CQS

Example 7-4-5 6 Series CQS Weight/Without Auto Switch (g) For standard stroke Calculation: (Example) CQSD20-20DCM Cylinder weight: CQSB20-20D101 g Option weight: Rod end male thread 10 g : Rubber bumper 2 g : Double clevis style 92 g Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 12 29 36 42 49 56 63 93 100 113 147 180 107 16 38 47 56 64

Rotary Cylinder Series MRQ Size: 32, 40 1

Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

IDG

100 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG100L (Type B products group) Refer to pages 14-19-28 to 29.

AC Servo Motor Driver (CC-Link Type)

360 629 90 180 360 Home position return position data (m) PC07 0 -4000 (Less than stroke 1000) / -400(Stroke 1000 or more) Stopper type home position return PC09 100 200 stopper time (msec) Stopper type home position return torque limit value (%) PC10 15 30 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032)/ 0003 (LEC-MR-RB-12) 1 Rotation direction selection *4 PA14 0 0 (+Counter motors

0.4

Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Locking type (Tool required) VQZ100 Black (DC) Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red If the manual override is turned by 180 clockwise and the mark is adjusted to 1, then pushed in the direction of an arrow (), it will be locked in the ON state.

HRL

V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 (400 V as standard, 200 V as an option) (Only 200 V as an option) CH1 0.1 15 to 25 HRL Inverter dual type 26 kW Indoor use 19 kW 9 kW CH2 0.5 20 to 40 1.0 kW (Max. 1.5 kW) 322 Circulating Fluid Temperature Controller Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: ø180, ø200, ø250, ø300 Air-hydro: ø125, ø140, ø160

Nil N H Port thread type Bore size Nil TN TF Rc NPT G Air-hydro Lube, Non-lube 125 140 160 180 200 250 300 125 140 160 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm 300 mm 125 mm 140 mm 160 mm Mounting Bracket Part No. Bore size (mm) 125 140 160 180 200 250 300 For How to Order with auto switch, refer to page 417.

New

C37 20A 3/4 20 D 200 VAC N.O. Stainless steel E 230 VAC 6 D K L N.C. N.O.

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB2 -032 BMB2 -040 BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 MDB 9-15-71 72 Technical Data 2: How to Mount and Move the Auto Switch Mounting

Cylinder with Lock

Chart (1) 400 st 500 st 600 st 700 st 400 st 500 st 600 st 700 st 10 5 4 300 st 300 st 3 200 st 200 st Load movement time: t (S) 2.

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

48

] 400 400 500 mm stroke or less m 300 300 L5 600 mm stroke or less 600 mm stroke 200 200 100 100 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 300 300 250 250 Overhang: L6 [mm] Overhang: L6 [mm] 500 mm stroke or less 200 200 600 mm stroke or less m L6 150 150 100 100 600 mm stroke 50 50 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8

Electric Actuator / Slider Type 《 AC Servo Motor 》

Home position return position data (m) PC07 0 -2000(Less than stroke 1000)/ -200(Stroke 1000 or more) Stopper type home position return stopper time (msec) PC09 100 200 Stopper type home position return torque limit value (%) PC10 15 30 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5 98 L1 L2 L3 L4 2.10-34 VQZ100/200/300 Base Mounted Dimensions: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For sub-plate, manifold type 40, 41, 42 P, E port R port Port size 3:Common exhaust type for main and pilot valve Nil: Without sub-plate D: Push-turn locking slotted type P, E port R port Electrical entry (With gasket and screws) 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector 24,12 VDC 100,110, 200, 220 VAC DIN terminal 24, 12, 6, 5, 3 VDC M8 connector

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230 V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

0.55

Type of actuation can be easily changed from normally closed to normally open by changing the direction of a valve and endplate only 180.