SV

L Dimension n: Stations L n 2 135.5 125 102.6 16.5 63 3 148 137.5 113.1 17.5 73.5 4 148 137.5 123.6 12 84 5 160.5 150 134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17

Rotary Table/

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5

Air Cylinder Series CM2

76 17 10 5.5 8 30 29 15 43 12 39 22 26 25 19.5 36.3 33.5 18 M10 x 1.25 8 1 32 8 31 6 109 22 78 17 12 5.5 10 29 15 43 12 47 22 26 30 19.5 42.3 37.5 34.5 21 M10 x 1.25 4 1 40 11 34 8 138 27 104 22 14 7 12 49 15 24 21 32 38 M14 x 1.5 52.3 46.5 42.5 58.5 37.5 21.5 26 With Air Cushion (mm) Bore size W NB WB WA NA 20 8.5 17.5 13 27 31.5 25 10.5 17.5 13 27 31.5 32 11.5 17.5 13 27 31.5 40 15 21.5

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

Digital Flow Switches

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without an unit switching function.)

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

1.1

IDF-TR7000-8 IDF-TR14000-8 IDF-TR18000-8 Mass (kg) 360 400 650 450 300 350 13 40 152 400 650 450 300 350 13 40 179 32 Thermo-cooler Series HRG Dimensions [Foundations bolt set] HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products A Mounting hole diameter: 10.5 (mm) A Nominal thread size Applicable Thermo-cooler Part no.

Clamp Cylinder with Lock

Round head Phillips screw (M3 tightening torque: 0.5 to 0.7 Nm) Spring washer Mounting bracket part no.

Compact Cylinder with Lock Series CLQ

100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

Pin Clamp Cylinder Series CKQ/CLKQ

length) T (Arm thickness) Applicable hole diameter 12.5 12.7 14.5 14.7 15.5 15.7 17.5 17.7 19.5 19.7 24.5 24.7 4.5 13 6 9 31 224 29 222 4.6 5.5 15 7 31 11 224 29 222 5.6 6 16 7 11 31 224 29 222 6.1 7 18 8 36 12 229 34 227 7.1 8.5 20 8 36 13 229 34 227 8.6 10.5 25 8 36 15.5 229 34 227 10.6 P (Port thread size) P1 (Lock release port thread size) Nil G1/4 TN TF Nil TF TN Rc1/4 NPT1/4 Rc1/8

Refrigerated Air Dryer

IDFB Corrected air flow capacity = 31 m3/h (0.83 x 0.83 x 0.92) = 48.9 m3/h Obtain the corrected air flow capacity from the following formula. Corrected air flow capacity = Air consumption (Correction factor A x B x C) IDH 3 ID Select the model. According to the corrected air flow capacity of 48.9 m3/h, the IDFA8E will be selected when the required output air pressure dew point is 3C.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) m3 M3 Load factor 3 = M3/M3 max = 8.86/38.7 = 0.23 5.

CY1F

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static moment Ceiling mounting Horizontal mounting Wall mounting M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y

MK

25.5 25.5 A 32.5 33 37 28 32.5 32.5 A 31.5 22.5 27 27 A 35.5 26.5 31 31 MKl20 MKl25 MKl32 MKl40 MKl50 MKl63 Auto Switch Mounting Bracket Part No.

10

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Fluid density [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow-rate characteristics are shown in Graph (2).

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5

3 Port Air Operated Valve Series SYJA300

4.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 13.5 M3 x 0.5 (A port) A A 13 10 (Pitch) P=10.5 11.5 M3 x 0.5 (A port) L plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.7 [60.9] 48.9 [51.1] 57.8 50.4 43.9 Refer to page 4-4-61 for dimensions

CUJ

x 28l M3 x 33l M3 x 38l 4 M2.5 x 14l 14 4 5 M3 x 18l 18 5 5 M3 x 18l 18 5 5 M3 x 18l 18 5 With Auto Switch For Axial Mounting For Lateral Mounting B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10

Slider Type/Ball Bushing Bearing

CY1H25 (Nm) 64 56 50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

13 13.5 67 18 58 130 76 160 119 M10 x 1.5 depth 20 CDRA1LSU100 CDRA1FSU100 5 112 189.5 6 60 190 13 13.5 87 18 73.5 150 92 180 133 11-7-30 31 CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MRQ D2011-7-31 32 Series CRA1 (Size 30, 50, 63, 80, 100) Simple Specials: -XA1 to -XA24: Shaft Pattern Sequencing I Shaft shape pattern is dealt with simple made-to-order system.