Modular Type Regulator Series AR

1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10

AS-FG/ASD-FG

AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 3) System A: Valve + Z728.H B: Valve + MTL728P+ F: Valve + KFD0-SD2-Ex1.1065 Standard SY manifolds Types 20, 41, 42 are used for 52-SY valves.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

O-ring O,O Non plug-in type @ o End plate (kit) assy MEF363LR-04-t End plates O Joint/clamp O,O . Gasket O,O . O-ring O,O Plug-in type MEF373LH-04-1 End plates O . Joint/clamp O,O . casket O,O .

-fl Seies

O-ring O,O Non plug-in type @ o End plate (kit) assy MEF363LR-04-t End plates O Joint/clamp O,O . Gasket O,O . O-ring O,O Plug-in type MEF373LH-04-1 End plates O . Joint/clamp O,O . casket O,O .

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 4 Stations, A B Port Size: 00N (NPT)

Piping: Body Ported, Stations: 4 Stations, A, B Port: NPT

Piping: 20 (Body Ported), Stations: 4 Stations, A, B Port: 00N (NPT)

Type: Common SUP/Common EXH, Stations: 04, Bracket: None, Thread: NPT

Manifold Type: Body Ported, Valve Stations: 4 Stations, A, B Port: NPT, CE Marked: -

Manifold Type: 20 (Body Ported), Valve Stations: 4 Stations, A, B Port: 00N (NPT)

Manifold Type: 20 (Body Ported, Bar Manifold, Individual Wiring), Valve Stations: 4 Stations, A, B Port: 00N (NPT)

Manifold Type: 20 (Body Ported), Valve Stations: 4 Stations, A, B Port: 00N (NPT)

Passage: 20 (Common SUP,Common EXH), Stations: 4 Stations, Thread: 00N (NPT)

Passage: Common SUP,Common EXH, Stations: 4 Stations, Thread: NPT

Manifold Type: Body Ported, Valve Stations: 4 Stations, A, B Port: NPT, CE Marked: -

Piping: Body Ported, Bar Manifold, Individual Wiring, Stations: 4 Stations, Port Size: None, Thread: NPT

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 4 Stations, A, B Port: NPT, Q: -