0.2 +0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 +0.058 0 0.1 0.2 +0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 +0.070 0 0.1 0.3 +0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint (mm) Y (Max.)

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) m3 M3 Load factor 3 = M3/M3 max = 8.86/38.7 = 0.23 5.

1.1

Connector type (on this product side) M3 terminal block EIA RS-485 compliant Standards Protocol Special protocol: For details, refer to the Communications Specifications document.

Fieldbus system EtherCAT compatible SI Unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Roun1d head screw (M3 x 8), 4 pcs. (2) End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tithe screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

max. m1, m2, m3 max.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

782 MXS 1322Air Slide Table Dimensions: MXS8 1322Basic 2 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 7 2 Vacuum suction port M5 x 0.8 5.5 J 6 Max. 9.5 (Stroke adjuster at retraction end) I 8 6.5 4 6.5 7 7 3.5 3.8 NA x M3 x 0.5 thread depth 4 14.6 K 7 3.8 KA 14.6 22 (With stroke adjuster at extension end) Stroke adjuster at extension end Stroke adjuster at retraction end N x M3 x

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M2 M3 m2 m3 m4 10 15 25 1 2 1 2 2 2 1.4 CY1F 1.5 3 1.5 5 5 5 2 14 20 14 12 12 12 12 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M2 M3 m2 m3 m4 10 15 25 1 2 1 2 2 2 1.4 CY1F 1.5 3 1.5 5 5 5 2 14 20 14 12 12 12 12 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.