CG5-S

hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8

Air Slide Table Series MXW

39 48 58 75 97 Mp MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 W W 148 Series MXW Air Slide Table Dynamic Moment Moment due to impact of load at end of stroke.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit n no.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit n no.

MXW

MXW20 MXW25 39 48 58 75 97 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 W W 8-7-2 3 Long Stroke Slide Table Series MXW Dynamic Moment Moment due to impact of load at end of stroke.

Smooth Cylinder

, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

MVGQ

st 20 st 20, 30, 40, 50, 75, 100, 25 M6 x 1.0 15 9 47.5 37.5 12 30 35 88 21 21 32 14 2 42 M6 x 1.0 15.5 26 70 38 86 2 62 76 M6 x 1.0 56 10 125, 150, 175, 200 Series VZ3000 25, 50, 75, 100, 32 M8 x 1.25 20 11 47.5 37.5 16 114 25 26 38 16 35 51 M8 x 1.25 22 30 96 48 112 2 1 80 100 M8 x 1.25 80 5 125, 150, 175, 200 Note 1) It is possible to manufacture the intermediate strokes other than the

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ZPR20 , 57 61 , ZPR25 65 68 .O' ZPR100 10 12 15 24 3<.9 49 20 70 33.9 50 20 71 25 75 6 57 61 57 61 ZPR16D 16 18 16 25 25 76 7 Applicable tube 2PR32 mm . :Appli~I~1IJbe O.t;) i'P .

AC Servo Motor Driver (Network card type ）

(P980) . 20-19 20.4.4 Identification & Maintenance (I&M) . 20-20 20.4.5 Reset To Factory . 20-21 20.5 STATE TRANSITION . 20-22 20.5.1 Basic State Machine . 20-22 20.5.2 FSA state . 20-25 20.5.3 Controlword/Statusword . 20-27 20.5.3.1 Controlword . 20-27 20.5.3.2 Statusword . 20-30 20.6 CONTROL MODE . 20-36 20.6.1 Selection of control mode . 20-36 20.6.2 Control switching . 20-37 20.6.3 Profile

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly 13 14 15 NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 1233.

Free Mount Cylinder Series CU

8 8 8 8 10 12 9 12 17 20 22 29 11 12 13 16 20 24 20.5 22 28 33 43.5 51.5 16 16 19 21.5 22 22.5 18 21 26 29 33 42 10 11 14 16 20 24 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 P Q QA R SA T W Y S 38 36 30 36 40 42 Z 75 79 79.5 93 105 121 S 38 36 40 46 50 52 Z 75 79 89.5 103

Magnetically Coupled Rodless Cylinder

$2 are for 20 to 40.

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SX3000-75-2A-Q . 1 set (Blanking plate assembly part no.) SY3140-5FU-Q . 2 sets (Single solenoid part no.) SY3245-5FU-Q . 1 set (Double solenoid part no.) Stations Symbol Note 02 2 Single wiring specification (Up to 20 solenoids applicable) ... ... 20 20 Note 1) Includes the number of blanking plate assemblies.

Sine Rodless Cylinder Series REA/REB

2 (5.1 + Lo) sin Up to 45 1 Up to 60 0.9 Up to 75 0.8 Up to 90 0.7 Angle k 40 Angle coefficient (k): k = [up to 45 (= )] = 1, [up to 60] = 0.9, [up to 75] = 0.8, [up to 90] = 0.7 Lo: Distance from mounting surface to load center of gravity (cm) 20 36 2.9 + Lo 10 5.25 2.2 + Lo 15 17.5 2.7 + Lo Bore size (mm) Allowable load mass WA (kg) 5.

90

pressure 60 0 15 30 45 60 75 90 40 Suction flow (Port exhaust) Suction flow (Silencer exhaust) 20 Port exhaust Silencer exhaust 0 0 20 40 60 80 100 Suction flow [L/min (ANR)] 6 Series ZK2 Vacuum Pump System Flow-rate Characteristics/ZK2P00 Release Flow-rate Characteristics The graph shows the flow-rate characteristics at different supply pressures when the vacuum break flow adjustment needle

CV/MVGQ

D-B5 D-B64 D-G5NTL 2015 + 50 ( n 2) (n = 2, 4, 6) 2 75 15 10 75 + 55 (n 2) Data 20 + 50 ( n 2) (n = 2, 4, 6) D-B59W 2 20 75 15 10-15-33 Series CVM3 Built-in One-touch Fitting CVM3 Mounting style Bore size For How to Order, refer to page 10-15-31. F Built-in One-touch fitting Specifications One-touch fittings are installed on cylinders.

CG5-S

hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8

SMC Pneumatic Clean Series

, 50, 75, 100, 125,150,200 1/8 25, 50, 75, 100, 125,150,200 250,300 1/4 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size Suction flow rate l/min (ANR) 20/25/32/40 50/63 Bore size (mm) Item 20/25/32/40/50/63 10 20 1.5MPa 1.0MPa 0.05MPa Proof pressure Maximum operating pressure Minimum operating pressure Without auto switch: 10C to 70C With auto switch: 10C