MQQ

55 175 20 8 25 Front flange type/MQMLF 6 20 33 42 27.5 2.3 2-5.5 66 + Stroke 93.5 + Stroke 10, 16, 20, 25 FY FT FX FZ H 2-FC S + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S ZZ 5.5 2.3 33 20 42 28 65 101 10 5.5 2.3 42 24 54 30 74 114 16 7 4 60 34 75 40.5 97.5 151 20 7 4 60 40 75 44.5 102.5 160 25 15 Series MQM Lateral Load Resisting Low Friction Cylinder Metal Seal Refer to

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

S 20 20 stations A,B port size R Port M5 0.8 M5T M5 0.8 A, B Port M5 0.8 A, B Port M5 0.8,N3T P Port M5 0.8 P Port NPTF N3T One-touch fitting Type 41(5 Port / Base mounted type) Applicable solenoid valve: SYJ3 40SYJ3 43SS5YJ341-05 --N3T Type 41 Type S41 Single solenoid coil is located on same side as the A, B port. ( ) Applicable blank plate ass'y: SYJ3000-21-2A Valve mounting direction

Table of Contents

-9 Mist Separator 14-20-16 Micro Mist Separator 14-20-22 Odor Removal Filter 14-20-42 Note: Some models have different heights depending on the port size.

CG5-S

NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX + 0.2 + 0.1 U BA S + Stroke Z + Stroke ZZ + Stroke BB H R (mm) CD

CNG

20 to 300 301 to 500 Bore size (mm) 20 25 32 40 P K KA MM NA PG PH PL S TB TDe8 TE TF TH TR TZ TS TT TV TW TX TY XA XB J 0.025 0.047 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 11 8 10 5.5 25 39 28 3.2 35.8 42 16 28 47.6 3 12 M4 x 0.7 0.025 0.047 43 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 11 10 10 5.5 30 33 3.2 39.8 42 20 28 53 3 12 M5 x 0.8 0.032 0.059 0.032 0.059 5.5 10 M10 x 1.25 35.5 1/8 26.5

MHZ

0 8 0 -0.1 MHS MHC MHT 62 42 32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

MHZ

0.02 MHT 8 0 -0.1 When open 26.3 +2.2 0.2 MHY MHW (58) MRHQ 30 42 32 0.02 Misc. 16.8 D29 +0.052 0 depth 3 21H9 2018 0 -0.05 When closed 16.3 0 0.7 20 43.5 84.8 2-M5 x 0.8 thread depth 10 (Mounting hole) M5 x 0.8 (Finger closing port) 4-M4 x 0.7 (Thread for mounting attachment) M5 x 0.8 (Finger opening port) Auto Switch Mounting Groove Dimensions 15 5 9 Auto switch mounting groove (Both sides

Modular F.R.L. Unit

36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of Optional specification Note 2) the piping.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R50 25 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size H Stroke L Note

Floating Joint

59.5 59.5 66 96 30 35 38 42 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 9 9 13 13 13 15 15 18 24 24 24 42 8 10 10 12 12 12 16 16 20 24 27 27 33 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

CLQ

A A1 E1 L1 NZ 16 16 20 22 28 38 44 34 41 42 56 71 79 25 30 30 40 50 55 20 25 32, 40 50, 63 80 100 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 34 41 42 56 71 79 25 30 30 40 50 55 IY-G02 16 20 IY-G03 20 22 IY-G04 36 28 IY-G05 44 38 IY-G08 56 44 IY-G10 Knuckle pin and snap ring are included. 64 Knuckle Pin (Common with double clevis pin

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

CJ5-S

S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 12 RB 16 15 18.3 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 18.3 J D-X 20Data 10-14-7 8 Series CJ5-S Dimensions R V Rod side flange style (F): CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA 0 0.3 CB D FY FB 2-

CJ5-S

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( )

ZR

release pressure port EXH EXH 109 PE PE PE PE PD PD PD PD 81.5 80.8 80.8 PD PD PD PD PS PS PS PS PV PV PV PV 52 52 13.5 13.5 50 42 42 PD PS PD PS 35.5 35.5 31.5 33 33 28 28 16.5 17 17 PV PV PV PV PV PV M5 PD port Release flow rate adjustment needle Vacuum release pressure port 2-M5 PD port Common vacuum release pressure port Rc 1/8 PV port Air supply pressure port M5 PS port 2-Rc 1/2 EXH

Modular F.R.L. Unit

Note 2) For M5 and NPT thread type.

0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Stations 1 2 3 D side U side 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 152 141 130 119 108 64 97 53 86 31 42 75 175 162.5 150 137.5 125

MXS Series Air Slide Table

Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58

LEC-OM02704CN

DC24V 2. 20 3. 4. 5. 6. 7. 8.