Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

One-touch Fittings Series KQ2

(mm) Weight (g) Thread R(PT) H (Hex.) M5 A D1 L1 D2 M L2 Part No.

CXS

CXSM6R CXSL6R CXSM10-R CXSL10R CXSM15-R CXSL15R CXSM20-R CXSL20R CXSM25-R CXSL25R CXSM32-R CXSL32R 3. The manual lever (1.6 x 35, tip part: M1.6 x 0.35 x 3) is included with the cylinder.

4 Port Solenoid Valve Series VQD1000

M5 x 0.8 C4 4 cassette Note) 1(P), 3(R) ports: Rc1/8.

Fieldbus System

S Z NS NZ r Pilot type Nil R Internal pilot External pilot Only Nil is available for M5. !

Electric Actuator

[mm] Step motor Servo motor Stroke range (mm) C B D EH EV H J K L M O1 R S T U Size A 10 to 100 166.3 167 92 16 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 35.5 0.5 10 101 to 300 186.3 187 112 15 to 100 195.4 191.6 115.5 25 M8 x 1.25 M5 x 0.8 20 44 45.5 24 17 14.5 34 8 45 46.5 1.5 13 101 to 400 220.4 216.6 140.5 20 to 100 216.9 128 32 M8 x 1.25 M6 x 1 25 51 56.5 31 22 18.5 40 10 60

SYJA3000

) 3 (R) 5 (R) 1 (P) 3 (R) Note 1) Impact resistance: No malfunction resulted from the impact test using a drop impact tester.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

0 r #7 @5 !1 !

MG

4.3 8 4.5 M5 x 0.8 15 10 19 53 37 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 12.5 10.5 25 53.5 37.5 12 10 6 42 11.5 9 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.6 9.5 5.5 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30 st or less Over 30 st to 100 st Over 300 st 30 st or less Over 30 st to 100 st 23 Over 100 st to 200 st 200 Over 200 st

Rotary One-touch Fittings Series KS/KX

(mm) 8 6 4 Connection thread Type 10 12 Male connector KSH KXH M5 0.8 M6 1.0 1 8 R(PT) R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Male elbow KSL KXL M5 0.8 M6 1.0 R(PT) 1 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 57 Series KS/KX Rotary One-touch Fittings Male connector: KSH Inch (Standard) Effective orifice(mm 2) Part No. M Min. hole dia. Applicable tube O.D.

G15/G27

1 8, 1 R 4 0 to 0.7 With cover ring assembly 0 to 1.0 MPa MPa 0 to 0.2 1 8, 1 4 R 1 8, 1 4 R 0 to 0.4 M5 (Female thread) 0 to 0.7 M5 (Female thread) 0 to 1.0 1 8, 1 4 R 0 to 30 0 to 0.2 1 8, 1 R MPa. psi 4 Note 1) Do not apply pressure more than the maximum display pressure.

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

M5: 5.7) 35 5.5 53 (For top ported) Cover dia. 1.6 Cross section 0.34 mm2 39.5 7.8 42.5 P R 1 3 15 8 2-M5 x 0.8 PE port 13.4 2-Rc 1/8 Port 3(R) 16.3 41.2 2-Rc 1/8 1(P) port 46.5 The broken lines indicate the DIN rail mounting style [-D].

24

, 125, 150 175, 200, 250, 300, 350, 400 53 37 10 8 8 36 11.5 9 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 25 53.5 37.5 10 9 7 42 11.5 10 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 MGT Bore size [mm] PA PB PW Q R S T U VA VB WA WB X XA XB YY YL Z 30 st or less Over 30 st 100 st or less Over 100 st 200 st or less Over 200 st 300 st or less Over

VK3000

Applicable blanking plate assembly VK3000-7-1A 01 1 station Solenoid on opposite side of A and B port P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Nil R port: Rc 1/8 Thread type Type S41 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 P port: Rc 1/8 R port: Rc 1/8 S Nil Rc Port size Q CE-compliant Nil CE-compliant F N T G M5 M5 x 0.8 C4 4 cassette NPT B port

REA/REB

MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

REA/REB

-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

11.7 12.7 17 31.1 27.1 32.1 36.1 14.2 14.3 R 1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 35.4 29.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L3 L2 D1 L1 H T Max.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

Electric Slide Tables

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