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14 Sine Rodless Cylinder Basic Type Series REAR Precautions Be sure to read before handling.

14 Sine Rodless Cylinder Basic Type Series REAR Precautions Be sure to read before handling.

Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.

(L3) L2 3 L1 2 1 A 4 B 2 14 Stations 4 P=10.5 17.7 D side 2n-M5 8 8 44 30.5 67 (Single, rubber) 69.5 (Single, metal) A 4 14.5 B 2 95 (Double) 103.5 (3 Position) 300 (Lead wire length) 14 6.5 Cover diameter 1.6 Cross section 0.34mm2 M5 57.5 31 26 13 55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc(PT)1/8 R1, R2(EXH) port 15 16.5 16.5 15.5 15.5 33 57 (30.5) 7 2-Rc(PT)1/8 P

This function resets the accumulated operation time. 5.16 14 Anti-freezing Circulating fluid is protected from freezing during winter or night.

oqir -M5, BgT I l , NPTF 2 porrs i 'u NPTF z Po't" ,D# tp pod, l l -r-f *_\ \ 1 l \ 0.39 (1ol n ) 4 6 7 R 10 1 1 1 1 2 13 14 15 16 18 19 L1 (39.5) 1.57 (50) 2.8 (60.5) 2.ffi (7r) 3.2 (81.5) (92) 4.O4 4.45 002.5) (11s) 4.86 (r23.5) 5.28 5.69 (134) (144.5) 6.10 fts5) 6.52 (165.5) 6.93 076) 7.34 (1e6.51 (197) 4.17 (207.58.58 (218) 9.00 (228.5) L2 124 {31,5) (42) 2.O7 (52512.44 (63) 2.g r 3.31

oqir -M5, BgT I l , NPTF 2 porrs i 'u NPTF z Po't" ,D# tp pod, l l -r-f *_\ \ 1 l \ 0.39 (1ol n ) 4 6 7 R 10 1 1 1 1 2 13 14 15 16 18 19 L1 (39.5) 1.57 (50) 2.8 (60.5) 2.ffi (7r) 3.2 (81.5) (92) 4.O4 4.45 002.5) (11s) 4.86 (r23.5) 5.28 5.69 (134) (144.5) 6.10 fts5) 6.52 (165.5) 6.93 076) 7.34 (1e6.51 (197) 4.17 (207.58.58 (218) 9.00 (228.5) L2 124 {31,5) (42) 2.O7 (52512.44 (63) 2.g r 3.31

oqir -M5, BgT I l , NPTF 2 porrs i 'u NPTF z Po't" ,D# tp pod, l l -r-f *_\ \ 1 l \ 0.39 (1ol n ) 4 6 7 R 10 1 1 1 1 2 13 14 15 16 18 19 L1 (39.5) 1.57 (50) 2.8 (60.5) 2.ffi (7r) 3.2 (81.5) (92) 4.O4 4.45 002.5) (11s) 4.86 (r23.5) 5.28 5.69 (134) (144.5) 6.10 fts5) 6.52 (165.5) 6.93 076) 7.34 (1e6.51 (197) 4.17 (207.58.58 (218) 9.00 (228.5) L2 124 {31,5) (42) 2.O7 (52512.44 (63) 2.g r 3.31

EC DECLARATION OF CONFORMITY Original declaration SMC Corporation 4-14-1 Soto-Kanda, Chiyoda-ku, Tokyo 101-0021 Japan declares under our sole responsibility that the following equipment: Thermo Chiller HRS Series _ Serial No.: o001 to Z999 conforms with the following directive(s) and harmonized standards: Directive Harmonized standards Machinery Directive 2006/42/EC EN ISO12100:2010 EN60204

Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.

L FT FX B + Stroke (mm) FZ FX A + Stroke Bore size (mm) Stroke range (mm) FZ A B CL CD CT CU 10 10 to 40 61.5 90.5 84.5 5 4 10 Double clevis type: MQQLD 16 10 to 60 70.5 107.5 98.5 8 5 12 20 10 to 60 79 119 109 10 5 14 CU CD hole H10 Shaft d9 Cap bolt 25 10 to 50,75,100 84.5 126.5 116.5 10 5 14 30 10 to 50,75,100 104 148 138 10 6 14 40 10 to 50,75,100 104 158 144 14 7 20 Bore size (mm) CX

Approx. 216 with AMC610-10 installed (approx. 261.5 with AMC810-14 installed) D side entry (LD) Approx. 100 with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

COIL NO. 6 7 12 14 5 6 10 12 1.8 2.2 3.7 4.4 2C-102-A24 2C-103-A24 2C-104-A24 2C-105-A24 2C-2-K24 2C-3-K24 2C-4-K24 2C-5-K24 19 24 28 30 38 17 21 24 26 33 6 7.5 9 9.5 12 2C-106-A24 2C-107-A24 2C-108-A24 2C-109-A24 2C-110-A24 2C-6-K24 2C-7-K24 2C-8-K24 2C-9-K24 2C-10-K24 48 55 77 120 138 42 48 67 100 120 15 18 24 38 45 2C-111-A24 2C-112-A24 2C-113-A24 2C-114-A24 2C-115-A24 2C-11-K24 2C-12-

L 108 117 130 135 N 93 102 N 79.5 87.5 1 4 3 8 , 50 63 80 90 35 35 40 40 52 60 68 73 25.5 33 41 44 11 14 18 21 6 7 7 7 89 97 112 117 25 25 28 28 67 75 87 92 40 52 65 70 7.5 8.5 9 9 22 28 36 42 5.5 6.5 6.5 6.5 24 33 42 47 1.6 2.3 2.6 2.6 26 30 38 43 14 17 22 22 23 23 25.5 25.5 28 35 43 45 1 2 3 4 1 101.5 115.5 106.5 120.5 4.1-82 VXZ22/23 Conduit: C FN.C.E Normally closed EN.O.F Normally open

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

SV2000 SV3000 SV1000 SV4000 Refer to page 14. EX250-SDN1 EX250-SPR1 EX250-IE1 EX250-IE2 EX250-IE3 EX250-EA1 SV1000-78A Refer to page 32.

42 P. 49 C6 L6 Terminal number D-sub connector SOL.

14 Groove for auto switch mounting Mounting thread 15 38 12 Series MHF2 Dimensions MHF2-12D1 Scale: 65% 3H9 +0.025 0 depth 3 42 3H9 +0.030 0 depth 3 2-M4 x 0.7 thread depth 10 Mounting thread 4 58 4 40 68 M5 x 0.8 2-M4 x 0.7 thread depth 5 20 54 Finger closing port Mounting thread E 7.7 14.8 15 19 25 E 0 -0.1 20 2-3.4 through (mounting hole) 21 1 21 1 Finger opening port M5 x 0.8 +0.1 0