Electric Actuator Triple Axis P&P Unit

For detailed information about each part, please refer to information provided by P/A. 2 ) 3 ) 4 ) 5 ) 6 ) 7 ) 8 ) 9 ) 8 Triple Axis P&P Unit Dimensions (reference drawing for assembling) Stroke+240(Table movement range) 40 30 4-M8 x 1.25 thread depth 16 40 Polyurethane stopper 30 110 2-8H7depth10 Home position gauge 200 180 (Refer to 4) (Refer to 4) 110 (Refer to 4) (Refer to 4)

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

150/30 Dust proof ( DIN terminal, M8 connector: IP65) Enclosure Based on IEC529 Note 1) Based on dynamic performance test, JIS B 8374-1981.

Air Slide Table

30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height

Battery-less

500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Rotary Actuator/Vane Type

to 22 2 to 22 40 6.5 to 30 4.5 to 30 3 to 30 4.5 to 30 Symbol: A57 Symbol: A58 Both the long shaft and the short shaft are shortened.

CRBU

show size 30 actuators.)

Table of Contents

BG F 1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature Body size Body size For high pressure 25 30 40 50 60 20 25 30 40 50 60 X430 X440 Low temperature High temperature Thread type Thread type Rc NPT G Rc NPT G Nil N F Nil N F Port size Port size Body size Port size Body size Symbol Port size Symbol 25 30 40 50 60 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04

Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

Integrated Controller

[kg]1 Horizontal 17 25 40 8 26 40 70 30 50 90 100 Vertical 3 6 10 2 8 16 30 3 13 26 46 Pushing force [N]2 3 4 19 to 38 36 to 74 69 to 141 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 Up to 300 15 to 700 8 to 350 4 to 175 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to 400 6 to 200 Speed [mm/s] Stroke range 350 to 400 30 to 900 18 to 600

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Keyway dimensions b l AU Model Port size Rc D (g6) DD (h9) W BA BB SA SC SU SB SD BU SE CU F DU H EU J K MU S U A B C M8 x 1.25 depth 8 156 (189) 0 0.030 62 98 17 17 8.5 13.5 45 M16 x 1.5 48 33 12 15 25 5 25 46 14 11 34 9 15 2.5 14 36 12 5 1/8 CDRA1BSU50 175 (213.5) 199 (243) 259 (325) M10 x 1.5 depth 12 0 0.030 6 76 117 19.5 20 10 14.5 54.5 M20 x 1.5 60 33 12 19 30 30 57 21 13 34 11

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

11 13 15 19 20Single Shaft Type (mm) Keyway dimensions D (g6) DD (h9) Valve dimensions l BA Model U CA F SC A W CB H SD B SA J K SE SB S C VH VJ b M8 x 1.25 depth 8 156 (189) 175 (213.5) 199 (243) 259 (325) 0 0.030 17 CDVRA1BS50 13.5 98 8.5 2.5 12 15 39 13.5 5 62 17 13 36 25 14 25 48 33 5 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 117 10 2.5 12 17 39 20.5 6 76 19.5 14 41 30 21 30

CG1

33 16 13 10 5.5 30 3.2 39.8 Up to 200 54 12 40 20 15 10 6.6 35 4.5 49.4 Up to 200 63.5 14 49 22 18 10 6.6 40 4.5 58.4 Up to 200 Clevis/CG1DN Z 1 to 50st 51 to 100st 10 1to 125st 126 to 200st Bore size (mm) TW TX TY TZ Z ZZ Z ZZ Z ZZ ZZ 20 25 32 40 42 16 28 43.4 143 164 168 189 193 214 42 20 28 48 150 171 175 196 200 221 225 246 48 22 28 59.4 156 180 181 205 206 230 231 255 56 30 30 71.4

Proposals for Energy Saving

Cylinder bore size/Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches /Refer to page 5.3-2 of "Best Pneumatics No. 2" for auto switch related information.

Precision Cylinder Series MTS

241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16

AC

Applicable model AW3000 AW4000 AW4000-06 Model 1/4 1/4 Port size 3/8 3/4 3/8 1/2 How to Order How to Order 30 03 BG3 00 AW X430 30 03 BG3 00 AW X470 Body size For environment at low/high temperatures 3/8 30 40 Body size External metallic part 1/2 1/8 20 30 40 X430 X440 Low temp. High temp.

CM2

M8 x 1.25 M20 x 1.5 9 14 15.5 13 25 5 28 5 15 24 1/8 133 142 20 -X 0 0.033 25 45 8 13 10 30 22 19 62 9 10 30 M10 x 1.25 M26 x 1.5 9 14 19.5 17 25 6 33.5 5.5 15 30 137 146 1/8 26 0 0.033 32 45 8 13 12 30 22 19 64 9 10 30 M10 x 1.25 M26 x 1.5 9 14 19.5 17 25 6 37.5 5.5 15 34.5 139 148 1/8 26 200 0.039 40 50 11 16 14 38 24 30 88 10 15 39 M14 x 1.5 M32 x 2 11 18 21 22 41.2 8 46.5 7 21.5 42.5

Hygienic Design Cylinder Series HY

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Intermediate strokes of 1 mm each can be produced.

CM2

14 24 8 M8 X 1.25 24 25 13 8 41 20 20 33.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 10 30 25 13 8 45 25 26 34.5 37.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 12 25 13 8 45 32 26 21 41.2 M14 X 1.5 21.5 42.5 46.5 22 8 15 7 M32 X 2 11 10 24 30 39 18 38 14 16 11 50 40 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51 to 100 101 to

Membrane Air Dryer

Performance Chart Standard dew point20oC [Symbol: Nil], 15oC [Symbol: H] IDG3, 3H IDG1 Outlet air atmospheric pressure dew point (oC) Outlet air atmospheric pressure dew point (oC) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 P1 = 0.5 MPa P1 = 0.5 MPa 10 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 IDG3 IDG1 30 30 IDG3H 40 40 0 4 8 12 16 0 10 20 30 40 Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min